Surface Modification of Nanoporous Anodic Alumina during Self-Catalytic Atomic Layer Deposition of Silicon Dioxide from (3-Aminopropyl)Triethoxysilane
Abstract
:1. Introduction
2. Materials and Methods
2.1. Materials
2.2. SEM Characterization
2.3. Chemical Surface Characterization
2.4. Electrochemical Impedance Spectroscopy Measurements
2.5. Optical Characterizations
3. Results and Discussion
3.1. SEM Characterization
3.2. Chemical Surface Characterization
3.3. Electrochemical Impedance Spectroscopy Measurements
3.4. Optical Characterization
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Sample | C (%) | O (%) | N (%) | Si (%) | Al (%) |
---|---|---|---|---|---|
Ox+SiO2/APTES | 12.8 | 55.3 | 0.7 | 26.9 | 4.0 |
Ox+SiO2/APTES/O3 | 8.3 | 59.3 | - | 28.1 | 3.9 |
(A) | - | - | - | - | |
---|---|---|---|---|---|
Sample | CA (%) | CB (%) | CC (%) | CD (%) | |
B.E. (eV) | 285.0 | 286.6 | 288.9 | 289.4 | |
- | CC/CH | CO/CN/CSi | C=O | O–C=O | |
Ox+SiO2/APTES | Area % | 81.3 | 16.43 | 2.2 | - |
A.C. % | 10.4 | 2.1 | 0.3 | - | |
Ox+SiO2/APTES/O3 | Area % | 81.7 | 13.1 | 0.7 | 4.5 |
A.C. % | 6.8 | 1.1 | 0.06 | 0.37 | |
(B) | - | - | - | - | |
Sample | OA (%) | OB (%) | OC (%) | ||
B.E. (eV) | 531.6 | 532.6 | 533.9 | ||
- | Al–O | Si–O/SiO2/O–C=O* | O*–C=O | ||
Ox+SiO2/APTES | Area % | 10.3 | 89.7 | - | |
A.C. % | 5.7 | 49.6 | - | ||
Ox+SiO2/APTES/O3 | Area % | 10.5 | 84.5 | 5.0 | |
A.C. % | 6.2 | 50.1 | 3.0 |
Sample | Ox+SiO2/APTES | Ox+SiO2/APTES/O3 |
---|---|---|
<n> 250–1700 nm | 1.28 ± 0.04 | 1.43 ± 0.06 |
<εr> 250–1700 nm | 1.38 ± 0.20 | 1.71 ± 0.20 |
<n> 250–800 nm | 1.25 ± 0.03 | 1.38 ± 0.04 |
<εr> 250–800 nm | 1.46 ± 0.07 | 1.72 ± 0.10 |
<n> 800–1700 nm | 1.31 ± 0.04 | 1.46 ± 0.04 |
<εr> 800–1700 nm | 1.33 ± 0.23 | 1.71 ± 0.24 |
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González, A.S.; Vega, V.; Cuevas, A.L.; Yuso, M.d.V.M.d.; Prida, V.M.; Benavente, J. Surface Modification of Nanoporous Anodic Alumina during Self-Catalytic Atomic Layer Deposition of Silicon Dioxide from (3-Aminopropyl)Triethoxysilane. Materials 2021, 14, 5052. https://doi.org/10.3390/ma14175052
González AS, Vega V, Cuevas AL, Yuso MdVMd, Prida VM, Benavente J. Surface Modification of Nanoporous Anodic Alumina during Self-Catalytic Atomic Layer Deposition of Silicon Dioxide from (3-Aminopropyl)Triethoxysilane. Materials. 2021; 14(17):5052. https://doi.org/10.3390/ma14175052
Chicago/Turabian StyleGonzález, Ana Silvia, Víctor Vega, Ana Laura Cuevas, María del Valle Martínez de Yuso, Víctor M. Prida, and Juana Benavente. 2021. "Surface Modification of Nanoporous Anodic Alumina during Self-Catalytic Atomic Layer Deposition of Silicon Dioxide from (3-Aminopropyl)Triethoxysilane" Materials 14, no. 17: 5052. https://doi.org/10.3390/ma14175052