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Near-Field Thermometry Sensor Based on the Thermal Resonance of a Microcantilever in Aqueous Medium

Department of Mechanical, Aerospace, and Biomedical Engineering, University of Tennessee, Knoxville, Tennessee, USA 37996
School of Mechanical Engineering, MEMS/Nano Fabrication Center, Pusan National University, Busan 609-735, Korea
Author to whom correspondence should be addressed.
Sensors 2007, 7(12), 3156-3165;
Received: 1 November 2007 / Accepted: 4 December 2007 / Published: 6 December 2007
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A new concept using a near-field thermometry sensor is presented, employing atipless microcantilever experimentally validated for an aqueous medium within approximatelyone cantilever width from the solid interface. By correlating the thermal Brownian vibratingmotion of the microcantilever with the surrounding liquid temperature, the near-fieldmicroscale temperature distributions at the probing site are determined at separation distancesof z = 5, 10, 20, and 40 μm while the microheater temperature is maintained at 50°C, 70°C, or90°C. In addition, the near-field correction of the correlation is discussed to account for thequenched cantilever vibration frequencies, which are quenched due to the no-slip solid-wallinterference. Higher thermal sensitivity and spatial resolution is expected when the vibrationfrequencies increase with a relatively short and thick cantilever and the dimensions of themicrocantilever are reduced. Use of the microcantilever thermometry sensor can also reduce thecomplexity and mitigate the high cost associated with existing microfabricated thermocouplesor thermoresistive sensors. View Full-Text
Keywords: microcantilever; resonance; near-field; thermometry. microcantilever; resonance; near-field; thermometry.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Kim, S.; Kim, K.C.; Kihm, K.D. Near-Field Thermometry Sensor Based on the Thermal Resonance of a Microcantilever in Aqueous Medium. Sensors 2007, 7, 3156-3165.

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