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Volume 25
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Article

Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain

by
Haoran Zhao
1,2,
Qi Wang
2,
Jianyu Du
2,
Lang Chen
2,
Wen Yue
1,3 and
Wei Wang
2,4,*
1
School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083, China
2
School of Integrated Circuits, Peking University, Beijing 100871, China
3
Zhengzhou Institute, China University of Geosciences (Beijing), Zhengzhou 451283, China
4
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing 100871, China
*
Author to whom correspondence should be addressed.
Sensors 2025, 25(3), 607; https://doi.org/10.3390/s25030607
Submission received: 24 December 2024 / Revised: 18 January 2025 / Accepted: 20 January 2025 / Published: 21 January 2025
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

This paper presents a novel Ku-band parasitic patch antenna based on MEMS technology. The antenna consists of two substrates that are bonded together. The lower substrate houses the main patch and the ground layer, while the upper substrate supports the parasitic patch. To minimize the dielectric loss, the parasitic patch is fabricated using a double-layer suspended film process, combining parylene C and Spin-on-glass (SOG) materials. The two substrates are also bonded using SOG. The proposed antenna achieves a measured bandwidth of 30% (11.1~15.01 GHz), a peak gain of 8.57 dBi, and a compact size of 0.87 × 0.87 × 0.09 λ03.
Keywords: parasitic patch; microstrip antenna; quartz; dielectric loss; MEMS parasitic patch; microstrip antenna; quartz; dielectric loss; MEMS

Share and Cite

MDPI and ACS Style

Zhao, H.; Wang, Q.; Du, J.; Chen, L.; Yue, W.; Wang, W. Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain. Sensors 2025, 25, 607. https://doi.org/10.3390/s25030607

AMA Style

Zhao H, Wang Q, Du J, Chen L, Yue W, Wang W. Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain. Sensors. 2025; 25(3):607. https://doi.org/10.3390/s25030607

Chicago/Turabian Style

Zhao, Haoran, Qi Wang, Jianyu Du, Lang Chen, Wen Yue, and Wei Wang. 2025. "Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain" Sensors 25, no. 3: 607. https://doi.org/10.3390/s25030607

APA Style

Zhao, H., Wang, Q., Du, J., Chen, L., Yue, W., & Wang, W. (2025). Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain. Sensors, 25(3), 607. https://doi.org/10.3390/s25030607

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