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Journal: Sensors, 2024
Volume: 24
Number: 640

Article: Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process
Authors: by Tiancai Wang, Hongling Peng, Peng Cao, Qiandong Zhuang, Jie Deng, Jian Chen and Wanhua Zheng
Link: https://www.mdpi.com/1424-8220/24/2/640

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