Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

Khan, Imran; Ranji, Ahmad Rahbar; Nagesh, Gnanesh; Ting, David S.-K.; Ahamed, Mohammed Jalal

doi:10.3390/s23229234

Open AccessArticle

Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

by

Imran Khan

,

Ahmad Rahbar Ranji

,

Gnanesh Nagesh

,

David S.-K. Ting

and

Mohammed Jalal Ahamed

^*

MicroNano Mechatronics Laboratory, Department of Mechanical, Automotive and Materials Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada

^*

Author to whom correspondence should be addressed.

Sensors 2023, 23(22), 9234; https://doi.org/10.3390/s23229234

Submission received: 11 October 2023 / Revised: 6 November 2023 / Accepted: 13 November 2023 / Published: 16 November 2023

(This article belongs to the Section Physical Sensors)

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Abstract

This paper presents a novel single-ring resonator design and experimentally demonstrates its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor at its center connected to an outside ring via inner ring-shaped springs. The mode shapes and frequency of the ring resonator were determined numerically and compared with analytical approaches, and the minimum split frequency was observed for the n = 3 mode of vibration. Numerical and analytical methods were used to determine the resonance frequencies, pull-in voltage, resonance frequency shift and harmonic response of the ring resonator for different silicon orientations. The split frequency in the n = 3 mode of vibration increases by the applied DC bias voltage almost by the same amount for all types of silicon. When an AC voltage with a 180-degree phase is applied to two opposite electrodes, the ring has two resonance frequencies in mode n = 2, and when the AC voltage applied to two opposite electrodes is in the same phase, the ring has one resonance frequency regardless of the crystal orientation of silicon. Prototypes were fabricated using a double silicon-on-insulator-based wafer fabrication technique and were tested to verify the resonator performance.

Keywords: finite element analysis; MEMS; ring resonator; mode matching; gyroscope; inertial sensor

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MDPI and ACS Style

Khan, I.; Ranji, A.R.; Nagesh, G.; Ting, D.S.-K.; Ahamed, M.J. Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors. Sensors 2023, 23, 9234. https://doi.org/10.3390/s23229234

AMA Style

Khan I, Ranji AR, Nagesh G, Ting DS-K, Ahamed MJ. Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors. Sensors. 2023; 23(22):9234. https://doi.org/10.3390/s23229234

Chicago/Turabian Style

Khan, Imran, Ahmad Rahbar Ranji, Gnanesh Nagesh, David S.-K. Ting, and Mohammed Jalal Ahamed. 2023. "Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors" Sensors 23, no. 22: 9234. https://doi.org/10.3390/s23229234

APA Style

Khan, I., Ranji, A. R., Nagesh, G., Ting, D. S.-K., & Ahamed, M. J. (2023). Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors. Sensors, 23(22), 9234. https://doi.org/10.3390/s23229234

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Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

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