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Volume 23
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10.3390/s23136061
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Article

Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes

by
Yuzhen Guo
1,
Zengxing Zhang
2,3,*,
Bin Yao
1,
Jin Chai
4,
Shiqiang Zhang
1,
Jianwei Liu
1,
Zhou Zhao
1 and
Chenyang Xue
1,3,*
1
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
2
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
3
Tan Kah Kee Innovation Laboratory, Xiamen 361005, China
4
Xiamen Zehuo Industry Digital Research Institute Co., Ltd., Xiamen 361005, China
*
Authors to whom correspondence should be addressed.
Sensors 2023, 23(13), 6061; https://doi.org/10.3390/s23136061
Submission received: 9 June 2023 / Revised: 24 June 2023 / Accepted: 27 June 2023 / Published: 30 June 2023
(This article belongs to the Section Chemical Sensors)
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Abstract

In this work, a capacitive pH sensor consisting of Ta2O5 functional film is designed and fabricated by employing MEMS-based procedures. The Ta2O5 thin film has an amorphous microstructure, and its surface roughness is less than 3.17 nm. A signal processing circuit and a software filtering algorithm are also designed to measure the pH value, thus improving the detection accuracy and anti-interference ability. Good linearity (R2 = 0.99904) and sensitivity (63.12 mV/pH) are recorded for the proposed sensing element in the range of pH 2~12. In addition, the sensor’s drift and hysteresis are equal to 5.1 mV and 5.8 mV, respectively. The enhanced sensing performance in combination with the facile miniaturization process, low fabrication cost, and suitability for mass production render the fabricated sensor attractive for applications where pH change measurements in a water environment are required.
Keywords: Ta2O5; capacitive pH sensor; potentiometric method; miniaturization Ta2O5; capacitive pH sensor; potentiometric method; miniaturization

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MDPI and ACS Style

Guo, Y.; Zhang, Z.; Yao, B.; Chai, J.; Zhang, S.; Liu, J.; Zhao, Z.; Xue, C. Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors 2023, 23, 6061. https://doi.org/10.3390/s23136061

AMA Style

Guo Y, Zhang Z, Yao B, Chai J, Zhang S, Liu J, Zhao Z, Xue C. Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors. 2023; 23(13):6061. https://doi.org/10.3390/s23136061

Chicago/Turabian Style

Guo, Yuzhen, Zengxing Zhang, Bin Yao, Jin Chai, Shiqiang Zhang, Jianwei Liu, Zhou Zhao, and Chenyang Xue. 2023. "Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes" Sensors 23, no. 13: 6061. https://doi.org/10.3390/s23136061

APA Style

Guo, Y., Zhang, Z., Yao, B., Chai, J., Zhang, S., Liu, J., Zhao, Z., & Xue, C. (2023). Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors, 23(13), 6061. https://doi.org/10.3390/s23136061

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