Order Article Reprints

Guo Y, Zhang Z, Yao B, Chai J, Zhang S, Liu J, Zhao Z, Xue C. Fabrication and Performance of a Ta₂O₅ Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors. 2023; 23(13):6061. https://doi.org/10.3390/s23136061

Guo, Yuzhen, Zengxing Zhang, Bin Yao, Jin Chai, Shiqiang Zhang, Jianwei Liu, Zhou Zhao, and Chenyang Xue. 2023. "Fabrication and Performance of a Ta₂O₅ Thin Film pH Sensor Manufactured Using MEMS Processes" Sensors 23, no. 13: 6061. https://doi.org/10.3390/s23136061

Guo, Y., Zhang, Z., Yao, B., Chai, J., Zhang, S., Liu, J., Zhao, Z., & Xue, C. (2023). Fabrication and Performance of a Ta₂O₅ Thin Film pH Sensor Manufactured Using MEMS Processes. Sensors, 23(13), 6061. https://doi.org/10.3390/s23136061