Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

Liu, Tianning; Dangi, Ajay; Kim, Jeong Nyeon; Kothapalli, Sri-Rajasekhar; Choi, Kyusun; Trolier-McKinstry, Susan; Jackson, Thomas

doi:10.3390/s21031014

Open AccessCommunication

Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

by

Tianning Liu

^1,*

,

Ajay Dangi

²,

Jeong Nyeon Kim

³,

Sri-Rajasekhar Kothapalli

²

,

Kyusun Choi

¹,

Susan Trolier-McKinstry

^1,4 and

Thomas Jackson

¹

School of Electrical Engineering and Computer Science, Penn State University, University Park, PA 16802, USA

²

Department of Biomedical Engineering, Penn State University, University Park, PA 16802, USA

³

Department of Engineering Science and Mechanics, Penn State University, University Park, PA 16802, USA

⁴

Department of Materials Science and Engineering, Penn State University, University Park, PA 16802, USA

^*

Author to whom correspondence should be addressed.

Sensors 2021, 21(3), 1014; https://doi.org/10.3390/s21031014

Submission received: 11 December 2020 / Revised: 22 January 2021 / Accepted: 25 January 2021 / Published: 2 February 2021

(This article belongs to the Special Issue Piezoelectric Micromachined Ultrasound Transducer (PMUT) Devices: Sensing, Actuation Communication and Imaging in the µ-Scale)

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Abstract

We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch–catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at −6 dB were measured by hydrophone.

Keywords: flexible transducer; PZT pMUT; thin-film transducer; flexible PZT; flexible pMUT; solution-cast polyimide; anisotropic conductive film

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MDPI and ACS Style

Liu, T.; Dangi, A.; Kim, J.N.; Kothapalli, S.-R.; Choi, K.; Trolier-McKinstry, S.; Jackson, T. Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates. Sensors 2021, 21, 1014. https://doi.org/10.3390/s21031014

AMA Style

Liu T, Dangi A, Kim JN, Kothapalli S-R, Choi K, Trolier-McKinstry S, Jackson T. Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates. Sensors. 2021; 21(3):1014. https://doi.org/10.3390/s21031014

Chicago/Turabian Style

Liu, Tianning, Ajay Dangi, Jeong Nyeon Kim, Sri-Rajasekhar Kothapalli, Kyusun Choi, Susan Trolier-McKinstry, and Thomas Jackson. 2021. "Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates" Sensors 21, no. 3: 1014. https://doi.org/10.3390/s21031014

APA Style

Liu, T., Dangi, A., Kim, J. N., Kothapalli, S.-R., Choi, K., Trolier-McKinstry, S., & Jackson, T. (2021). Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates. Sensors, 21(3), 1014. https://doi.org/10.3390/s21031014

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

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Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

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