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Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors

1
Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan
2
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(8), 1750; https://doi.org/10.3390/s19081750
Received: 5 March 2019 / Revised: 4 April 2019 / Accepted: 6 April 2019 / Published: 12 April 2019
(This article belongs to the Special Issue Advanced CMOS Image Sensors and Emerging Applications)
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Abstract

We demonstrate the multiband color filtering of a standard RGB color and a complementary CMY color by a plasmonic color filter, composed of concentric corrugated metallic thin film rings. The surface plasmon resonance is excited by the periodic corrugation, and the coupled light is transmitted through the central subwavelength aperture. Color selectivity is achieved not only in the visible but also in the near-infrared (NIR) region. Therefore, simultaneous imaging with visible and NIR can be realized by the integration of plasmonic color filters with sensors. We investigate the angle of incidence dependence of the transmission color selectivity and the color purity of the fabricated plasmonic color filter array. View Full-Text
Keywords: surface plasmon; color filter; multiband; image sensors; metallic thin film surface plasmon; color filter; multiband; image sensors; metallic thin film
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Miyamichi, A.; Ono, A.; Kagawa, K.; Yasutomi, K.; Kawahito, S. Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors. Sensors 2019, 19, 1750.

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