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Finite Element Analysis for Surface Acoustic Wave Device Characteristic Properties and Sensitivity

1
James A Haley VA Hospital, Tampa, FL 33612, USA
2
Center for Research and Education in Nanobioengineering, University of South Florida, Tampa, FL 33612, USA
3
Department of Internal Medicine and Pharmacy Graduate Programs, University of South Florida, Tampa, FL 33612, USA
4
Department of Molecular Medicine, University of South Florida, Tampa, FL 33612, USA
5
Microfluidics and Acoustics Laboratory, Department of Mechanical Engineering, College of Engineering, University of South Florida, Tampa, FL 33610, USA
6
Department of Electrical Engineering, University of South Florida, Tampa, FL 33610, USA
*
Authors to whom correspondence should be addressed.
Sensors 2019, 19(8), 1749; https://doi.org/10.3390/s19081749
Received: 15 February 2019 / Revised: 4 April 2019 / Accepted: 5 April 2019 / Published: 12 April 2019
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors 2019)
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Abstract

The most vital step in the development of novel and existing surface acoustic wave (SAW)-based sensors and transducers is their design and optimization. Demand for SAW devices has been steadily increasing due to their low cost, portability, and versatility in electronics, telecommunications, and biosensor applications. However, a full characterization of surface acoustic wave biosensors in a three-dimensional (3D) finite element model has not yet been developed. In this study, a novel approach is developed for analyzing shear horizontal Love wave resonator devices. The developed modeling methodology was verified using fabricated devices. A thorough analysis of the 3D model and the experimental device was performed in this study including scattering parameters (S-parameters), reflection coefficient parameters, transmission parameters, and phase velocity. The simulated results will be used as a design guideline for future device design and optimization, which has thus far resulted in close matching between prediction and experimental results. This manuscript is the first to demonstrate a 3D finite element model to correlate the sensitivity of the SAW device with the magnitude of the phase shift, the real and imaginary part of the response, insertion loss, and the frequency shift. The results show that the imaginary part of the response shift has a higher sensitivity compared to other parameters. View Full-Text
Keywords: surface acoustic wave (SAW); finite element method (FEM); sensitivity; IrO2; ZnO surface acoustic wave (SAW); finite element method (FEM); sensitivity; IrO2; ZnO
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Wang, T.; Green, R.; Guldiken, R.; Wang, J.; Mohapatra, S.; Mohapatra, S.S. Finite Element Analysis for Surface Acoustic Wave Device Characteristic Properties and Sensitivity. Sensors 2019, 19, 1749.

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