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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

1
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany
2
Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, D-38106 Braunschweig, Germany
3
Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6, D-38106 Braunschweig, Germany
4
CiS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Straße 14, D-99099 Erfurt, Germany
5
Breitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, Germany
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(6), 1410; https://doi.org/10.3390/s19061410
Received: 1 February 2019 / Revised: 13 March 2019 / Accepted: 18 March 2019 / Published: 22 March 2019
(This article belongs to the Special Issue Cantilever Sensor)

Abstract

During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the first results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological filtering of the measured profiles and, thus, for accurate form measurements. To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 µm radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the first measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements. View Full-Text
Keywords: cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Brand, U.; Xu, M.; Doering, L.; Langfahl-Klabes, J.; Behle, H.; Bütefisch, S.; Ahbe, T.; Peiner, E.; Völlmeke, S.; Frank, T.; Mickan, B.; Kiselev, I.; Hauptmannl, M.; Drexel, M. Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors 2019, 19, 1410.

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