Article Versions Notes

Brand U, Xu M, Doering L, Langfahl-Klabes J, Behle H, Bütefisch S, Ahbe T, Peiner E, Völlmeke S, Frank T, et al. Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors. 2019; 19(6):1410. https://doi.org/10.3390/s19061410

Brand, Uwe, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, and et al. 2019. "Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm" Sensors 19, no. 6: 1410. https://doi.org/10.3390/s19061410

Brand, U., Xu, M., Doering, L., Langfahl-Klabes, J., Behle, H., Bütefisch, S., Ahbe, T., Peiner, E., Völlmeke, S., Frank, T., Mickan, B., Kiselev, I., Hauptmannl, M., & Drexel, M. (2019). Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors, 19(6), 1410. https://doi.org/10.3390/s19061410