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Journal: Sensors, 2019
Volume: 19
Number: 1410

Article: Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
Authors: by Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, Bodo Mickan, Ilia Kiselev, Michael Hauptmannl and Michael Drexel
Link: https://www.mdpi.com/1424-8220/19/6/1410

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