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Journal: Sensors, 2019
Volume: 19
Number: 2816
Article:
An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method
Authors:
by
Hsiu-An Tsai and Yu-Lung Lo
Link:
https://www.mdpi.com/1424-8220/19/12/2816
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