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Journal: SensorsVolume: 19Number: 2816
Article: An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method
  • Authors:
  • Hsiu-An Tsai1,2 and
  • Yu-Lung Lo1,*
Link: https://www.mdpi.com/1424-8220/19/12/2816

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