An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method
Tsai, H.-A.; Lo, Y.-L. An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method. Sensors 2019, 19, 2816. https://doi.org/10.3390/s19122816
Tsai H-A, Lo Y-L. An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method. Sensors. 2019; 19(12):2816. https://doi.org/10.3390/s19122816
Chicago/Turabian StyleTsai, Hsiu-An, and Yu-Lung Lo. 2019. "An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method" Sensors 19, no. 12: 2816. https://doi.org/10.3390/s19122816

