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Sensors 2016, 16(10), 1598;

Fast Industrial Inspection of Optical Thin Film Using Optical Coherence Tomography

School of Electronics Engineering, College of IT Engineering, Kyungpook National University, 80 Daehak-ro, Bukgu, Daegu 41566, Korea
Oz-tec Co. Ltd., Office 901, IT Convergence Industrial Building, 47 Gyeongdae-ro, 17-gil, Bukgu, Daegu 41566, Korea
Author to whom correspondence should be addressed.
Academic Editors: Changzhi Li, Roberto Gómez-García and José-María Muñoz-Ferreras
Received: 1 June 2016 / Revised: 19 September 2016 / Accepted: 22 September 2016 / Published: 28 September 2016
(This article belongs to the Special Issue Non-Contact Sensing)
Full-Text   |   PDF [7934 KB, uploaded 28 September 2016]   |  


An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse (fast) scanning, while a stable linear motorized translational stage was used for lateral (slow) scanning. The cross-sectional and volumetric images of an optical thin film sample were acquired to detect the defects in glass and other layers that are difficult to observe using visual inspection methods. The rapid inspection enabled by this setup led to the early detection of product defects on the manufacturing line, resulting in a significant improvement in the quality assurance of industrial products. View Full-Text
Keywords: OCT; LCD; optical thin film; industrial inspection; GPU OCT; LCD; optical thin film; industrial inspection; GPU

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Shirazi, M.F.; Park, K.; Wijesinghe, R.E.; Jeong, H.; Han, S.; Kim, P.; Jeon, M.; Kim, J. Fast Industrial Inspection of Optical Thin Film Using Optical Coherence Tomography. Sensors 2016, 16, 1598.

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