Sensors 2014, 14(6), 9505-9521; https://doi.org/10.3390/s140609505
A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications
1
DTU Nanotech, Technical University of Denmark, Oersteds Plads, Bldg 345E, 2800 Kgs. Lyngby, Denmark
2
Dipartimento di Elettronica e Informazione, Politecnico di Milano, Piazza Leonardo da Vinci 32, I-20133 Milano, Italy
3
The MacDiarmid Institute for Advanced Materials and Nanotechnology, Biomolecular Interaction Centre, School of Biological Sciences, University of Canterbury, Private Bag 4800, Christchurch 8140, New Zealand
*
Author to whom correspondence should be addressed.
Received: 20 January 2014 / Revised: 15 May 2014 / Accepted: 22 May 2014 / Published: 28 May 2014
(This article belongs to the Special Issue On-Chip Sensors)
Abstract
In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top. View Full-Text
Graphical abstract
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MDPI and ACS Style
Dimaki, M.; Vergani, M.; Heiskanen, A.; Kwasny, D.; Sasso, L.; Carminati, M.; Gerrard, J.A.; Emneus, J.; Svendsen, W.E. A Compact Microelectrode Array Chip with Multiple Measuring Sites for Electrochemical Applications. Sensors 2014, 14, 9505-9521.