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Journal: Molecules, 2019
Volume: 24
Number: 3882
Article:
Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/Mn2O3−xN/Cu Integration
Authors:
by
Yi-Lung Cheng, Yu-Lu Lin, Chih-Yen Lee, Giin-Shan Chen and Jau-Shiung Fang
Link:
https://www.mdpi.com/1420-3049/24/21/3882
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