- Article
Epitaxial Defects in Nanoscale InP Fin Structures Revealed by Wet-Chemical Etching
- Dennis van Dorp,
- Manuel Mannarino,
- Sophia Arnauts,
- Hugo Bender,
- Clement Merckling,
- Alain Moussa,
- Wilfried Vandervorst and
- Andreas Schulze
In this work, we report on wet-chemical defect revealing in InP fin structures relevant for device manufacturing. Both HCl and HBr solutions were explored using bulk InP as a reference. A distinct difference in pit morphology was observed between the...