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Keywords = optically induced dielectrophoresis (ODEP)

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14 pages, 9296 KiB  
Article
Combination of an Optically Induced Dielectrophoresis (ODEP) Mechanism and a Laminar Flow Pattern in a Microfluidic System for the Continuous Size-Based Sorting and Separation of Microparticles
by Po-Yu Chu, Ai-Yun Wu, Kun-Yu Tsai, Chia-Hsun Hsieh and Min-Hsien Wu
Biosensors 2024, 14(6), 297; https://doi.org/10.3390/bios14060297 - 6 Jun 2024
Cited by 2 | Viewed by 1519
Abstract
Optically induced dielectrophoresis (ODEP)-based microparticle sorting and separation is regarded as promising. However, current methods normally lack the downstream process for the transportation and collection of separated microparticles, which could limit its applications. To address this issue, an ODEP microfluidic chip encompassing three [...] Read more.
Optically induced dielectrophoresis (ODEP)-based microparticle sorting and separation is regarded as promising. However, current methods normally lack the downstream process for the transportation and collection of separated microparticles, which could limit its applications. To address this issue, an ODEP microfluidic chip encompassing three microchannels that join only at the central part of the microchannels (i.e., the working zone) was designed. During operation, three laminar flows were generated in the zone, where two dynamic light bar arrays were designed to sort and separate PS (polystyrene) microbeads of different sizes in a continuous manner. The separated PS microbeads were then continuously transported in laminar flows in a partition manner for the final collection. The results revealed that the method was capable of sorting and separating PS microbeads in a high-purity manner (e.g., the microbead purity values were 89.9 ± 3.7, 88.0 ± 2.5, and 92.8 ± 6.5% for the 5.8, 10.8, and 15.8 μm microbeads harvested, respectively). Overall, this study demonstrated the use of laminar flow and ODEP to achieve size-based sorting, separation, and collection of microparticles in a continuous and high-performance manner. Apart from the demonstration, this method can also be utilized for size-based sorting and the separation of other biological or nonbiological microparticles. Full article
(This article belongs to the Section Optical and Photonic Biosensors)
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3 pages, 960 KiB  
Abstract
Optically Induced Dielectrophoresis and Machine Learning Algorithms for the Identification of the Circulating Tumor Cells
by Joanna Filippi, Francesca Corsi, Paola Casti, Gianni Antonelli, Michele D’Orazio, Francesco Capradossi, Rosamaria Capuano, Giorgia Curci, Lina Ghibelli, Arianna Mencattini and Eugenio Martinelli
Proceedings 2024, 97(1), 71; https://doi.org/10.3390/proceedings2024097071 - 21 Mar 2024
Viewed by 1080
Abstract
Detecting circulating tumor cells (CTCs) is a challenge in cancer research. Their dissemination into the blood stream represents a crucial event in the formation of the metastases from the primary tumor. For this reason, targeting CTCs in human liquid biopsies is a warning [...] Read more.
Detecting circulating tumor cells (CTCs) is a challenge in cancer research. Their dissemination into the blood stream represents a crucial event in the formation of the metastases from the primary tumor. For this reason, targeting CTCs in human liquid biopsies is a warning event for cancer invasiveness, progression, and prognosis. In this regard, by means of the optically induced dielectrophoresis (ODEP) technique, we investigated the response to the electric field, at different frequencies, of human prostatic carcinoma PC3 cells, which mimic CTCs derived from prostate cancer, and human leukemia monocytic THP-1 cells, which simulate circulating monocytes. The obtained spectra of the cell motion descriptors represent the unique identification signature of each cell type. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
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17 pages, 2946 KiB  
Article
The Utilization of Optically Induced Dielectrophoresis (ODEP)-Based Cell Manipulation in a Microfluidic System for the Purification and Sorting of Circulating Tumor Cells (CTCs) with Different Sizes
by Po-Yu Chu, Thi Ngoc Anh Nguyen, Ai-Yun Wu, Po-Shuan Huang, Kai-Lin Huang, Chia-Jung Liao, Chia-Hsun Hsieh and Min-Hsien Wu
Micromachines 2023, 14(12), 2170; https://doi.org/10.3390/mi14122170 - 29 Nov 2023
Cited by 7 | Viewed by 1893
Abstract
The analysis of circulating tumor cells (CTCs) at the molecular level holds great promise for several clinical applications. For this goal, the harvest of high-purity, size-sorted CTCs with different subtypes from a blood sample are important. For this purpose, a two-step CTC isolation [...] Read more.
The analysis of circulating tumor cells (CTCs) at the molecular level holds great promise for several clinical applications. For this goal, the harvest of high-purity, size-sorted CTCs with different subtypes from a blood sample are important. For this purpose, a two-step CTC isolation protocol was proposed, by which the immunomagnetic beads-based cell separation was first utilized to remove the majority of blood cells. After that, an optically induced dielectrophoresis (ODEP) microfluidic system was developed to (1) purify the CTCs from the remaining magnetic microbeads-bound blood cells and to (2) sort and separate the CTCs with different sizes. In this study, the ODEP microfluidic system was designed and fabricated. Moreover, its optimum operation conditions and performance were explored. The results exhibited that the presented technique was able to purify and sort the cancer cells with two different sizes from a tested cell suspension in a high-purity (93.5% and 90.1% for the OECM 1 and HA22T cancer cells, respectively) manner. Overall, this study presented a technique for the purification and sorting of cancer cells with different sizes. Apart from this application, the technique is also useful for other applications in which the high-purity and label-free purification and sorting of cells with different sizes is required. Full article
(This article belongs to the Special Issue Application of Microfluidic Technology in Bioengineering)
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16 pages, 5570 KiB  
Article
Development of an Optically Induced Dielectrophoresis (ODEP) Microfluidic System for High-Performance Isolation and Purification of Bacteria
by Po-Yu Chu, Chia-Ming Yang, Kai-Lin Huang, Ai-Yun Wu, Chia-Hsun Hsieh, A-Ching Chao and Min-Hsien Wu
Biosensors 2023, 13(11), 952; https://doi.org/10.3390/bios13110952 - 25 Oct 2023
Cited by 3 | Viewed by 2513
Abstract
For the rapid detection of bacteria in a blood sample, nucleic acid amplification-based assays are believed to be promising. Nevertheless, the nucleic acids released from the dead blood cells or bacteria could affect the assay performance. This highlights the importance of the isolation [...] Read more.
For the rapid detection of bacteria in a blood sample, nucleic acid amplification-based assays are believed to be promising. Nevertheless, the nucleic acids released from the dead blood cells or bacteria could affect the assay performance. This highlights the importance of the isolation of live bacteria from blood samples. To address this issue, this study proposes a two-step process. First, a blood sample was treated with the immuno-magnetic microbeads-based separation to remove the majority of blood cells. Second, an optically induced dielectrophoresis (ODEP) microfluidic system with an integrated dynamic circular light image array was utilized to further isolate and purify the live bacteria from the remaining blood cells based on their size difference. In this work, the ODEP microfluidic system was developed. Its performance for the isolation and purification of bacteria was evaluated. The results revealed that the method was able to harvest the live bacteria in a high purity (90.5~99.2%) manner. Overall, the proposed method was proven to be capable of isolating and purifying high-purity live bacteria without causing damage to the co-existing cells. This technical feature was found to be valuable for the subsequent nucleic-acid-based bacteria detection, in which the interferences caused by the nontarget nucleic acids could be eliminated. Full article
(This article belongs to the Special Issue New Biosensors and Nanosensors)
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14 pages, 1232 KiB  
Article
Repulsive Force for Micro- and Nano-Non-Contact Manipulation
by Amélie Cot, Patrick Rougeot, Sophie Lakard, Michaël Gauthier and Jérôme Dejeu
Appl. Sci. 2023, 13(6), 3886; https://doi.org/10.3390/app13063886 - 18 Mar 2023
Cited by 1 | Viewed by 2150
Abstract
Non-contact positioning of micro-objects using electric fields has been widely explored, based on several physical principles such as electrophoresis, dielectrophoresis (DEP) or optical dielectrophoresis (ODEP), in which the actuation force is induced by an electric charge or an electric dipole placed in an [...] Read more.
Non-contact positioning of micro-objects using electric fields has been widely explored, based on several physical principles such as electrophoresis, dielectrophoresis (DEP) or optical dielectrophoresis (ODEP), in which the actuation force is induced by an electric charge or an electric dipole placed in an electric field. In this paper, we introduce a new way to control charges in non-contact positioning of micro-objects using chemical functionalization (3-aminopropyl) triethoxysilane—APTES) able to localize charges on a substrate and/or on a micro-object. We demonstrate that this functionalization in a liquid with a low ionic strength is able to concentrate a significant amount of electric charges on surfaces generating an electric field over a long distance (about 10 microns), also called a large exclusion zone (EZ). A model is proposed and validated with electrostatic force measurements between substrate and microparticles (diameter up to 40 µm). We demonstrate that the magnitude of the force and the force range decrease rapidly when the ionic strength of the medium increases. Based on the proposed model, we show that this new way to localize charges on micro-objects may be used for non-contact positioning. Full article
(This article belongs to the Special Issue Advanced Polymers Synthesis, Analysis and Applications)
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13 pages, 2353 KiB  
Article
Virtual Filter Membranes in a Microfluidic System for Sorting and Separating Size-Based Micro Polystyrene Beads by Illumination Intensity Design in Optically Induced Dielectrophoresis (ODEP)
by Chia-Ming Yang, Ai-Yun Wu, Jian-Cyun Yu, Po-Yu Chu, Chia-Hsun Hsieh and Min-Hsien Wu
Chemosensors 2022, 10(12), 540; https://doi.org/10.3390/chemosensors10120540 - 16 Dec 2022
Cited by 3 | Viewed by 2507
Abstract
In biomedical diagnosis, the efficient separation and purification of specific targets from clinical samples is the desired first step. Herein, the concept of virtual filter membranes based on optically-induced dielectrophoresis (ODEP) manipulation in a microfluidic channel is proposed as a light screening membrane [...] Read more.
In biomedical diagnosis, the efficient separation and purification of specific targets from clinical samples is the desired first step. Herein, the concept of virtual filter membranes based on optically-induced dielectrophoresis (ODEP) manipulation in a microfluidic channel is proposed as a light screening membrane for the separation of polystyrene (PS) microparticles with three different diameters of 15.8, 10.8 and 5.8 µm. The ODEP manipulation velocity of three types of PS microparticles reacted with the color brightness setting was investigated to determine the light intensity to induce an ODEP force higher than the drag force of fluid speed. The color brightness of the light bar in three areas of the light screening membrane was selected as 60%, 70% and 100% to isolate PS microparticles with diameters of 15.8, 10.8 and 5.8 µm, respectively. With a double light bar and a flow rate of 3 µL/min, the recovery rate and isolation purity was improved by 95.1~100% and 94.4~98.6% from the mixture of three types of PS microparticles within 2 min, respectively. This proposed light screening membrane could be a candidate for the separation of small-volume and rare biomedical samples, including circulating tumor cells (CTCs) and bacteria in the blood. Full article
(This article belongs to the Section Electrochemical Devices and Sensors)
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18 pages, 3570 KiB  
Article
The Utilization of Tunable Transducer Elements Formed by the Manipulation of Magnetic Beads with Different Sizes via Optically Induced Dielectrophoresis (ODEP) for High Signal-to-Noise Ratios (SNRs) and Multiplex Fluorescence-Based Biosensing Applications
by Chia-Ming Yang, Jian-Cyun Yu, Po-Yu Chu, Chia-Hsun Hsieh and Min-Hsien Wu
Biosensors 2022, 12(9), 755; https://doi.org/10.3390/bios12090755 - 14 Sep 2022
Cited by 11 | Viewed by 2571
Abstract
Magnetic beads improve biosensing performance by means of their small volume and controllability by magnetic force. In this study, a new technique composed of optically induced dielectrodphoresis (ODEP) manipulation and image processing was used to enhance the signal-to-noise ratio of the fluorescence for [...] Read more.
Magnetic beads improve biosensing performance by means of their small volume and controllability by magnetic force. In this study, a new technique composed of optically induced dielectrodphoresis (ODEP) manipulation and image processing was used to enhance the signal-to-noise ratio of the fluorescence for stained magnetic beads. According to natural advantages of size-dependent particle isolation by ODEP manipulation, biomarkers in clinical samples can be easily separated by different sizes of magnetic beads with corresponding captured antibodies, and rapidly distinguished by separated location of immunofluorescence. To verify the feasibility of the concept, magnetic beads with three different diameters, including 21.8, 8.7, and 4.2 μm, were easily separated and collected into specific patterns in the defined target zone treated as three dynamic transducer elements to evaluate fluorescence results. In magnetic beads with diameter of 4.2 μm, the lowest signal-to-noise ratio between stained and nonstained magnetic beads was 3.5. With the help of ODEP accumulation and detection threshold setting of 32, the signal-to-noise ratio was increased to 77.4, which makes this method more reliable. With the further optimization of specific antibodies immobilized on different-size magnetic beads in the future, this platform can be a potential candidate for a high-efficiency sensor array in clinical applications. Full article
(This article belongs to the Section Biosensor Materials)
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12 pages, 1943 KiB  
Article
Accurate Micromanipulation of Optically Induced Dielectrophoresis Based on a Data-Driven Kinematic Model
by Gongxin Li, Zhanqiao Ding, Mindong Wang, Zhonggai Zhao, Shuangxi Xie and Fei Liu
Micromachines 2022, 13(7), 985; https://doi.org/10.3390/mi13070985 - 23 Jun 2022
Cited by 2 | Viewed by 1815
Abstract
The precise control method plays a crucial role in improving the accuracy and efficiency of the micromanipulation of optically induced dielectrophoresis (ODEP). However, the unmeasurable nature of the ODEP force is a great challenge for the precise automatic manipulation of ODEP. Here, we [...] Read more.
The precise control method plays a crucial role in improving the accuracy and efficiency of the micromanipulation of optically induced dielectrophoresis (ODEP). However, the unmeasurable nature of the ODEP force is a great challenge for the precise automatic manipulation of ODEP. Here, we propose a data-driven kinematic model to build an automatic control system for the precise manipulation of ODEP. The kinematic model is established by collecting the input displacement of the optical pattern and the output displacements of the manipulated object. Then, the control system based on the model was designed, and its feasibility and control precise were validated by numerical simulations and actual experiments on microsphere manipulation. In addition, the applications of ODEP manipulation in two typical scenarios further demonstrated the feasibility of the designed control system. This work proposes a new method to realize the precise manipulation of ODEP technology by establishing a kinematic model and a control system for micromanipulation, and it also provides a general approach for the improvement of the manipulation accuracy of other optoelectronic tweezers. Full article
(This article belongs to the Section E:Engineering and Technology)
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13 pages, 2622 KiB  
Article
The Effect of Optically Induced Dielectrophoresis (ODEP)-Based Cell Manipulation in a Microfluidic System on the Properties of Biological Cells
by Po-Yu Chu, Chia-Hsun Hsieh, Chien-Ru Lin and Min-Hsien Wu
Biosensors 2020, 10(6), 65; https://doi.org/10.3390/bios10060065 - 16 Jun 2020
Cited by 25 | Viewed by 5274
Abstract
Cell manipulation using optically induced dielectrophoresis (ODEP) in microfluidic systems has attracted the interest of scientists due to its simplicity. Although this technique has been successfully demonstrated for various applications, one fundamental issue has to be addressed—Whether, the ODEP field affects the native [...] Read more.
Cell manipulation using optically induced dielectrophoresis (ODEP) in microfluidic systems has attracted the interest of scientists due to its simplicity. Although this technique has been successfully demonstrated for various applications, one fundamental issue has to be addressed—Whether, the ODEP field affects the native properties of cells. To address this issue, we explored the effect of ODEP electrical conditions on cellular properties. Within the experimental conditions tested, the ODEP-based cell manipulation with the largest velocity occurred at 10 Vpp and 1 MHz, for the two cancer cell types explored. Under this operating condition, however, the cell viability of cancer cells was significantly affected (e.g., 70.5 ± 10.0% and 50.6 ± 9.2% reduction for the PC-3 and SK-BR-3 cancer cells, respectively). Conversely, the exposure of cancer cells to the ODEP electrical conditions of 7–10 Vpp and 3–5 MHz did not significantly alter the cell viability, cell metabolic activity, and the EpCAM, VIM, and ABCC1 gene expression of cancer cells. Overall, this study fundamentally investigated the effect of ODEP electrical conditions on the cellular properties of cancer cells. The information obtained is crucially important for the utilization of ODEP-based cell manipulation in a microscale system for various applications. Full article
(This article belongs to the Special Issue Microfluidic Bio-Sensors and Their Applications)
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20 pages, 2191 KiB  
Article
An Optically Induced Dielectrophoresis (ODEP)-Based Microfluidic System for the Isolation of High-Purity CD45neg/EpCAMneg Cells from the Blood Samples of Cancer Patients—Demonstration and Initial Exploration of the Clinical Significance of These Cells
by Chia-Jung Liao, Chia-Hsun Hsieh, Tzu-Keng Chiu, Yu-Xian Zhu, Hung-Ming Wang, Feng-Chun Hung, Wen-Pin Chou and Min-Hsien Wu
Micromachines 2018, 9(11), 563; https://doi.org/10.3390/mi9110563 - 31 Oct 2018
Cited by 31 | Viewed by 4282
Abstract
Circulating tumour cells (CTCs) in blood circulation play an important role in cancer metastasis. CTCs are generally defined as the cells in circulating blood expressing the surface antigen EpCAM (epithelial cell adhesion molecule). Nevertheless, CTCs with a highly metastatic nature might undergo an [...] Read more.
Circulating tumour cells (CTCs) in blood circulation play an important role in cancer metastasis. CTCs are generally defined as the cells in circulating blood expressing the surface antigen EpCAM (epithelial cell adhesion molecule). Nevertheless, CTCs with a highly metastatic nature might undergo an epithelial-to-mesenchymal transition (EMT), after which their EpCAM expression is downregulated. In current CTC-related studies, however, these clinically important CTCs with high relevance to cancer metastasis could be missed due to the use of the conventional CTC isolation methodologies. To precisely explore the clinical significance of these cells (i.e., CD45neg/EpCAMneg cells), the high-purity isolation of these cells from blood samples is required. To achieve this isolation, the integration of fluorescence microscopic imaging and optically induced dielectrophoresis (ODEP)-based cell manipulation in a microfluidic system was proposed. In this study, an ODEP microfluidic system was developed. The optimal ODEP operating conditions and the performance of live CD45neg/EpCAMneg cell isolation were evaluated. The results demonstrated that the proposed system was capable of isolating live CD45neg/EpCAMneg cells with a purity as high as 100%, which is greater than the purity attainable using the existing techniques for similar tasks. As a demonstration case, the cancer-related gene expression of CD45neg/EpCAMneg cells isolated from the blood samples of healthy donors and cancer patients was successfully compared. The initial results indicate that the CD45neg/EpCAMneg nucleated cell population in the blood samples of cancer patients might contain cancer-related cells, particularly EMT-transformed CTCs, as suggested by the high detection rate of vimentin gene expression. Overall, this study presents an ODEP microfluidic system capable of simply and effectively isolating a specific, rare cell species from a cell mixture. Full article
(This article belongs to the Special Issue Micro- and Nanofluidics for Bionanoparticle Analysis)
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19 pages, 788 KiB  
Article
Numerical Simulation of Optically-Induced Dielectrophoresis Using a Voltage-Transformation-Ratio Model
by Shih-Hsun Hung, Sheng-Chieh Huang and Gwo-Bin Lee
Sensors 2013, 13(2), 1965-1983; https://doi.org/10.3390/s130201965 - 4 Feb 2013
Cited by 12 | Viewed by 7755
Abstract
Optically-induced dielectrophoresis (ODEP) has been extensively used for the manipulation and separation of cells, beads and micro-droplets in microfluidic devices. With this approach, non-uniform electric fields induced by light projected on a photoconductive layer can be used to generate attractive or repulsive forces [...] Read more.
Optically-induced dielectrophoresis (ODEP) has been extensively used for the manipulation and separation of cells, beads and micro-droplets in microfluidic devices. With this approach, non-uniform electric fields induced by light projected on a photoconductive layer can be used to generate attractive or repulsive forces on dielectric materials. Then, moving these light patterns can be used for the manipulation of particles in the microfluidic devices. This study reports on the results from numerical simulation of the ODEP platform using a new model based on a voltage transformation ratio, which takes the effective electrical voltage into consideration. Results showed that the numerical simulation was in reasonably agreement with experimental data for the manipulation of polystyrene beads and emulsion droplets, with a coefficient of variation less than 6.2% (n = 3). The proposed model can be applied to simulations of the ODEP force and may provide a reliable tool for estimating induced dielectrophoretic forces and electric fields, which is crucial for microfluidic applications. Full article
(This article belongs to the Special Issue Microfluidic Devices)
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17 pages, 2962 KiB  
Article
Optical Spectrum and Electric Field Waveform Dependent Optically-Induced Dielectrophoretic (ODEP) Micro-Manipulation
by Wenfeng Liang, Shue Wang, Zaili Dong, Gwo-Bin Lee and Wen J. Li
Micromachines 2012, 3(2), 492-508; https://doi.org/10.3390/mi3020492 - 16 May 2012
Cited by 47 | Viewed by 9373
Abstract
In the last seven years, optoelectronic tweezers using optically-induced dielectrophoretic (ODEP) force have been explored experimentally with much success in manipulating micro/nano objects. However, not much has been done in terms of in-depth understanding of the ODEP-based manipulation process or optimizing the input [...] Read more.
In the last seven years, optoelectronic tweezers using optically-induced dielectrophoretic (ODEP) force have been explored experimentally with much success in manipulating micro/nano objects. However, not much has been done in terms of in-depth understanding of the ODEP-based manipulation process or optimizing the input physical parameters to maximize ODEP force. We present our work on analyzing two significant influencing factors in generating ODEP force on a-Si:H based ODEP chips: (1) the waveforms of the AC electric potential across the fluidic medium in an ODEP chip based microfluidic platform; and (2) optical spectrum of the light image projected onto the ODEP chip. Theoretical and simulation results indicate that when square waves are used as the AC electric potential instead of sine waves, ODEP force can double. Moreover, numerical results show that ODEP force increases with increasing optical frequency of the projected light on an ODEP chip following the Fermi-Dirac function, validating that the optically-induced dielectrophoresis force depends strongly on the electron-hole carrier generation phenomena in optoelectronic materials. Qualitative experimental results that validate the numerical results are also presented in this paper. Full article
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12 pages, 2863 KiB  
Article
Fabrication of Micrometer- and Nanometer-Scale Polymer Structures by Visible Light Induced Dielectrophoresis (DEP) Force
by Shue Wang, Wenfeng Liang, Zaili Dong, Vincent G. B. Lee and Wen J. Li
Micromachines 2011, 2(4), 431-442; https://doi.org/10.3390/mi2040431 - 13 Dec 2011
Cited by 26 | Viewed by 10250
Abstract
We report in this paper a novel, inexpensive and flexible method for fabricating micrometer- and nanometer-scale three-dimensional (3D) polymer structures using visible light sources instead of ultra-violet (UV) light sources or lasers. This method also does not require the conventional micro-photolithographic technique ( [...] Read more.
We report in this paper a novel, inexpensive and flexible method for fabricating micrometer- and nanometer-scale three-dimensional (3D) polymer structures using visible light sources instead of ultra-violet (UV) light sources or lasers. This method also does not require the conventional micro-photolithographic technique (i.e., photolithographic masks) for patterning and fabricating polymer structures such as hydrogels. The major materials and methods required for this novel fabrication technology are: (1) any cross-linked network of photoactive polymers (examples of fabricated poly(ethylene glycol) (PEG)-diacrylate hydrogel structures are shown in this paper); (2) an Optically-induced Dielectrophoresis (ODEP) System which includes an “ODEP chip” (i.e., any chip that changes its surface conductivity when exposed to visible light), an optical microscope, a projector, and a computer; and (3) an animator software hosted on a computer that can generate virtual or dynamic patterns which can be projected onto the “ODEP chip” through the use of a projector and a condenser lens. Essentially, by placing a photosensitive polymer solution inside the microfluidic platform formed by the “ODEP chip” bonded to another substrate, and applying an alternating current (a.c.) electrical potential across the polymer solution (typically ~20 Vp-p at 10 kHz), solid polymer micro/nano structures can then be formed on the “ODEP chip” surface when visible-light is projected onto the chip. The 2D lateral geometry (x and y dimensions) and the thickness (height) of the micro/nano structures are dictated by the image geometry of the visible light projected onto the “ODEP chip” and also the time duration of projection. Typically, after an image projection with intensity ranging from ~0.2 to 0.4 mW/cm2 for 10 s, ~200 nm high structures can be formed. In our current system, the thickness of these polymer structures can be controlled to form from ~200 nanometers to ~3 micrometers structures. However, in the in-plane dimensions, only ~7 μm resolution can be achieved now, due to the optical diffraction limit and the physical dimensions of DMD mirrors in the projector. Nevertheless, with higher quality optical components, the in-plane resolution is expected to be sub-micron. Full article
(This article belongs to the Special Issue Polymer MEMS)
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