Sign in to use this feature.

Years

Between: -

Subjects

remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline

Journals

Article Types

Countries / Regions

Search Results (15)

Search Parameters:
Keywords = glow-to-arc-plasma

Order results
Result details
Results per page
Select all
Export citation of selected articles as:
19 pages, 5968 KB  
Article
Investigation of Electrical Discharge Processes During Electrolytic–Plasma Nitrocarburizing
by Bauyrzhan Rakhadilov, Laila Sulyubayeva, Almasbek Maulit and Temirlan Alimbekuly
Materials 2025, 18(14), 3381; https://doi.org/10.3390/ma18143381 - 18 Jul 2025
Viewed by 491
Abstract
In this study, the process of electrolytic–plasma nitrocarburizing (EPNC) of 20-grade steel was investigated using various electrolytes and temperature regimes. At the first stage, optical spectral analysis of plasma emission during EPNC was carried out with spectral registration in the range of 275–850 [...] Read more.
In this study, the process of electrolytic–plasma nitrocarburizing (EPNC) of 20-grade steel was investigated using various electrolytes and temperature regimes. At the first stage, optical spectral analysis of plasma emission during EPNC was carried out with spectral registration in the range of 275–850 nm, which allowed the identification of active components (Hα, CN, Fe I, O I lines, etc.) and the calculation of electron density. Additionally, the EPNC process was recorded using a high-speed camera (1500 frames per second), which made it possible to visually evaluate the dynamics of arc and glow discharges under varying electrolyte compositions. At the next stage, the influence of temperature regimes (650 °C, 750 °C, and 850 °C) on the formation of the hardened layer was studied. Using SEM and EDS methods, the morphology, phase zones, and the distribution of chemical elements were determined. Microhardness measurements along the depth and friction tests were carried out. It was found that a temperature of 750 °C provides the best balance between the uniformity of chemical composition, high microhardness (~800 HV), and a minimal coefficient of friction (~0.48). The obtained results confirm the potential of the selected EPNC regime for improving the performance characteristics of 20-grade steel. Full article
(This article belongs to the Section Metals and Alloys)
Show Figures

Figure 1

19 pages, 4353 KB  
Article
Effect of Cathode Cooling in Three-Dimensional Simulations of an Atmospheric Pressure Glow Discharge
by Valentin Boutrouche and Juan Pablo Trelles
Plasma 2024, 7(4), 920-938; https://doi.org/10.3390/plasma7040051 - 29 Nov 2024
Viewed by 1021
Abstract
The Atmospheric Pressure Glow Discharge (APGD) is a relatively simple and versatile plasma source used in a wide range of applications. Active cooling of the cathode can effectively mitigate instabilities, leading to glow-to-arc transitions. This study investigates the effect of varying the degree [...] Read more.
The Atmospheric Pressure Glow Discharge (APGD) is a relatively simple and versatile plasma source used in a wide range of applications. Active cooling of the cathode can effectively mitigate instabilities, leading to glow-to-arc transitions. This study investigates the effect of varying the degree of cathode cooling in APGD with a planar cathode in helium. The plasma flow model incorporates mass conservation, chemical species transport, momentum conservation, conservation of thermal energy of heavy species and of electrons, and electrostatics. The model is applied to time-dependent simulations through a three-dimensional computational domain describing the whole discharge, without geometric symmetry or steady-state assumptions. Simulations of an experimentally characterized APGD explore the effects of electric current and cathode cooling—ranging from thermally insulated to extreme convective cooling. Results show the formation of an annular region with high electric field over the cathode surface under conditions of high current and low cooling. Full article
Show Figures

Graphical abstract

20 pages, 8023 KB  
Article
Reaction-Engineering Approach for Stable Rotating Glow-to-Arc Plasma—Key Principles of Effective Gas-Conversion Processes
by Samuel Jaro Kaufmann, Haripriya Chinnaraj, Johanna Buschmann, Paul Rößner and Kai Peter Birke
Catalysts 2024, 14(12), 864; https://doi.org/10.3390/catal14120864 - 26 Nov 2024
Viewed by 920
Abstract
This work presents advancements in a rotating glow-to-arc plasma reactor, designed for stable gas conversion of robust molecules like CO2, N2, and CH4. Plasma-based systems play a critical role in Power-to-X research, offering electrified, sustainable pathways for [...] Read more.
This work presents advancements in a rotating glow-to-arc plasma reactor, designed for stable gas conversion of robust molecules like CO2, N2, and CH4. Plasma-based systems play a critical role in Power-to-X research, offering electrified, sustainable pathways for industrial gas conversion. Here, we scaled the reactor’s power from 200 W to 1.2 kW in a CO2 plasma, which introduced instability due to uplift forces and arc behavior. These were mitigated by integrating silicon carbide (SiC) ceramic foam as a mechanical restriction, significantly enhancing stability by reducing arc movement, confining convection, and balancing volumetric flow within the arc. Using high-speed camera analysis and in situ electronic frequency measurements, we identified dominant frequencies tied to operational parameters, supporting potential in operando monitoring and control. Arc-rotation frequencies from 5 to 50 Hz and higher frequencies (500 to 2700 Hz) related to arc chattering reveal the system’s dynamic response to power and flow changes. Furthermore, refining the specific energy input (SEI) to account for plasma residence time allowed for a more precise calculation of effective SEI, optimizing energy delivery to target molecules. Our findings underscore the reactor’s promise for scalable, efficient gas conversion in sustainable energy applications. Full article
(This article belongs to the Special Issue Plasma Catalysis for Environment and Energy Applications)
Show Figures

Figure 1

18 pages, 17356 KB  
Article
A Study of the Features of Coating Deposition on a Carbide Substrate Using Preliminary Etching with Glow-Discharge Plasma
by Sergey Grigoriev, Marina Volosova, Yuri Bublikov, Catherine Sotova, Filipp Milovich, Anton Seleznev, Ilya Shmakov and Alexey Vereschaka
Surfaces 2024, 7(4), 920-937; https://doi.org/10.3390/surfaces7040060 - 2 Nov 2024
Viewed by 1286
Abstract
The properties of coatings obtained using two surface preparation methods were compared: heating and etching by ion bombardment with plasma generation by arc evaporators and heating and etching by a glow discharge. A Ti-TiN-(Ti,Cr,Al)N coating was deposited. The use of a glow discharge [...] Read more.
The properties of coatings obtained using two surface preparation methods were compared: heating and etching by ion bombardment with plasma generation by arc evaporators and heating and etching by a glow discharge. A Ti-TiN-(Ti,Cr,Al)N coating was deposited. The use of a glow discharge provides better resistance of the coating to destruction during the scratch test and wear resistance of metal-cutting tools when turning steel. As the cutting speed increases, the advantage in wear resistance of the coating deposited using a glow discharge increases. During the process of heating and etching by ion bombardment with metal ions, a nanolayer rich in cobalt and tooling elements (iron, molybdenum) is formed in the area of the interface of the coating and the carbide substrate. When heated and etched by a glow discharge, such a layer does not form. When using both methods, there is identical diffusion of tungsten into the coating and diffusion of chromium and possibly titanium into the substrate. Thus, the glow-discharge heating and etching method can be effectively used in the process of PVD coating deposition. Full article
Show Figures

Figure 1

20 pages, 8476 KB  
Article
Modeling and Comparative Analysis of Atmospheric Pressure Anodic Carbon Arc Discharge in Argon and Helium–Producing Carbon Nanostructures
by Almaz Saifutdinov and Boris Timerkaev
Nanomaterials 2023, 13(13), 1966; https://doi.org/10.3390/nano13131966 - 28 Jun 2023
Cited by 18 | Viewed by 2735
Abstract
In this work, within the framework of a unified model for the discharge gap and electrodes, a comparative numerical analysis was carried out on the effect of evaporation of graphite anode material on the characteristics of the arc discharge in helium and argon. [...] Read more.
In this work, within the framework of a unified model for the discharge gap and electrodes, a comparative numerical analysis was carried out on the effect of evaporation of graphite anode material on the characteristics of the arc discharge in helium and argon. The effect of changing the plasma-forming ion, in which the ion of evaporated atomic carbon becomes the dominant ion, is demonstrated. For an arc discharge in helium, this effect is accompanied by a jump-like change in the dependence of the current density on voltage (CVC), and smoothly for a discharge in argon. With regard to the dynamics of the ignition of an arc discharge, it is shown that during the transition from glow discharge to arc in helium, the discharge parameters are also accompanied by an abrupt change, while in argon, this transition is smooth. This is due to the fact that the ionization potentials, as well as the ionization cross sections, differ significantly for helium and carbon, and are close in value for helium and argon. For various points on the CVC, the density distributions of the charged and neutral particles of an inert gas and evaporated gases are presented. Full article
(This article belongs to the Special Issue Synthesis of Nanostructures in Gas-Discharge Plasma)
Show Figures

Figure 1

13 pages, 1540 KB  
Article
Quality of Tomato Juice as Influenced by Non-Thermal Air Plasma Treatment
by Agnieszka Starek-Wójcicka, Agnieszka Sagan, Piotr Terebun, Michał Kwiatkowski, Emilia Osmólska, Marta Krajewska, Elżbieta Grządka, Narumol Matsuyama, Nobuya Hayashi and Joanna Pawlat
Appl. Sci. 2023, 13(1), 578; https://doi.org/10.3390/app13010578 - 31 Dec 2022
Cited by 7 | Viewed by 3698
Abstract
This paper presents the results of an experiment based on using a Glide-arc type plasma reactor operating at atmospheric pressure for the quality of fresh pressed tomato juice, variety Bekas. The impact of after-glow plasma gas (air) on the physicochemical, microbiological properties and [...] Read more.
This paper presents the results of an experiment based on using a Glide-arc type plasma reactor operating at atmospheric pressure for the quality of fresh pressed tomato juice, variety Bekas. The impact of after-glow plasma gas (air) on the physicochemical, microbiological properties and morphology of the product’s samples was investigated. Five groups of juices characterized by different exposure times (30, 60, 120, 300 and 600 s), as well as untreated juice (as control) were used. The juice quality was assessed on days 1, 3, 5, and 10 of refrigerated storage. Significant increases were observed when Cold Atmospheric Plasma (CAP)-treated tomato juice was tested against total soluble solids, pH, lycopene, and vitamin C in comparison to the control treatments. Moreover, changes in the tested physicochemical values during the storage of juice subjected to the action of cold plasma did not progress as quickly as in the case of the control juice. A significant decrease was observed in total plate count, yeast, and mold after 300–600 s CAP treatment. The findings of the current study suggested that CAP treatment is a promising technique that could provide improved quality and stability during the processing of tomato juice with better physicochemical properties and bioavailable nutrients. Full article
(This article belongs to the Topic Innovative Food Processing Technologies—2nd Volume)
Show Figures

Figure 1

12 pages, 3389 KB  
Article
Impact of the Samples’ Surface State on the Glow Discharge Stability in the Metals’ Treatment and Welding Processes
by Maksym Bolotov, Gennady Bolotov, Serhii Stepenko and Pavlo Ihnatenko
Appl. Sci. 2021, 11(4), 1765; https://doi.org/10.3390/app11041765 - 17 Feb 2021
Cited by 6 | Viewed by 2338
Abstract
The low temperature plasma of glow discharge has found a widespread use as a heating source in welding and surface treatment of metals. The meticulous analysis of glow discharge’s instabilities in these processes allowed us to highlight the physicochemical characteristics of the cathode [...] Read more.
The low temperature plasma of glow discharge has found a widespread use as a heating source in welding and surface treatment of metals. The meticulous analysis of glow discharge’s instabilities in these processes allowed us to highlight the physicochemical characteristics of the cathode surface (the welded or treated samples) as one of the main reasons of its transition into an electric arc—as a more stable form of gas discharges. The prolonged arc action on the samples surfaces inevitably leads to the disruption of the technological process and, consequently, to undesirable overheating of samples. In this regard, the main aim of this work is to study the influence of the macro- and micro relief of the cathode on the stable glow discharge existence in the processes of metals treatment and diffusion welding. It has been analytically established and experimentally supported that the glow discharge’s stability is mainly affected by the sharp protrusions generated on the cathode surface because of samples pre-treatment by machining before welding. It has been established that the rough surface pre-treatment with the Rz about 60–80 µm decreases the pressure range of glow discharge sustainable existence from 1.33–13.3 kPa to 1.33–5.3 kPa compared with the surface machining with the Rz about 10 µm. Full article
(This article belongs to the Special Issue The Applications of Plasma Techniques II)
Show Figures

Figure 1

16 pages, 7662 KB  
Article
Characteristics of Gliding Arc Plasma and Its Application in Swirl Flame Static Instability Control
by Weiqi Chen, Di Jin, Wei Cui and Shengfang Huang
Processes 2020, 8(6), 684; https://doi.org/10.3390/pr8060684 - 11 Jun 2020
Cited by 21 | Viewed by 6771
Abstract
Based on an experimental system involving a pulsating airflow burner and gliding arc generator, the characteristics of gliding arc plasma at different flow rates and its control effect on the static instability of the swirl flame have been studied. The current, voltage, and [...] Read more.
Based on an experimental system involving a pulsating airflow burner and gliding arc generator, the characteristics of gliding arc plasma at different flow rates and its control effect on the static instability of the swirl flame have been studied. The current, voltage, and power wave forms, as well as the simultaneous evolution of plasma topology, were measured to reveal the discharge characteristics of the gliding arc. A bandpass filter was used to capture the chemiluminescence of CH in the flame, and pressure at the burner outlet was acquired to investigate the static instability. Experimental results showed that there were two different discharge types in gliding arc plasma. With the low flow rate, the glow type discharge was sustained and the current was nearly a sine wave with hundreds of milliamperes of amplitude. With the high flow rate, the spark type discharge appeared and spikes which approached almost 1 ampere in 1 μs were found in the current waveform. The lean blowout limits increased when the flame mode changed from stable to pulsating, and decreased significantly after applying the gliding arc plasma. In pulsating flow mode, the measured pressure indicated that static instability was generated at the frequency of 10 Hz, and the images of flame with plasma showed that the plasma may have acted as the ignition source which injected the heat into the flame. Full article
(This article belongs to the Special Issue Advances in Plasma Diagnostics and Applications)
Show Figures

Figure 1

11 pages, 4338 KB  
Article
High Quality Graphene Thin Films Synthesized by Glow Discharge Method in A Chemical Vapor Deposition System Using Solid Carbon Source
by Le Wang, Jie Sun, Weiling Guo, Yibo Dong, Yiyang Xie, Fangzhu Xiong, Zaifa Du, Longfei Li, Jun Deng and Chen Xu
Materials 2020, 13(9), 2026; https://doi.org/10.3390/ma13092026 - 26 Apr 2020
Cited by 1 | Viewed by 3215
Abstract
Arc discharge is traditionally used to synthesize randomly arranged graphene flakes. In this paper, we substantially modify it into a glow discharge method so that the discharge current is much more reduced. The H2 and/or Ar plasma etching of the graphitic electrode [...] Read more.
Arc discharge is traditionally used to synthesize randomly arranged graphene flakes. In this paper, we substantially modify it into a glow discharge method so that the discharge current is much more reduced. The H2 and/or Ar plasma etching of the graphitic electrode (used to ignite the plasma) is hence much gentler, rendering it possible to grow graphene in thin film format. During the growth at a few mbar, there is no external carbon gas precursor introduced. The carbon atoms and/or carbon containing particles as a result of the plasma etching are emitted in the chamber, some of which undergo gas phase scattering and deposit onto the metallic catalyst substrates (Cu-Ni alloy thin films or Cu foils) as graphene sheets. It is found that high quality monolayer graphene can be synthesized on Cu foil at 900 °C. On Cu-Ni, under the same growth condition, somewhat more bilayer regions are observed. It is observed that the material quality is almost indifferent to the gas ratios, which makes the optimization of the deposition process relatively easy. Detailed study on the deposition procedure and the material characterization have been carried out. This work reveals the possibility of producing thin film graphene by a gas discharge based process, not only from fundamental point of view, but it also provides an alternative technique other than standard chemical vapor deposition to synthesize graphene that is compatible with the semiconductor planar process. As the process uses solid graphite as a source material that is rich in the crust, it is a facile and relatively cheap method to obtain high quality graphene thin films in this respect. Full article
Show Figures

Figure 1

16 pages, 2877 KB  
Article
Scalable Treatment of Flowing Organic Liquids Using Ambient-Air Glow Discharge for Agricultural Applications
by Vladislav Gamaleev, Naoyuki Iwata, Ginji Ito, Masaru Hori, Mineo Hiramatsu and Masafumi Ito
Appl. Sci. 2020, 10(3), 801; https://doi.org/10.3390/app10030801 - 23 Jan 2020
Cited by 18 | Viewed by 4375
Abstract
In this work, we developed a portable device with low production and operation costs for generating ambient-air glow discharge (AAGD) that is transferred to the surface of flowing liquid and demonstrated its applicability to practical use in agriculture. An experiment procedure that ensured [...] Read more.
In this work, we developed a portable device with low production and operation costs for generating ambient-air glow discharge (AAGD) that is transferred to the surface of flowing liquid and demonstrated its applicability to practical use in agriculture. An experiment procedure that ensured the stable treatment of various liquids was established. Additionally, it was found that humidity did not have a significant effect on the treatment process, which makes the use of the developed device possible in various locations. It was found that an L-phenylalanine solution treated with AAGD allows simultaneous 40% hydroponic radish-sprout growth promotion with a bactericidal effect. Further, scalability and practical-application possibilities in hydroponic plant growth were discussed. Full article
(This article belongs to the Special Issue Plasma Techniques in Agriculture, Biology and Food Production)
Show Figures

Graphical abstract

20 pages, 9553 KB  
Article
Novel Porous Phosphorus–Calcium–Magnesium Coatings on Titanium with Copper or Zinc Obtained by DC Plasma Electrolytic Oxidation: Fabrication and Characterization
by Krzysztof Rokosz, Tadeusz Hryniewicz, Sofia Gaiaschi, Patrick Chapon, Steinar Raaen, Dalibor Matýsek, Łukasz Dudek and Kornel Pietrzak
Materials 2018, 11(9), 1680; https://doi.org/10.3390/ma11091680 - 11 Sep 2018
Cited by 24 | Viewed by 6279
Abstract
In this paper, the characteristics of new porous coatings fabricated at three voltages in electrolytes based on H3PO4 with calcium nitrate tetrahydrate, magnesium nitrate hexahydrate, and copper(II) nitrate trihydrate are presented. The SEM, energy dispersive spectroscopy (EDS), glow discharge optical [...] Read more.
In this paper, the characteristics of new porous coatings fabricated at three voltages in electrolytes based on H3PO4 with calcium nitrate tetrahydrate, magnesium nitrate hexahydrate, and copper(II) nitrate trihydrate are presented. The SEM, energy dispersive spectroscopy (EDS), glow discharge optical emission spectroscopy (GDOES), X-ray photoelectron spectroscopy (XPS), and XRD techniques for coating identification were used. It was found that the higher the plasma electrolytic oxidation (PEO) (micro arc oxidation (MAO)) voltage, the thicker the porous coating with higher amounts of built-in elements coming from the electrolyte and more amorphous phase with signals from crystalline Ca(H2PO4)2∙H2O and/or Ti(HPO4)2∙H2O. Additionally, the external parts of the obtained porous coatings formed on titanium consisted mainly of Ti4+, Ca2+, Mg2+ and PO43−, HPO42−, H2PO4, P2O74− as well as Zn2+ or copper Cu+/Cu2+. The surface should be characterized by high biocompatibility, due to the presence of structures based on calcium and phosphates, and have bactericidal properties, due to the presence of zinc and copper ions. Furthermore, the addition of magnesium ions should accelerate the healing of postoperative wounds, which could lead to faster patient recovery. Full article
(This article belongs to the Special Issue Metals Functionalization via Plasma Electrolytic Oxidation)
Show Figures

Graphical abstract

19 pages, 14418 KB  
Article
Development of Porous Coatings Enriched with Magnesium and Zinc Obtained by DC Plasma Electrolytic Oxidation
by Krzysztof Rokosz, Tadeusz Hryniewicz, Sofia Gaiaschi, Patrick Chapon, Steinar Raaen, Winfried Malorny, Dalibor Matýsek and Kornel Pietrzak
Micromachines 2018, 9(7), 332; https://doi.org/10.3390/mi9070332 - 2 Jul 2018
Cited by 13 | Viewed by 4287
Abstract
Coatings with developed surface stereometry, being based on a porous system, may be obtained by plasma electrolytic oxidation, PEO (micro arc oxidation, MAO). In this paper, we present novel porous coatings, which may be used, e.g., in micromachine’s biocompatible sensors’ housing, obtained in [...] Read more.
Coatings with developed surface stereometry, being based on a porous system, may be obtained by plasma electrolytic oxidation, PEO (micro arc oxidation, MAO). In this paper, we present novel porous coatings, which may be used, e.g., in micromachine’s biocompatible sensors’ housing, obtained in electrolytes containing magnesium nitrate hexahydrate Mg(NO3)2·6H2O and/or zinc nitrate hexahydrate Zn(NO3)2·6H2O in concentrated phosphoric acid H3PO4 (85% w/w). Complementary techniques are used for coatings’ surface characterization, such as scanning electron microscopy (SEM), for surface imaging as well as for chemical semi-quantitative analysis via energy dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), glow discharge optical emission spectroscopy (GDOES), and X-ray powder diffraction (XRD). The results have shown that increasing contents of salts (here, 250 g/L Mg(NO3)2·6H2O and 250 g/L Zn(NO3)2·6H2O) in electrolyte result in increasing of Mg/P and Zn/P ratios, as well as coating thickness. It was also found that by increasing the PEO voltage, the Zn/P and Mg/P ratios increase as well. In addition, the analysis of XPS spectra revealed the existence in 10 nm top of coating magnesium (Mg2+), zinc (Zn2+), titanium (Ti4+), and phosphorus compounds (PO43−, or HPO42−, or H2PO4, or P2O74−). Full article
(This article belongs to the Special Issue Plasma-Based Surface Engineering)
Show Figures

Graphical abstract

13 pages, 8388 KB  
Article
Characterization of Porous Phosphate Coatings Enriched with Magnesium or Zinc on CP Titanium Grade 2 under DC Plasma Electrolytic Oxidation
by Krzysztof Rokosz, Tadeusz Hryniewicz, Sofia Gaiaschi, Patrick Chapon, Steinar Raaen, Kornel Pietrzak, Winfried Malorny and João Salvador Fernandes
Metals 2018, 8(2), 112; https://doi.org/10.3390/met8020112 - 6 Feb 2018
Cited by 22 | Viewed by 4871
Abstract
The aim of the paper is to study and determine the effect of voltage increasing from 500 up to 650 VDC on chemical and electrochemical properties of the obtained porous coatings with plasma electrolytic oxidation (PEO) processes, known also as micro arc [...] Read more.
The aim of the paper is to study and determine the effect of voltage increasing from 500 up to 650 VDC on chemical and electrochemical properties of the obtained porous coatings with plasma electrolytic oxidation (PEO) processes, known also as micro arc oxidation (MAO). In the present paper, the chemical and electrochemical characterization of porous phosphate coatings enriched with magnesium or zinc on commercially pure (CP) Titanium Grade 2 under DC-PEO obtained in electrolytes based on concentrated 85% analytically pure H3PO4 (98 g/mole) acid with additions of 500 g·L−1 of zinc nitrate Zn(NO3)2∙6H2O or magnesium nitrate Mg(NO3)2∙6H2O, are described. These materials were characterized using scanning electron microscope (SEM) with energy-dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS) and glow discharge optical emission spectroscopy (GDOES). It was found that the voltage of PEO process has influence on the chemical composition and thickness of the obtained porous coatings as well as on their electrochemical behavior. The higher the potential of PEO treatment, the higher the amount of zinc-to-phosphorus ratio for zinc enriched coatings was obtained, whereas in magnesium enriched coatings, the average amount of magnesium detected in PEO coating is approximately independent of the PEO voltages. Based on XPS studies, it was found out that most likely the top 10 nm of porous coatings is constructed of titanium (Ti4+), magnesium (Mg2+), zinc (Zn2+), and phosphates PO43 and/or HPO42− and/or H2PO4 and/or P2O74−. On the basis of GDOES studies, a four-sub-layer model of PEO coatings is proposed. Analysis of the potentiodynamic corrosion curves allowed to conclude that the best electrochemical repeatability was noted for magnesium and zinc enriched coatings obtained at 575 VDC. Full article
(This article belongs to the Special Issue Plasma Electrolytic Oxidation)
Show Figures

Figure 1

17 pages, 16239 KB  
Article
Characterisation of Calcium- and Phosphorus-Enriched Porous Coatings on CP Titanium Grade 2 Fabricated by Plasma Electrolytic Oxidation
by Krzysztof Rokosz, Tadeusz Hryniewicz, Sofia Gaiaschi, Patrick Chapon, Steinar Raaen, Kornel Pietrzak and Winfried Malorny
Metals 2017, 7(9), 354; https://doi.org/10.3390/met7090354 - 8 Sep 2017
Cited by 19 | Viewed by 5598
Abstract
In the paper, Scanning Electron Microscopy (SEM), Energy-dispersive X-ray Spectroscopy (EDS), X-ray Photoelectron Spectroscopy (XPS), and Glow Discharge Optical Emission Spectroscopy (GDOES) analyses of calcium- and phosphorus-enriched coatings obtained on commercial purity (CP) Titanium Grade 2 by plasma electrolytic oxidation (PEO), known also [...] Read more.
In the paper, Scanning Electron Microscopy (SEM), Energy-dispersive X-ray Spectroscopy (EDS), X-ray Photoelectron Spectroscopy (XPS), and Glow Discharge Optical Emission Spectroscopy (GDOES) analyses of calcium- and phosphorus-enriched coatings obtained on commercial purity (CP) Titanium Grade 2 by plasma electrolytic oxidation (PEO), known also as micro arc oxidation (MAO), in electrolytes based on concentrated phosphoric acid with calcium nitrate tetrahydrate, are presented. The preliminary studies were performed in electrolytes containing 10, 300, and 600 g/L of calcium nitrate tetrahydrate, whereas for the main research the solution contained 500 g/L of the same hydrated salt. It was found that non-porous coatings, with very small amounts of calcium and phosphorus in them, were formed in the solution with 10 g/L Ca(NO3)2·4H2O, whereas the other coatings, fabricated in the consecutive electrolytes containing from 300 up to 650 g/L Ca(NO3)2·4H2O, were porous. Based on the GDOES data, it was also found that the obtained porous PEO coating may be divided into three sub-layers: the first, top, porous layer was the thinnest; the second, semi-porous layer was about 12 times thicker than the first; and the third, transition sub-layer was about 10 times thicker than the first. Based on the recorded XPS spectra, it was possible to state that the top 10-nm layer of porous PEO coatings included chemical compounds containing titanium (Ti4+), calcium (Ca2+), as well as phosphorus and oxygen (PO43− and/or HPO42− and/or H2PO4, and/or P2O74−). Full article
(This article belongs to the Special Issue Plasma Electrolytic Oxidation)
Show Figures

Figure 1

10 pages, 7163 KB  
Article
Fabrication of SiNx Thin Film of Micro Dielectric Barrier Discharge Reactor for Maskless Nanoscale Etching
by Qiang Li, Jie Liu, Yichuan Dai, Wushu Xiang, Man Zhang, Hai Wang and Li Wen
Micromachines 2016, 7(12), 232; https://doi.org/10.3390/mi7120232 - 14 Dec 2016
Cited by 8 | Viewed by 10552
Abstract
The prevention of glow-to-arc transition exhibited by micro dielectric barrier discharge (MDBD), as well as its long lifetime, has generated much excitement across a variety of applications. Silicon nitride (SiNx) is often used as a dielectric barrier layer in DBD due [...] Read more.
The prevention of glow-to-arc transition exhibited by micro dielectric barrier discharge (MDBD), as well as its long lifetime, has generated much excitement across a variety of applications. Silicon nitride (SiNx) is often used as a dielectric barrier layer in DBD due to its excellent chemical inertness and high electrical permittivity. However, during fabrication of the MDBD devices with multilayer films for maskless nano etching, the residual stress-induced deformation may bring cracks or wrinkles of the devices after depositing SiNx by plasma enhanced chemical vapor deposition (PECVD). Considering that the residual stress of SiNx can be tailored from compressive stress to tensile stress under different PECVD deposition parameters, in order to minimize the stress-induced deformation and avoid cracks or wrinkles of the MDBD device, we experimentally measured stress in each thin film of a MDBD device, then used numerical simulation to analyze and obtain the minimum deformation of multilayer films when the intrinsic stress of SiNx is −200 MPa compressive stress. The stress of SiNx can be tailored to the desired value by tuning the deposition parameters of the SiNx film, such as the silane (SiH4)–ammonia (NH3) flow ratio, radio frequency (RF) power, chamber pressure, and deposition temperature. Finally, we used the optimum PECVD process parameters to successfully fabricate a MDBD device with good quality. Full article
(This article belongs to the Special Issue Microplasma Devices)
Show Figures

Graphical abstract

Back to TopTop