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Keywords = flexible pMUT

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23 pages, 2313 KB  
Article
Effects of Amino Acid Point Mutations on the Local Hydrophobicity, Structural Stability, and Conformational Flexibility of P-Glycoprotein
by Alexandra Ioana Năstasie and Adriana Isvoran
Biomolecules 2026, 16(7), 1046; https://doi.org/10.3390/biom16071046 - 17 Jul 2026
Viewed by 516
Abstract
P-glycoprotein (P-gp, ABCB1) plays a central role in multidrug resistance and drug pharmacokinetics. In this study, an integrated computational analysis of point amino acid substitutions across the P-gp sequence was performed to evaluate their predicted pathogenicity and structural impact. Variant classification using AlphaMissense [...] Read more.
P-glycoprotein (P-gp, ABCB1) plays a central role in multidrug resistance and drug pharmacokinetics. In this study, an integrated computational analysis of point amino acid substitutions across the P-gp sequence was performed to evaluate their predicted pathogenicity and structural impact. Variant classification using AlphaMissense and PolyPhen-2 revealed concordant predictions for a substantial subset of amino acid substitutions, with 21 variants consistently classified as benign and 13 as pathogenic, while discrepancies for other variants reflected methodological differences between the tools. Notably, substitutions located in transmembrane domains were more frequently predicted to be deleterious compared with those in cytoplasmic or extracellular regions, consistent with the structural and functional constraints imposed on membrane-spanning helices. Changes in local hydropathicity, average flexibility, protein stability (ΔΔG), hydrogen-bonding patterns, surface hydrophobicity and electrostatic potential distributions were also evaluated. Stability predictions obtained using I-Mutant2.0 and DynaMut2.0 indicated that many substitutions tend to destabilize P-gp, although differences in ΔΔG values were observed between methods due to distinct algorithmic approaches. Structural superposition analyses demonstrated generally minor backbone deviations, yet local alterations in surface hydrophobicity, electrostatic potential, and hydrogen bond networks were evident. These physicochemical perturbations, even when subtle, may influence conformational dynamics and coupling between nucleotide-binding and transmembrane domains. Overall, these findings suggest that single amino acid substitutions may alter the local structural environment of P-gp and could potentially influence its transport function. Full article
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12 pages, 5931 KB  
Article
PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates
by Kae Nakamura, Chi-Luen Huang, Ali Habib Akhyari, Andrea P. Argüelles, Thomas N. Jackson and Susan Trolier-McKinstry
Sensors 2026, 26(7), 2246; https://doi.org/10.3390/s26072246 - 5 Apr 2026
Cited by 1 | Viewed by 2006
Abstract
A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb0.990.01(Zr0.52Ti0.48)Nb0.02O3, [...] Read more.
A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb0.990.01(Zr0.52Ti0.48)Nb0.02O3, where □ denotes a vacancy on the Pb site, on 50 μm-thick LaNiO3/HfO2/stainless-steel foils. Lithography for definition of the electrode and piezoelectric layers was completed on the front of the wafer. Ni electroplating on the back side of the foil was used to create locally stiff areas to define the deflection area. PMUT devices were successfully fabricated using this method. The permittivity and loss tangent of the fabricated device at 1 kHz were 283 ± 9 and <1.5%, respectively. The remanent polarization was measured to be 38 ± 0.3 μC/cm2. Full article
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23 pages, 3835 KB  
Article
Computational Saturation Mutagenesis Reveals Pathogenic and Structural Impacts of Missense Mutations in Adducin Proteins
by Lennon Meléndez-Aranda, Jazmin Moreno Pereyda and Marina M. J. Romero-Prado
Genes 2025, 16(8), 916; https://doi.org/10.3390/genes16080916 - 30 Jul 2025
Viewed by 2392
Abstract
Background and objectives: Adducins are cytoskeletal proteins essential for membrane stability, actin–spectrin network organization, and cell signaling. Mutations in the genes ADD1, ADD2, and ADD3 have been linked to hypertension, neurodevelopmental disorders, and cancer. However, no comprehensive in silico saturation [...] Read more.
Background and objectives: Adducins are cytoskeletal proteins essential for membrane stability, actin–spectrin network organization, and cell signaling. Mutations in the genes ADD1, ADD2, and ADD3 have been linked to hypertension, neurodevelopmental disorders, and cancer. However, no comprehensive in silico saturation mutagenesis study has systematically evaluated the pathogenic potential and structural consequences of all possible missense mutations in adducins. This study aimed to identify high-risk variants and their potential impact on protein stability and function. Methods: We performed computational saturation mutagenesis for all possible single amino acid substitutions across the adducin proteins family. Pathogenicity predictions were conducted using four independent tools: AlphaMissense, Rhapsody, PolyPhen-2, and PMut. Predictions were validated against UniProt-annotated pathogenic variants. Predictive performance was assessed using Cohen’s Kappa, sensitivity, and precision. Mutations with a prediction probability ≥ 0.8 were further analyzed for structural stability using mCSM, DynaMut2, MutPred2, and Missense3D, with particular focus on functionally relevant domains such as phosphorylation and calmodulin-binding sites. Results: PMut identified the highest number of pathogenic mutations, while PolyPhen-2 yielded more conservative predictions. Several high-risk mutations clustered in known regulatory and binding regions. Substitutions involving glycine were consistently among the most destabilizing due to increased backbone flexibility. Validated variants showed strong agreement across multiple tools, supporting the robustness of the analysis. Conclusions: This study highlights the utility of multi-tool bioinformatic strategies for comprehensive mutation profiling. The results provide a prioritized list of high-impact adducin variants for future experimental validation and offer insights into potential therapeutic targets for disorders involving ADD1, ADD2, and ADD3 mutations. Full article
(This article belongs to the Section Bioinformatics)
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24 pages, 7263 KB  
Article
Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance
by Esmaeil Afshari, Samer Houri, Rik Verplancke, Veronique Rochus, Maarten Cauwe, Pieter Gijsenbergh and Maaike Op de Beeck
Sensors 2025, 25(13), 4074; https://doi.org/10.3390/s25134074 - 30 Jun 2025
Cited by 4 | Viewed by 4427
Abstract
The motivation of this work is to enable the use of piezoelectric micromachined ultrasonic transducer (PMUT)-based implants within the human body for biomedical applications, particularly for power and data transfer for implanted medical devices. To protect surrounding tissue and ensure PMUT functionality over [...] Read more.
The motivation of this work is to enable the use of piezoelectric micromachined ultrasonic transducer (PMUT)-based implants within the human body for biomedical applications, particularly for power and data transfer for implanted medical devices. To protect surrounding tissue and ensure PMUT functionality over time, biocompatible and hermetic encapsulation is essential. This study investigates the impact of Parylene F-VT4 layers of various thicknesses as well as the effect of multilayer stacks of Parylene F-VT4 combined with atomic layer-deposited nanolayers of Al2O3 and HfO2 on the mechanical and acoustic properties of PMUTs. PMUTs with various diameters (40 µm, 60 µm, and 80 µm) are fabricated and tested both as stand-alone devices and as arrays. The mechanical behavior of single stand-alone PMUT devices is characterized in air and in water using laser Doppler vibrometry (LDV), while the acoustic output of arrays is evaluated by pressure measurements in water. Experimental results reveal a non-monotonic change in resonance frequency as a function of increasing encapsulation thickness due to the competing effects of added mass and increased stiffness. The performance of PMUT arrays is clearly influenced by the encapsulation. For certain array designs, the encapsulation significantly improved the arrays’ pressure output, a change that is attributed to the change in the acoustic wavelength and inter-element coupling. These findings highlight the impact of encapsulation in modifying and potentially enhancing PMUT performance. Full article
(This article belongs to the Section Physical Sensors)
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14 pages, 3459 KB  
Article
Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film
by Qinghua Ren, Junhong Chen, Xin Liu, Songsong Zhang and Yuandong Gu
Sensors 2022, 22(21), 8100; https://doi.org/10.3390/s22218100 - 22 Oct 2022
Cited by 12 | Viewed by 4061
Abstract
In this paper, a flexible piezoelectric micromachined ultrasonic transducer (PMUT) based on Scandium (Sc)-doped Aluminum Nitride (AlN) film was designed and modeled by the three-dimensional finite element method (3D-FEM). The resonant frequency of 218.1 kHz was reported. It was noticeable that a high [...] Read more.
In this paper, a flexible piezoelectric micromachined ultrasonic transducer (PMUT) based on Scandium (Sc)-doped Aluminum Nitride (AlN) film was designed and modeled by the three-dimensional finite element method (3D-FEM). The resonant frequency of 218.1 kHz was reported. It was noticeable that a high effective electromechanical coupling coefficient (k2eff) of 1.45% was obtained when a combination of a flexible PI and a thin Si layer was used as the PMUT supporting structure layer. Compared with a pure Si supporting layer counterpart, the coupling coefficient had been improved by 110.68%. Additionally, the increase of Sc doping concentration in AlN film further enhanced the device electromechanical coupling coefficient and resulted in an improvement for transmitting/receiving sensitivity of the proposed flexible PMUT. When the doping concentration of Sc reached 30%, the emission sensitivity was as large as 1.721 μm/V, which was 2.86 times greater than that of conventional AlN film-based PMUT. The receiving sensitivity was found to be 2.11 V/KPa, which was as high as 1.23 times the performance of an undoped device. Furthermore, the bending simulation result showed that the proposed flexible PMUT device can maintain a good mechanical stability when the bending radius is greater than 1.5 mm. The simulation of sound field characteristics demonstrated that the flexible PMUT based on AlScN could receive stable sound pressure signals under the bending radius of 1.5 cm. Full article
(This article belongs to the Special Issue Advanced Devices and Materials for Printed Flexible Electronics)
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18 pages, 7371 KB  
Article
Development of a 16-Channel Broadband Piezoelectric Micro Ultrasonic Transducer Array Probe for Pipeline Butt-Welded Defect Detection
by Bolun Li, Changhe Sun, Shouchun Xin, Mingzhang Luo, Chuang Hei, Guofeng Du and Ankang Feng
Sensors 2022, 22(19), 7133; https://doi.org/10.3390/s22197133 - 21 Sep 2022
Cited by 9 | Viewed by 4115
Abstract
Butt welding is extensively applied in long-distance oil and gas pipelines, and it is of great significance to conduct non-destructive ultrasonic testing of girth welds in order to avoid leakage and safety accidents during pipeline production and operation. In view of the limitations [...] Read more.
Butt welding is extensively applied in long-distance oil and gas pipelines, and it is of great significance to conduct non-destructive ultrasonic testing of girth welds in order to avoid leakage and safety accidents during pipeline production and operation. In view of the limitations of large transducer size, single fixed beam angle, low detection resolution and high cost of conventional ultrasonic inspection technologies, a 16-channel piezoelectric micro ultrasonic transducer (PMUT) array probe was developed through theoretical analysis and structural optimization design. After the probe impedance characterization, the experimental results show that the theoretical model can effectively guide the design of the ultrasonic transducer array, offering the maximum operating frequency deviation of less than 5%. The ultrasonic echo performance tests indicate that the average −6 dB bandwidth of the PMUT array probe can be up to 77.9%. In addition, the fabricated PMUT array probe has been used to successfully detect five common internal defects in pipeline girth welds. Due to the multiple micro array elements, flexible handling of each element, large bandwidth and high resolution of defect detection, the designed PMUT array probe can provide a good application potential in structural health monitoring and medical ultrasound imaging fields. Full article
(This article belongs to the Section Physical Sensors)
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9 pages, 1288 KB  
Communication
Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates
by Tianning Liu, Ajay Dangi, Jeong Nyeon Kim, Sri-Rajasekhar Kothapalli, Kyusun Choi, Susan Trolier-McKinstry and Thomas Jackson
Sensors 2021, 21(3), 1014; https://doi.org/10.3390/s21031014 - 2 Feb 2021
Cited by 37 | Viewed by 10402
Abstract
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 [...] Read more.
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch–catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at −6 dB were measured by hydrophone. Full article
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25 pages, 7575 KB  
Article
10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization
by Jeong Nyeon Kim, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler and Judith A. Todd
Sensors 2020, 20(15), 4335; https://doi.org/10.3390/s20154335 - 4 Aug 2020
Cited by 17 | Viewed by 8278
Abstract
Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays [...] Read more.
Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit—center frequency, bandwidth, depth of field, and crosstalk—that could be optimized to design robust, flexible PMUT arrays. Full article
(This article belongs to the Section Electronic Sensors)
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16 pages, 12440 KB  
Article
Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer
by Wei Liu and Dawei Wu
Sensors 2020, 20(11), 3333; https://doi.org/10.3390/s20113333 - 11 Jun 2020
Cited by 26 | Viewed by 7755
Abstract
This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A [...] Read more.
This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A low temperature (<100 °C) adhesive bonding technique is adopted in the fabrication process. Finite element analysis (FEA) is implemented to confirm the capability of predicting the resonant frequency of composite diaphragms and optimizing the device. The manufactured PMUT exhibits a center frequency of 198 kHz with a wide operational bandwidth. Its acoustic performance is demonstrated by transmitting and receiving ultrasound in air on curved surface. The conclusions from this study indicate the proposed PMUT has great potential in ultrasonic and wearable devices applications. Full article
(This article belongs to the Section Electronic Sensors)
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30 pages, 8897 KB  
Review
Development Trends and Perspectives of Future Sensors and MEMS/NEMS
by Jianxiong Zhu, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong and Chengkuo Lee
Micromachines 2020, 11(1), 7; https://doi.org/10.3390/mi11010007 - 18 Dec 2019
Cited by 453 | Viewed by 40196
Abstract
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and [...] Read more.
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios. Full article
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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