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Keywords = electrostatic stiffness

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20 pages, 4445 KiB  
Article
Investigating the Interactions of Peptide Nucleic Acids with Multicomponent Peptide Hydrogels for the Advancement of Healthcare Technologies
by Sabrina Giordano, Monica Terracciano, Enrico Gallo, Carlo Diaferia, Andrea Patrizia Falanga, Antonella Accardo, Monica Franzese, Marco Salvatore, Gennaro Piccialli, Nicola Borbone and Giorgia Oliviero
Gels 2025, 11(5), 367; https://doi.org/10.3390/gels11050367 - 17 May 2025
Viewed by 566
Abstract
This study reports the development of peptide-based hydrogels for the encapsulation and controlled release of peptide nucleic acids in drug delivery applications. Ultrashort aromatic peptides, such as Fmoc-FF, self-assemble into biocompatible hydrogels with nanostructured architectures. The functionalization of tripeptides (Fmoc-FFK and Fmoc-FFC) with [...] Read more.
This study reports the development of peptide-based hydrogels for the encapsulation and controlled release of peptide nucleic acids in drug delivery applications. Ultrashort aromatic peptides, such as Fmoc-FF, self-assemble into biocompatible hydrogels with nanostructured architectures. The functionalization of tripeptides (Fmoc-FFK and Fmoc-FFC) with lysine (K) or cysteine (C) enables electrostatic or covalent interactions with model PNAs engineered with glutamic acid or cysteine residues, respectively. Hydrogels were polymerized in situ in the presence of PNAs, and component ratios were systematically varied to optimize mechanical properties, loading efficiency, and release kinetics. The formulations obtained with a 1/10 ratio of Fmoc-FF(K or C)/Fmoc-FF provided an optimal balance between structural integrity and delivery performance. All hydrogel formulations demonstrated high stiffness (G′ > 19,000 Pa), excellent water retention, and minimal swelling under physiological conditions (ΔW < 4%). The release studies over 10 days showed that electrostatic loading enabled faster and higher release (up to 90%), while covalent bonding resulted in slower, sustained delivery (~15%). These findings highlight the tunability of the hydrogel system for diverse therapeutic applications. Full article
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25 pages, 9498 KiB  
Article
Simulation of Patch Field Effect in Space-Borne Gravitational Wave Detection Missions
by Mingchao She, Xiaodong Peng and Li-E Qiang
Sensors 2025, 25(10), 3107; https://doi.org/10.3390/s25103107 - 14 May 2025
Viewed by 334
Abstract
Space-borne gravitational wave detection missions demand ultra-precise inertial sensors with acceleration noise below 3×1015 m/s2/Hz. Patch field effects, arising from surface contaminants and nonuniform distribution of potential on the test mass [...] Read more.
Space-borne gravitational wave detection missions demand ultra-precise inertial sensors with acceleration noise below 3×1015 m/s2/Hz. Patch field effects, arising from surface contaminants and nonuniform distribution of potential on the test mass (TM) and housing surfaces, pose critical challenges to sensor performance. Existing studies predominantly focus on nonuniform potential distributions while neglecting bulge effects (surface deformation caused by the adhesion of pollutants or oxides, production and processing defects, and other factors) and rely on commercial software with limited flexibility for customized simulations. This paper presents a novel boundary element partitioning and octree-based simulation algorithm to address these limitations, enabling efficient simulation of both electrostatic and geometric impacts of patch fields with low spatiotemporal complexity (O(n)). Leveraging this framework, we systematically investigate the influence of single patches on the TM electrostatic force (ΔFx) and stiffness (ΔKxx) through parametric studies. Key findings reveal that ΔFx and ΔKxx exhibit linear dependence on patch potential variation (Δu) and can be fitted by a quartic polynomial (which can be simplified in some cases, such as only a cubic term) about patch radius (r). The proposed method’s capability to concurrently model geometric bulges and potential nonuniformity offers significant advantages over conventional approaches, providing critical insights for gravitational wave data analysis. These results establish a foundation for optimizing mitigation strategies against patch-induced noise in future space missions. Full article
(This article belongs to the Special Issue Advanced Inertial Sensors: Advances, Challenges and Applications)
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15 pages, 3832 KiB  
Article
Zinc Oxide Nanoparticle Loaded L-Carnosine Biofunctionalized Polyacrylonitrile Nanofibrous Wound Dressing for Post-Surgical Treatment of Melanoma
by Shahin Homaeigohar, Danial Kordbacheh, Sourav Banerjee, Jiacheng Gu, Yilong Zhang and Zhihong Huang
Polymers 2025, 17(2), 173; https://doi.org/10.3390/polym17020173 - 12 Jan 2025
Cited by 2 | Viewed by 1610
Abstract
Nanofibrous dressing materials with an antitumor function can potentially inhibit recurrence of melanoma following the surgical excision of skin tumors. In this study, hydrolyzed polyacrylonitrile (hPAN) nanofibers biofunctionalized with L-carnosine (CAR) and loaded with bio (CAR)-synthesized zinc oxide (ZnO) nanoparticles, ZnO/CAR-hPAN (hereafter called [...] Read more.
Nanofibrous dressing materials with an antitumor function can potentially inhibit recurrence of melanoma following the surgical excision of skin tumors. In this study, hydrolyzed polyacrylonitrile (hPAN) nanofibers biofunctionalized with L-carnosine (CAR) and loaded with bio (CAR)-synthesized zinc oxide (ZnO) nanoparticles, ZnO/CAR-hPAN (hereafter called ZCPAN), were employed to develop an antimelanoma wound dressing. Inspired by the formulation of the commercial wound healing Zn-CAR complex, i.e., polaprezinc (PLZ), for the first time, we benefitted from the synergy of zinc and CAR to create an antimelanoma nanofibrous wound dressing. According to scanning electron microscopy (SEM) images, ultrafine ZnO nanoparticles were homogenously distributed throughout the nanofibrous dressing. The ZCPAN nanofiber mat showed a significantly higher toughness (18.7 MJ.m−3 vs. 1.4 MJ.m−3) and an enhanced elongation at break (stretchability) compared to the neat PAN nanofiber mat (12% vs. 9.5%). Additionally, optical coherence elastography (OCE) measurements indicated that the ZCPAN nanofibrous dressing was as stiff as 50.57 ± 8.17 kPa which is notably larger than that of the PAN nanofibrous dressing, i.e., 24.49 ± 6.83 kPa. The optimum mechanical performance of the ZCPAN nanofibers originates from physicochemical interaction of CAR ligands, hPAN nanofibers, and ZnO nanoparticles through hydrogen bonding, electrostatic bonding, and esterification, as verified using ATR-FTIR. An in vitro cell viability assay using human skin melanoma cells implied that the cells are notably killed in the presence of the ZCPAN nanofibers compared to the PAN nanofibers. Thanks to ROS generating ZnO nanoparticles, this behavior originates from the high reactive oxygen species (ROS)-induced oxidative damage of melanoma cells, as verified through a CellROX assay. In this regard, an apoptotic cell response to the ZCPAN nanofibers was recorded through an apoptosis assay. Taken together, the ZCPAN nanofibers induce an antimelanoma effect through oxidative stress and thus are a high potential wound dressing material to suppress melanoma regrowth after surgical excision of skin tumors. Full article
(This article belongs to the Section Polymer Applications)
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14 pages, 3327 KiB  
Article
Tuning the Interfacial Deformation of Gliadin-Flaxseed Gum Complex Particles for Improving the Foam Stability
by Ping Wu, Wei Shang, Jiaqi Shao, Qianchun Deng, Jisong Zhou, Xia Xiang, Dengfeng Peng and Weiping Jin
Gels 2024, 10(11), 677; https://doi.org/10.3390/gels10110677 - 22 Oct 2024
Viewed by 1207
Abstract
Gliadin nanoparticle (GNP) is a promising foaming agent, but its application is hindered by the limited foam stability under low acidic conditions. Herein, we attempted to tune the foam stability of GNP by coating it with flaxseed gum (FG) and investigated the structure, [...] Read more.
Gliadin nanoparticle (GNP) is a promising foaming agent, but its application is hindered by the limited foam stability under low acidic conditions. Herein, we attempted to tune the foam stability of GNP by coating it with flaxseed gum (FG) and investigated the structure, interfacial behaviors, and foam functionality of gliadin-FG (GFG) particles at pH 4.5. Results showed that the formation of GFG complex particles was driven by an electrostatic interaction between positive charge patches on the surface of GNP (~17 mV) and negative charges in FG molecule (~−13 mV) at all tested ratios. The addition of appropriate amounts of FG (1:0.05) effectively improved the foam stability of GNP. This was because GFG with larger sizes and lower surface charge possessed higher rigidity after coating with FG. When they adsorbed at the air/water interface, their deformation process was slower than that of GNP, as indicated by interfacial dilatational rheology and cryo-SEM, and the covered particles seemed to be more closely distributed to form solid-like and dense interfacial films. Notably, the addition of FG at a higher ratio (1:0.3) promoted the foam stability of GNP by about five folds because the larger GFG with suitable flexibility and wettability could form a stiff interface layer with more significant elastic response, and the unabsorbed particles and FG could form a gel-like network structure in the continuous phase. These characteristics effectively prevented foam disproportionation and coalescence, as well as retard the drainage. Our findings demonstrate that coating GNPs with FG is an effective approach to improve their application in foamed foods. Full article
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18 pages, 5782 KiB  
Article
Quasi-Optical Four-Port Acoustic Filters Based on NEMS Coupled Beam Arrays
by Richard Syms
Micromachines 2024, 15(10), 1257; https://doi.org/10.3390/mi15101257 - 14 Oct 2024
Viewed by 1010
Abstract
Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechanically coupled, electrostatically driven, [...] Read more.
Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechanically coupled, electrostatically driven, coupled beam arrays is then demonstrated using a lumped element model, and the conditions for full power transfer are established. Four-port devices, including directional couplers and coupler filters with complementary transmission ports, are then demonstrated. Predictions are verified for realistic device layouts using the stiffness matrix method. Full article
(This article belongs to the Special Issue The 15th Anniversary of Micromachines)
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12 pages, 2409 KiB  
Article
Polyion Hydrogels of Polymeric and Nanofibrous Carboxymethyl Cellulose and Chitosan: Mechanical Characteristics and Potential Use in Environmental Remediation
by Taisei Kawate, Yehao Wang, Kayee Chan, Nobuyuki Shibata, Yuya Doi, Yuichi Masubuchi and Anatoly Zinchenko
Gels 2024, 10(9), 604; https://doi.org/10.3390/gels10090604 - 23 Sep 2024
Cited by 1 | Viewed by 1906
Abstract
Recently, cellulose and other biomass nanofibers (NFs) have been increasingly utilized in the design of sustainable materials for environmental, biomedical, and other applications. However, the past literature lacks a comparison of the macromolecular and nanofibrous states of biopolymers in various materials, and the [...] Read more.
Recently, cellulose and other biomass nanofibers (NFs) have been increasingly utilized in the design of sustainable materials for environmental, biomedical, and other applications. However, the past literature lacks a comparison of the macromolecular and nanofibrous states of biopolymers in various materials, and the advantages and limitations of using nanofibers (NF) instead of conventional polymers are poorly understood. To address this question, hydrogels based on interpolyelectrolyte complexes (IPECs) between carboxymethyl cellulose nanofibers (CMCNFs) and chitosan (CS) were prepared by ele+ctrostatic cross-linking and compared with the hydrogels of carboxymethyl cellulose (CMC) and CS biopolymers. The presence of the rigid CMCNF altered the mechanism of the IPEC assembly and drastically affected the structure of IPEC hydrogels. The swelling ratios of CMCNF-CS hydrogels of ca. 40% were notably lower than the ca. 100–300% swelling of CMC-CS hydrogels. The rheological measurements revealed a higher storage modulus (G) of the CMCNF-CS hydrogel, reaching 13.3 kPa compared to only 3.5 kPa measured for the CMC-CS hydrogel. Further comparison of the adsorption characteristics of the CMCNF-CS and CMC-CS hydrogels toward Cu2+, Cd2+, and Hg2+ ions showed the slightly higher adsorption capacity of CMC-CS for Cu2+ but similar adsorption capacities for Cd2+ and Hg2+. The adsorption kinetics obeyed the pseudo-second-order adsorption model in both cases. Overall, while the replacement of CMC with CMCNF in hydrogel does not significantly affect the performance of such systems as adsorbents, CMCNF imparts IPEC hydrogel with higher stiffness and a frequency-independent loss (G) modulus and suppresses the hydrogel swelling, so can be beneficial in practical applications that require stable performance under various dynamic conditions. Full article
(This article belongs to the Special Issue Functionalized Gels for Environmental Applications (2nd Edition))
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24 pages, 4104 KiB  
Article
Performance Correction and Parameters Identification Considering Non-Uniform Electric Field in Cantilevered Piezoelectric Energy Harvesters
by Xianfeng Wang, Hui Liu, Huadong Zheng, Guoxiong Liu and Dan Xu
Sensors 2024, 24(15), 4943; https://doi.org/10.3390/s24154943 - 30 Jul 2024
Cited by 2 | Viewed by 1215
Abstract
In the current electromechanical model of cantilevered piezoelectric energy harvesters, the assumption of uniform electric field strength within the piezoelectric layer is commonly made. This uniform electric field assumption seems reasonable since the piezoelectric layer looks like a parallel-plate capacitor. However, for a [...] Read more.
In the current electromechanical model of cantilevered piezoelectric energy harvesters, the assumption of uniform electric field strength within the piezoelectric layer is commonly made. This uniform electric field assumption seems reasonable since the piezoelectric layer looks like a parallel-plate capacitor. However, for a piezoelectric bender, the strain distribution along the thickness direction is not uniform, which means the internal electric field generated by the spontaneous polarization cannot be uniform. In the present study, a non-uniform electric field in the piezoelectric layer is resolved using electrostatic equilibrium equations. Based on these, the traditional distributed parameter electromechanical model is corrected and simplified to a practical single mode one. Compared with a traditional model adopting a uniform electric field, the bending stiffness term involved in the electromechanical governing equations is explicitly corrected. Through comparisons of predicted power output with two-dimensional finite element analysis, the results show that the present model can better predict the power output performance compared with the traditional model. It is found that the relative corrections to traditional model have nothing to do with the absolute dimensions of the harvesters, but only relate to three dimensionless parameters, i.e., the ratio of the elastic layer’s to the piezoelectric layer’s thickness; the ratio of the elastic modulus of the elastic layer to the piezoelectric layer; and the piezoelectric materials’ electromechanical coupling coefficient squared, k312. It is also found that the upper-limit relative corrections are only related to k312, i.e., the higher k312 is, the larger the upper-limit relative corrections will be. For a PZT-5 unimorph harvester, the relative corrections of bending stiffness and corresponding resonant frequency are up to 17.8% and 8.5%, respectively. An inverse problem to identify the material parameters based on experimentally obtained power output performance is also investigated. The results show that the accuracy of material parameters identification is improved when considering a non-uniform electric field. Full article
(This article belongs to the Special Issue Piezoelectric Energy Harvesting System)
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22 pages, 6509 KiB  
Article
Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams
by Ahmad Rahbar Ranji, Gnanesh Nagesh, Fangyan Sun and Mohammed Jalal Ahamed
Sensors 2024, 24(14), 4499; https://doi.org/10.3390/s24144499 - 11 Jul 2024
Viewed by 1863
Abstract
In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and [...] Read more.
In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and refine the resonator geometry and transduction. In proper FEA or analytical modeling, the explicit description and accurate values of the effective mass and stiffness of the resonator structure are needed. Therefore, here we outlined an analytical model approach to calculate those values using the first principles of kinetic and potential energy analyses. The natural frequencies of the structure were then calculated using those parameters and compared with those that were simulated using the FEA tool ANSYS. Dynamic analysis was performed to calculate the pull-in voltage, shift of resonance frequency, and harmonic analyses of the ring to understand how the ring resonator is affected by the applied voltage. Additional analysis was performed for different orientations of silicon and assessing the frequency response and frequency shifts. The prototype was fabricated using the standard silicon-on-insulator (SOI)-based MEMS fabrication process and the experimental results for resonances showed good agreement with the developed model approach. The model approach presented in this paper can be used to provide valuable insights for the optimization of MEMS resonators for various operating conditions. Full article
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
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17 pages, 21253 KiB  
Article
A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing
by Yuta Nagasaka, Alessia Baronchelli, Shuji Tanaka and Takashiro Tsukamoto
Sensors 2024, 24(13), 4038; https://doi.org/10.3390/s24134038 - 21 Jun 2024
Viewed by 1043
Abstract
This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness between the two axes, the effective [...] Read more.
This paper experimentally demonstrates a mode localization sensing approach using a single two-axis orthogonal resonator. The resonator consists of concentric multi-rings connected by elliptic springs that enable two orthogonal oscillation modes. By electrostatically tuning the anisotropic stiffness between the two axes, the effective coupling stiffness between the modes can be precisely controlled down to near-zero values. This allows the sensitivity of mode localization sensing to be tuned over a wide range. An order of magnitude enhancement in sensitivity is experimentally achieved by reducing the coupling stiffness towards zero. The resonator’s simple single-mass structure offers advantages over conventional coupled resonator designs for compact, tunable mode localization sensors. Both positive and negative values of coupling stiffness are demonstrated, enabling maximum sensitivity at the point where coupling crosses through zero. A method for decomposing overlapping resonance peaks is introduced to accurately measure the amplitude ratios of the localized modes even at high sensitivities. The electrostatic tuning approach provides a new option for realizing variable sensitivity mode localization devices using a simplified resonator geometry. Full article
(This article belongs to the Special Issue MEMS and NEMS Sensors: 2nd Edition)
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14 pages, 5184 KiB  
Article
(Non)Resonance Bonds in Molecular Dynamics Simulations: A Case Study concerning C60 Fullerenes
by Jacek Siódmiak
Entropy 2024, 26(3), 214; https://doi.org/10.3390/e26030214 - 28 Feb 2024
Viewed by 1728
Abstract
In the case of certain chemical compounds, especially organic ones, electrons can be delocalized between different atoms within the molecule. These resulting bonds, known as resonance bonds, pose a challenge not only in theoretical descriptions of the studied system but also present difficulties [...] Read more.
In the case of certain chemical compounds, especially organic ones, electrons can be delocalized between different atoms within the molecule. These resulting bonds, known as resonance bonds, pose a challenge not only in theoretical descriptions of the studied system but also present difficulties in simulating such systems using molecular dynamics methods. In computer simulations of such systems, it is often common practice to use fractional bonds as an averaged value across equivalent structures, known as a resonance hybrid. This paper presents the results of the analysis of five forms of C60 fullerene polymorphs: one with all bonds being resonance, three with all bonds being integer (singles and doubles in different configurations), one with the majority of bonds being integer (singles and doubles), and ten bonds (within two opposite pentagons) valued at one and a half. The analysis involved the Shannon entropy value for bond length distributions and the eigenfrequency of intrinsic vibrations (first vibrational mode), reflecting the stiffness of the entire structure. The maps of the electrostatic potential distribution around the investigated structures are presented and the dipole moment was estimated. Introducing asymmetry in bond redistribution by incorporating mixed bonds (integer and partial), in contrast to variants with equivalent bonds, resulted in a significant change in the examined observables. Full article
(This article belongs to the Special Issue Matter-Aggregating Systems at a Classical vs. Quantum Interface)
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15 pages, 4821 KiB  
Article
Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane
by Luhao Gou, Hongliang Wang, Qi Ding, Yulong Liu, Runze Yang, Feng Zhang, Pengcheng Zhang and Gang Cao
Micromachines 2024, 15(2), 279; https://doi.org/10.3390/mi15020279 - 16 Feb 2024
Cited by 1 | Viewed by 1608
Abstract
Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, this paper innovatively proposes [...] Read more.
Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, this paper innovatively proposes the CMUT ring-perforation membrane structure, which effectively improves the acceleration sensitivity by reducing the mechanical stiffness of the elastic membrane. The acceleration sensitivity is 10.9 (Hz/g) in the acceleration range of 0–20 g, which is 100% higher than that of the conventional CMUT structure. This research contributes to the acceleration measurement field of CMUT and can effectively contribute to the breakthrough of vibration acceleration monitoring technology in aerospace, medical equipment, and automotive electronics. Full article
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21 pages, 6998 KiB  
Article
Mouldable Conductive Plastic with Optimised Mechanical Properties
by Arfat Anis, Abdullah Alhamidi, Zahir Bashir, Mohammad Asif Alam and Saeed M. Al-Zahrani
Polymers 2024, 16(3), 311; https://doi.org/10.3390/polym16030311 - 23 Jan 2024
Cited by 1 | Viewed by 1879
Abstract
This paper investigates making an injection mouldable conductive plastic formulation that aims for conductivity into the electromagnetic interference (EMI) shielding range, with good mechanical properties (i.e., stiffness, strength, and impact resistance). While conductivity in the range (electrostatic charge dissipation) and EMI shielding have [...] Read more.
This paper investigates making an injection mouldable conductive plastic formulation that aims for conductivity into the electromagnetic interference (EMI) shielding range, with good mechanical properties (i.e., stiffness, strength, and impact resistance). While conductivity in the range (electrostatic charge dissipation) and EMI shielding have been attained by incorporating conductive fillers such as carbon black, metals powders, and new materials, such as carbon nanotubes (CNTs), this often occurs with a drop in tensile strength, elongation-to-break resistance, and impact resistance. It is most often the case that the incorporation of high modulus fillers leads to an increase in modulus but a drop in strength and impact resistance. In this work, we have used short carbon fibres as the conductive filler and selected a 50/50 PBT/rPET (recycled PET) for the plastic matrix. Carbon fibres are cheaper than CNTs and graphenes. The PBT/rPET has low melt viscosity and crystallises sufficiently fast during injection moulding. To improve impact resistance, a styrene-ethylene-butadiene-styrene (SEBS) rubber toughening agent was added to the plastic. The PBT/rPET had very low-impact resistance and the SEBS provided rubber toughening to it; however, the rubber caused a drop in the tensile modulus and strength. The short carbon fibre restored the modulus and strength, which reached higher value than the PBT/rPET while providing the conductivity. Scanning electron microscope pictures showed quite good bonding of the current filler (CF) to the PBT/rPET. An injection mouldable conductive plastic with high conductivity and raised modulus, strength, and impact resistance could be made. Full article
(This article belongs to the Special Issue Polymeric Composites: Manufacturing, Processing and Applications)
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17 pages, 4602 KiB  
Article
MEMS Electrostatically Driven Coupled Beam Filter Banks
by Richard Syms and Adam Bouchaala
Micromachines 2023, 14(12), 2214; https://doi.org/10.3390/mi14122214 - 7 Dec 2023
Cited by 1 | Viewed by 1281
Abstract
MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with in-plane motion have been demonstrated up to the VHF band. Filters higher than second order with parallel plate drives have inherent tuning difficulties, which may be resolved by adding mass-loaded beams to [...] Read more.
MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with in-plane motion have been demonstrated up to the VHF band. Filters higher than second order with parallel plate drives have inherent tuning difficulties, which may be resolved by adding mass-loaded beams to the ends of the array. These beams deflect for DC voltages, and thus allow synchronized electrostatic tuning, but do not respond to in-band AC voltages and hence do not interfere with dynamic synchronization. Additional out-of-band responses may be damped, leaving the desired response. The principle is extended here to close-packed banks of filters, with adjacent arrays sharing mass-loaded beams that localize modes to sub-arrays. The operating principles are explained using a lumped element model (LEM) of the equations of motion in terms of resonant modes and the reflection of acoustic waves at discontinuities. Performance is simulated using the LEM and verified using the more realistic stiffness matrix method (SMM) for banks of up to eight filters. Similar or dissimilar filters may be combined in a compact arrangement, and the method may be extended to higher order resonances and alternative coupled resonator systems. Full article
(This article belongs to the Special Issue MEMS Nano/Microfabrication)
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28 pages, 9894 KiB  
Article
Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes
by Waqas Amin Gill, Ian Howard, Ilyas Mazhar and Kristoffer McKee
Designs 2023, 7(5), 106; https://doi.org/10.3390/designs7050106 - 11 Sep 2023
Cited by 8 | Viewed by 3480
Abstract
Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sensing applications. The design of a MEMS [...] Read more.
Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sensing applications. The design of a MEMS vibrating ring gyroscope incorporates an oscillating ring structure as a proof mass, reflecting unique design challenges and possibilities. This paper presents a comprehensive design analysis of the MEMS vibrating ring gyroscope from the mechanical, electrical, and damping perspectives. The mechanical design of the MEMS vibrating ring gyroscope investigates the various frame designs of the vibrating ring structure, as well as the various beam structures, including rectangular and semicircular beam structures, which are analyzed using mathematical models and finite element analysis (FEA) simulations that provide an in-depth analysis of the stiffness and deflection of the vibrating structures. The electrical designs of the MEMS vibrating ring gyroscope are analyzed using various electrode configurations, electrostatic actuation, and capacitive detection mechanisms. The design analysis of various forms of damping, including viscous, structural, thermoelastic, and anchor damping, is discussed. The variety of design structures is investigated for MEMS vibrating ring gyroscopes’ mechanical, electrical, and damping performance. Full article
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14 pages, 5503 KiB  
Article
A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation
by Xiangming Liu, Shanhong Xia, Chunrong Peng, Yahao Gao, Simin Peng, Zhouwei Zhang, Wei Zhang, Xuebin Xing and Yufei Liu
Micromachines 2023, 14(8), 1489; https://doi.org/10.3390/mi14081489 - 25 Jul 2023
Cited by 2 | Viewed by 1731
Abstract
This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the driving voltage. The sensor is composed of a resonator, driving [...] Read more.
This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the driving voltage. The sensor is composed of a resonator, driving electrode, detection electrode, transition electrode, and electrostatic field sensing plate. The working principle is that when there is an electrostatic field, an induction charge will appear at the surface of the electrostatic field sensing plate and induce electrostatic stiffness on the resonator, which will cause a resonant frequency shift. The resonant frequency is used as the output signal of the microsensor. The characteristics of the electrostatic field sensor are analyzed with a theoretical model and verified by finite element simulation. A device prototype is fabricated based on the Silicon on Insulator (SOI) process and tested under vacuum conditions. The results indicate that the sensitivity of the sensor is 0.1384Hz/(kV/m) and the resolution is better than 10 V/m. Full article
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