You are currently on the new version of our website. Access the old version .

45 Results Found

  • Communication
  • Open Access
11 Citations
3,526 Views
9 Pages

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

  • Yingchun Fu,
  • Guowei Han,
  • Jiebin Gu,
  • Yongmei Zhao,
  • Jin Ning,
  • Zhenyu Wei,
  • Fuhua Yang and
  • Chaowei Si

5 July 2022

High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelero...

  • Article
  • Open Access
10 Citations
2,973 Views
14 Pages

A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology

  • Yahao Gao,
  • Simin Peng,
  • Xiangming Liu,
  • Yufei Liu,
  • Wei Zhang,
  • Chunrong Peng and
  • Shanhong Xia

29 February 2024

In order to enhance the sensitivity of wafer-level vacuum-packaged electric field sensors, this paper proposed a vertical-resonant MEMS electric field sensor based on TGV (Through Glass Via) technology. The microsensor is composed of the electric fie...

  • Feature Paper
  • Article
  • Open Access
1 Citations
1,225 Views
15 Pages

Integrated Additive Manufacturing of TGV Interconnects and High-Frequency Circuits via Bipolar-Controlled EHD Jetting

  • Dongqiao Bai,
  • Jin Huang,
  • Hongxiao Gong,
  • Jianjun Wang,
  • Yunna Pu,
  • Jiaying Zhang,
  • Peng Sun,
  • Zihan Zhu,
  • Pan Li and
  • Chaoyu Liang
  • + 2 authors

2 August 2025

Electrohydrodynamic (EHD) printing offers mask-free, high-resolution deposition across a broad range of ink viscosities, yet combining void-free filling of high-aspect-ratio through-glass vias (TGVs) with ultrafine drop-on-demand (DOD) line printing...

  • Review
  • Open Access
42 Citations
29,421 Views
21 Pages

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

  • Chen Yu,
  • Shaocheng Wu,
  • Yi Zhong,
  • Rongbin Xu,
  • Tian Yu,
  • Jin Zhao and
  • Daquan Yu

28 December 2023

Glass has emerged as a highly versatile substrate for various sensor and MEMS packaging applications, including electromechanical, thermal, optical, biomedical, and RF devices, due to its exceptional properties such as high geometrical tolerances, ou...

  • Article
  • Open Access
13 Citations
6,829 Views
15 Pages

9 March 2022

The development of 5G mobile communication created the need for high-frequency communication systems, which require vast quantities of radio frequency (RF) filters with a high-quality factor (Q) and low inband losses. In this study, the packaging of...

  • Communication
  • Open Access
15 Citations
3,259 Views
8 Pages

31 March 2023

In order to effectively employ through-glass vias (TGVs) for high-frequency software package design, it is crucial to accurately characterize the S-parameters of vertical interconnection structures in 3D glass packaging. A methodology is proposed for...

  • Article
  • Open Access
24 Citations
6,119 Views
10 Pages

Research on Wafer-Level MEMS Packaging with Through-Glass Vias

  • Fan Yang,
  • Guowei Han,
  • Jian Yang,
  • Meng Zhang,
  • Jin Ning,
  • Fuhua Yang and
  • Chaowei Si

28 December 2018

A MEMS fabrication process with through-glass vias (TGVs) by laser drilling was presented, and reliability concerns about MEMS packaging with TGV, likes debris and via metallization, were overcome. The via drilling process on Pyrex 7740 glasses was s...

  • Article
  • Open Access
1 Citations
3,251 Views
12 Pages

Substrate Integrated Waveguide on Glass with Vacuum-Filled Tin Through Glass Vias for Millimeter-Wave Applications

  • Seung-Han Chung,
  • Ho-Sun Yeom,
  • Che-Heung Kim,
  • Yong-Kweon Kim,
  • Seung-Ki Lee,
  • Chang-Wook Baek and
  • Jae-Hyoung Park

26 December 2024

This paper presents a novel approach to fabricate substrate integrated waveguides (SIWs) on glass substrates with tin (Sn) through glass vias (TGVs) tailored for millimeter-wave applications. The fabrication process employs a custom-designed vacuum s...

  • Article
  • Open Access
12 Citations
9,273 Views
10 Pages

14 September 2023

Selective laser etching is a promising candidate for the mass production of glass interposers. It comprises two steps: local modification by an ultrashort-pulsed laser and chemical etching of the modified volume. According to previous studies, when a...

  • Article
  • Open Access
1 Citations
2,535 Views
13 Pages

A Fully Integrated Solid-State Charge Detector with through Fused Silica Glass via Process

  • Xiaomeng Wu,
  • Liangjian Wen,
  • Liqiang Cao,
  • Guofu Cao,
  • Gaosong Li,
  • Yasheng Fu,
  • Zhongyao Yu,
  • Zhidan Fang and
  • Qidong Wang

20 February 2023

A charge detector is a vital component in neutrino and dark matter detection. The integration of a charge collector in the form of flat pads and readout modules has been proposed as an optimization method as it can reduce noise and installation compl...

  • Article
  • Open Access
15 Citations
10,012 Views
9 Pages

9 April 2018

A millimeter-wave substrate integrated waveguide (SIW) has been demonstrated using micromachined tungsten-coated through glass silicon via (TGSV) structures. Two-step deep reactive ion etching (DRIE) of silicon vias and selective tungsten coating ont...

  • Review
  • Open Access
22 Citations
9,126 Views
34 Pages

8 July 2023

With the increasing demand for high-density integration, low power consumption and high bandwidth, creating more sophisticated interconnection technologies is becoming increasingly crucial. Three-dimensional (3D) integration technology is known as th...

  • Article
  • Open Access
20 Citations
3,415 Views
18 Pages

Directional TGV-Based Image Restoration under Poisson Noise

  • Daniela di Serafino,
  • Germana Landi and
  • Marco Viola

We are interested in the restoration of noisy and blurry images where the texture mainly follows a single direction (i.e., directional images). Problems of this type arise, for example, in microscopy or computed tomography for carbon or glass fibres....

  • Feature Paper
  • Review
  • Open Access
1 Citations
6,761 Views
53 Pages

10 September 2025

The rapid growth of artificial intelligence (AI), data centers, and high-performance computing (HPC) has increased the demand for large bandwidth, high energy efficiency, and high-density optical interconnects. Co-packaged optics (CPO) technology off...

  • Article
  • Open Access
7 Citations
3,698 Views
13 Pages

Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil Integration

  • Jan Niklas Haus,
  • Martin Schwerter,
  • Michael Schneider,
  • Marcel Gäding,
  • Monika Leester-Schädel,
  • Ulrich Schmid and
  • Andreas Dietzel

13 September 2021

Current research in the field of aviation considers actively controlled high-lift structures for future civil airplanes. Therefore, pressure data must be acquired from the airfoil surface without influencing the flow due to sensor application. For ex...

  • Article
  • Open Access
337 Views
11 Pages

A Bidirectional Design Method for Through-Glass Vias with Selective Laser Wet Etching Based on the Cross-Modal Learning Method

  • Yongbo Meng,
  • Liqing Wu,
  • Bo Yuan,
  • Xingping Zhou,
  • Yan Li,
  • Zhijun Zhang and
  • Yuechun Shi

27 December 2025

As an interposer, Through-Glass Vias (TGVs) play a critical role in advanced packaging such as Co-packaged optics (CPO). Currently, due to the complex influence of laser wet-etching process parameters, the precise bidirectional prediction of TGV para...

  • Article
  • Open Access
23 Citations
13,258 Views
14 Pages

21 October 2022

Three-dimensional (3D) interconnection technology based on glass through vias (TGVs) has been used to integrate passive devices, and optoelectronic devices due to its superior electrical qualities, outstanding mechanical stability, and lower cost. Ne...

  • Article
  • Open Access
6 Citations
5,582 Views
14 Pages

22 January 2023

A millimeter-wave substrate-integrated waveguide (SIW) was firstly demonstrated using the micromachining of photoetchable glass (PEG) for 5G applications. A PEG substrate was used as a dielectric material of the SIW, and its photoetchable properties...

  • Article
  • Open Access
3 Citations
2,780 Views
13 Pages

Semi-Automatic MRI Feature Assessment in Small- and Medium-Volume Benign Prostatic Hyperplasia after Prostatic Artery Embolization

  • Vanessa F. Schmidt,
  • Mirjam Schirren,
  • Maurice M. Heimer,
  • Philipp M. Kazmierczak,
  • Clemens C. Cyran,
  • Moritz Wildgruber,
  • Max Seidensticker,
  • Jens Ricke and
  • Olga Solyanik

25 February 2022

(1) Background: To assess the treatment response of benign prostatic syndrome (BPS) following prostatic artery embolization (PAE) using a semi-automatic software analysis of magnetic resonance imaging (MRI) features and clinical indexes. (2) Methods:...

  • Article
  • Open Access
6 Citations
3,048 Views
11 Pages

20 October 2022

In glass interposer architecture and its assembly process, the mechanical responses of interposer structure under thermocompression process-induced thermal loading and generated shrinkage of molding material are regarded as a major reliability issue....

  • Article
  • Open Access
2 Citations
3,011 Views
16 Pages

MR-Based Electrical Conductivity Imaging Using Second-Order Total Generalized Variation Regularization

  • Xiangdong Sun,
  • Lijun Lu,
  • Li Qi,
  • Yingjie Mei,
  • Xiaoyun Liu and
  • Wufan Chen

8 November 2020

Electrical properties provide essential information for cancer detection and specific absorption rate (SAR) estimation. Magnetic resonance electrical properties tomography (MREPT) is an approach to retrieve the distribution of electrical properties....

  • Article
  • Open Access
1 Citations
4,435 Views
15 Pages

27 July 2023

The multi-chiplet technique is expected to be a promising solution to achieve high-density system integration with low power consumption and high usage ratio. This technique can be integrated with a glass interposer to accomplish a competitive low fa...

  • Article
  • Open Access
1 Citations
3,695 Views
13 Pages

25 May 2023

Non-furnace boilers can improve the efficiency of industrial once-through boilers. However, temperature non-uniformity occurs in the economizer connected vertically to the boiler. Heat transfer performance is degraded by temperature non-uniformity. T...

  • Article
  • Open Access
1 Citations
2,492 Views
12 Pages

19 November 2021

The reconstruction problem in X-ray computed tomography (XCT) is notoriously difficult in the case where only a small number of measurements are made. Based on the recently discovered Compressed Sensing paradigm, many methods have been proposed in or...

  • Article
  • Open Access
9 Citations
4,383 Views
10 Pages

25 February 2024

This research focuses on the manufacturing of a glass interposer that has gone through glass via (TGV) connection holes. Glass has unique properties that make it suitable for 3D integrated circuit (IC) interposers, which include low permittivity, hig...

  • Review
  • Open Access
33 Citations
9,198 Views
16 Pages

Migraine: Calcium Channels and Glia

  • Marta Kowalska,
  • Michał Prendecki,
  • Thomas Piekut,
  • Wojciech Kozubski and
  • Jolanta Dorszewska

Migraine is a common neurological disease that affects about 11% of the adult population. The disease is divided into two main clinical subtypes: migraine with aura and migraine without aura. According to the neurovascular theory of migraine, the act...

  • Article
  • Open Access
5 Citations
3,939 Views
22 Pages

Here, we describe the validation of a new phenotypic culture-based AtbFinder method for rapid selection of antibiotics in vitro using specimens with mono- and polybacterial infections. AtbFinder, which can be applied to any type of non-blood tissue,...

  • Article
  • Open Access
5 Citations
4,502 Views
24 Pages

22 October 2019

Image deblurring under the background of impulse noise is a typically ill-posed inverse problem which attracted great attention in the fields of image processing and computer vision. The fast total variation deconvolution (FTVd) algorithm proved to b...

  • Article
  • Open Access
2 Citations
1,996 Views
23 Pages

Spectral computed tomography (CT)-reconstructed images often exhibit severe noise and artifacts, which compromise the practical application of spectral CT imaging technology. Methods that use tensor dictionary learning (TDL) have shown superior perfo...

  • Review
  • Open Access
119 Citations
16,928 Views
23 Pages

13 February 2017

Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (μTAS) and microfluidic devices for biosensing. Moreover, glas...

  • Proceeding Paper
  • Open Access
3,206 Views
5 Pages

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

  • Kestutis Grigoras,
  • Aapo Varpula,
  • Corinna Grosse,
  • Daniel May,
  • Mohamad Abo Ras and
  • Mika Prunnila

28 November 2018

Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip con...

  • Article
  • Open Access
5 Citations
7,501 Views
24 Pages

29 September 2023

In this article, electrical performance analysis of high-speed interconnection and power delivery network (PDN) in low-loss glass substrate-based interposers is conducted considering signal integrity (SI) and power integrity (PI). The low-loss glass...

  • Article
  • Open Access
1 Citations
2,898 Views
28 Pages

30 November 2022

In the simulation of compressible turbulent flows via a high-order flux reconstruction framework, the artificial viscosity model plays an important role to ensure robustness in the strongly compressible region. However, the impact of the artificial v...

  • Article
  • Open Access
22 Citations
7,176 Views
24 Pages

A Review of Depth and Normal Fusion Algorithms

  • Doris Antensteiner,
  • Svorad Štolc and
  • Thomas Pock

1 February 2018

Geometric surface information such as depth maps and surface normals can be acquired by various methods such as stereo light fields, shape from shading and photometric stereo techniques. We compare several algorithms which deal with the combination o...

  • Article
  • Open Access
1 Citations
2,010 Views
23 Pages

Image deblurring is a fundamental image processing task, and research for efficient image deblurring methods is still a great challenge. Most of the currently existing methods are focused on TV-based models and regularization term construction; littl...

  • Article
  • Open Access
3 Citations
1,676 Views
12 Pages

24 October 2022

Image edge is the most indicative feature that forms a significant role in image analysis and image understanding, but edge-detail preservation is a difficult task in image restoration due to noise and blur during imaging. The balance between edge pr...

  • Article
  • Open Access
8 Citations
4,988 Views
14 Pages

Genetic Imbalances in Argentinean Patients with Congenital Conotruncal Heart Defects

  • Marisol Delea,
  • Lucía D. Espeche,
  • Carlos D. Bruque,
  • María Paz Bidondo,
  • Lucía S. Massara,
  • Jaen Oliveri,
  • Paloma Brun,
  • Viviana R. Cosentino,
  • Celeste Martinoli and
  • Liliana Dain
  • + 13 authors

11 September 2018

Congenital conotruncal heart defects (CCHD) are a subset of serious congenital heart defects (CHD) of the cardiac outflow tracts or great arteries. Its frequency is estimated in 1/1000 live births, accounting for approximately 10–30% of all CHD...

  • Article
  • Open Access
2 Citations
1,683 Views
24 Pages

18 August 2025

Teleoperated ground vehicles (TGVs) are widely applied in hazardous and dynamic environments, where communication delay and low transparency increase operator workload and reduce control performance. This study explores the cognitive and physiologica...

  • Article
  • Open Access
15 Citations
5,769 Views
24 Pages

7 September 2022

Crosswind action on a train poses a risk of vehicle overturning or derailment. To assess if new train designs fulfill the safety requirements, computational fluid dynamics is commonly used. This article presents a comprehensive wind flow analysis on...

  • Article
  • Open Access
2 Citations
3,005 Views
21 Pages

Modeling and Simulation for Predicting Thermo-Mechanical Behavior of Wafer-Level Cu-PI RDLs During Manufacturing

  • Xianglong Chu,
  • Shitao Wang,
  • Chunlei Li,
  • Zhizhen Wang,
  • Shenglin Ma,
  • Daowei Wu,
  • Hai Yuan and
  • Bin You

The development of chip manufacturing and advanced packaging technologies has significantly changed redistribution layers (RDLs), leading to shrinking line width/spacing, increasing the number of build-up layers and package size, and introducing orga...

  • Article
  • Open Access
37 Citations
7,741 Views
27 Pages

Effective Alternating Direction Optimization Methods for Sparsity-Constrained Blind Image Deblurring

  • Naixue Xiong,
  • Ryan Wen Liu,
  • Maohan Liang,
  • Di Wu,
  • Zhao Liu and
  • Huisi Wu

18 January 2017

Single-image blind deblurring for imaging sensors in the Internet of Things (IoT) is a challenging ill-conditioned inverse problem, which requires regularization techniques to stabilize the image restoration process. The purpose is to recover the und...

  • Article
  • Open Access
404 Views
20 Pages

17 October 2025

Intelligent surface vehicles, including unmanned surface vehicles (USVs) and autonomous surface vehicles (ASVs), have gained significant attention from both academic and industrial communities. However, shipboard maritime images captured under hazy w...

  • Article
  • Open Access
18 Citations
13,367 Views
20 Pages

11 December 2017

The quantitative measure of dissipative properties of different numerical schemes is crucial to computational methods in the field of aerospace applications. Therefore, the objective of the present study is to examine the resolving power of Monotonic...

  • Article
  • Open Access
998 Views
15 Pages

In this research work, two distinct types of three-dimensional (3D) capacitors were successfully fabricated, each with its own unique features and advantages. The first type of capacitor is centered around a 3D nanoporous structure. This structure is...

  • Article
  • Open Access
17 Citations
4,105 Views
23 Pages

Background: Multiple studies have suggested that paralgesia (hyperalgesia and cutaneous allodynia) in migraine reflects the activation and sensitisation of the trigeminovascular system (TGVS). In particular, it reflects the second-order and higher ne...