- Communication
A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost
- Yingchun Fu,
- Guowei Han,
- Jiebin Gu,
- Yongmei Zhao,
- Jin Ning,
- Zhenyu Wei,
- Fuhua Yang and
- Chaowei Si
High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelero...