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Keywords = N-type porous silicon

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16 pages, 10906 KiB  
Article
Icephobic Coating Based on Novel SLIPS Made of Infused PTFE Fibers for Aerospace Application
by Adrián Vicente, Pedro J. Rivero, Nadine Rehfeld, Andreas Stake, Paloma García, Francisco Carreño, Julio Mora and Rafael Rodríguez
Polymers 2024, 16(5), 571; https://doi.org/10.3390/polym16050571 - 20 Feb 2024
Cited by 5 | Viewed by 2194
Abstract
The development of slippery surfaces has been widely investigated due to their excellent icephobic properties. A distinct kind of an ice-repellent structure known as a slippery liquid-infused porous surface (SLIPS) has recently drawn attention due to its simplicity and efficacy as a passive [...] Read more.
The development of slippery surfaces has been widely investigated due to their excellent icephobic properties. A distinct kind of an ice-repellent structure known as a slippery liquid-infused porous surface (SLIPS) has recently drawn attention due to its simplicity and efficacy as a passive ice-protection method. These surfaces are well known for exhibiting very low ice adhesion values (τice < 20 kPa). In this study, pure Polytetrafluoroethylene (PTFE) fibers were fabricated using the electrospinning process to produce superhydrophobic (SHS) porous coatings on samples of the aeronautical alloy AA6061-T6. Due to the high fluorine–carbon bond strength, PTFE shows high resistance and chemical inertness to almost all corrosive reagents as well as extreme hydrophobicity and high thermal stability. However, these unique properties make PTFE difficult to process. For this reason, to develop PTFE fibers, the electrospinning technique has been used by an PTFE nanoparticles (nP PTFE) dispersion with addition of a very small amount of polyethylene oxide (PEO) followed with a sintering process (380 °C for 10 min) to melt the nP PTFE together and form uniform fibers. Once the porous matrix of PTFE fibers is attached, lubricating oil is added into the micro/nanoscale structure in the SHS in place of air to create a SLIPS. The experimental results show a high-water contact angle (WCA) ≈ 150° and low roll-off angle (αroll-off) ≈ 22° for SHS porous coating and a decrease in the WCA ≈ 100° and a very low αroll-off ≈ 15° for SLIPS coating. On one hand, ice adhesion centrifuge tests were conducted for two types of icing conditions (glaze and rime) accreted in an ice wind tunnel (IWT), as well as static ice at different ice adhesion centrifuge test facilities in order to compare the results for SHS, SLIPs and reference materials. This is considered a preliminary step in standardization efforts where similar performance are obtained. On the other hand, the ice adhesion results show 65 kPa in the case of SHS and 4.2 kPa of SLIPS for static ice and <10 kPa for rime and glace ice. These results imply a significant improvement in this type of coatings due to the combined effect of fibers PTFE and silicon oil lubricant. Full article
(This article belongs to the Section Polymer Fibers)
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18 pages, 5108 KiB  
Article
Investigations of Nanoscale Columnar AlxGa1-xN/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface
by Pavel Vladimirovich Seredin, Nikolay Kurilo, Dmitry L. Goloshchapov, Vladimir Kashkarov, Aleksandr S. Lenshin, Nikita Buylov, Dmitry Nesterov, Andrey Mizerov, Sergey A. Kukushkin, S. Timoshnev, K. Yu. Shubina and M. S. Sobolev
Photonics 2023, 10(11), 1209; https://doi.org/10.3390/photonics10111209 - 30 Oct 2023
Viewed by 1349
Abstract
The growth of nanoscale columnar AlxGa1-xN/AlN heterostructures on the surface of silicon substrates using plasma-activated nitrogen molecular-beam epitaxy was investigated in this work. Silicon substrates include atomic-smooth cSi substrate, Si substrate with a transition layer of porous silicon porSi/cSi [...] Read more.
The growth of nanoscale columnar AlxGa1-xN/AlN heterostructures on the surface of silicon substrates using plasma-activated nitrogen molecular-beam epitaxy was investigated in this work. Silicon substrates include atomic-smooth cSi substrate, Si substrate with a transition layer of porous silicon porSi/cSi and a hybrid substrate involving a silicon carbide layer grown with matched substitution of the atoms on the surface of porous silicon SiC/porSi/cSi. A complex analysis performed using a set of structural and spectroscopic techniques demonstrated that the epitaxial growth of the nuclear AlN layer on all types of the substrates in a N-enriched environment resulted in the formation of AlxGa1-xN/AlN heterostructures with a Ga-polar surface, which was realized only on the SiC/porSi/cSi substrate. The layer of AlxGa1-xN on cSi and porSi/cSi substrates was in the state of disordered alloy with an excess of gallium atom content. It was shown that a great difference in the lattice parameters of a substrate–film pair resulted not only in the appearance of a number of various defects but also in a considerable effect on the chemical process of the formation of the alloys, in our case, the AlxGa1-xN alloy. It was shown that nanoscale columns of AlxGa1-xN formed on SiC/porSi/cSi substrate were inclined relative to the c-axis, which was connected with the features of the formation of a SiC layer by the matched substitution of the atoms on the porous Si substrate, resulting in the formation of the inclined (111) SiC facets at the boundary of the (111) Si surface and pores in Si. Optical studies of the grown samples demonstrated that the optical band-to-band transition for the AlxGa1-xN alloy with Eg = 3.99 eVB was observed only for the heterostructure grown on the SiC/porSi/cSi substrate. A qualitative model is proposed to explain the difference in the formation of AlxGa1-xN layers on the substrates of cSi, porSi/cSi and SiC/porSi/cSi. The results obtained in our work demonstrate the availability of using SiC/porSi/cSi substrates for the integration of silicon technology and that used for the synthesis of nanoscale columnar AlxGa1-xN heterostructures using plasma-activated molecular-beam epitaxy with a nitrogen source. Full article
(This article belongs to the Special Issue III-V Semiconductors Optoelectronic Materials and Devices)
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17 pages, 9085 KiB  
Article
SiC/Si Hybrid Substrate Synthesized by the Method of Coordinated Substitution of Atoms: A New Type of Substrate for LEDs
by Sergey A. Kukushkin, Lev K. Markov, Alexey S. Pavlyuchenko, Irina P. Smirnova, Andrey V. Osipov, Alexander S. Grashchenko, Andrey E. Nikolaev, Alexey V. Sakharov, Andrey F. Tsatsulnikov and Genadii V. Sviatets
Coatings 2023, 13(7), 1142; https://doi.org/10.3390/coatings13071142 - 24 Jun 2023
Cited by 4 | Viewed by 2802
Abstract
This paper proposes a new type of substrate for manufacturing LEDs based on AlInGaN heterostructures. Instead of depositing SiC layers on the surface of Si using the conventional method, a new method involving the coordinated substitution of atoms (MCSA) to form the SiC [...] Read more.
This paper proposes a new type of substrate for manufacturing LEDs based on AlInGaN heterostructures. Instead of depositing SiC layers on the surface of Si using the conventional method, a new method involving the coordinated substitution of atoms (MCSA) to form the SiC layer is proposed. This new approach enables the growth of epitaxial GaN layers with low defect content and facilitates transfer to any surface. The paper details the technology of manufacturing LEDs on SiC/Si substrates obtained by the MCSA and elaborates on the benefits of using these substrates in LED production. Additionally, the advantages of the growth interface between SiC and Si materials are discussed. Moreover, it is found that thinner SiC layers (<200 nm) contribute to the scattering of the LED’s own radiation in the heterostructure waveguide, which decreases its absorption by silicon. For flip-chip LEDs with the substrate removed, substrates with thicker SiC layers (~400 nm) and a growth porous layer of several microns at the SiC-Si interface is utilized to simplify Si substrate removal and enhance the manufacturing process’s cost-effectiveness. Full article
(This article belongs to the Special Issue Feature Papers of Coatings for Energy Applications)
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10 pages, 4194 KiB  
Article
Highly Flexible Triboelectric Nanogenerator Using Porous Carbon Nanotube Composites
by Jaehee Shin, Sungho Ji, Hanchul Cho and Jinhyoung Park
Polymers 2023, 15(5), 1135; https://doi.org/10.3390/polym15051135 - 24 Feb 2023
Cited by 19 | Viewed by 3448
Abstract
The rapid development of portable and wearable electronic devices has led researchers to actively study triboelectric nanogenerators (TENGs) that can provide self-powering capabilities. In this study, we propose a highly flexible and stretchable sponge-type TENG, named flexible conductive sponge triboelectric nanogenerator (FCS-TENG), which [...] Read more.
The rapid development of portable and wearable electronic devices has led researchers to actively study triboelectric nanogenerators (TENGs) that can provide self-powering capabilities. In this study, we propose a highly flexible and stretchable sponge-type TENG, named flexible conductive sponge triboelectric nanogenerator (FCS-TENG), which consists of a porous structure manufactured by inserting carbon nanotubes (CNTs) into silicon rubber using sugar particles. Nanocomposite fabrication processes, such as template-directed CVD and ice freeze casting methods for fabricating porous structures, are very complex and costly. However, the nanocomposite manufacturing process of flexible conductive sponge triboelectric nanogenerators is simple and inexpensive. In the tribo-negative CNT/silicone rubber nanocomposite, the CNTs act as electrodes, increasing the contact area between the two triboelectric materials, increasing the charge density, and improving charge transfer between the two phases. Measurements of the performance of flexible conductive sponge triboelectric nanogenerators using an oscilloscope and a linear motor, under a driving force of 2–7 N, show that it generates an output voltage of up to 1120 V and a current of 25.6 µA. In addition, by using different weight percentages of carbon nanotubes (CNTs), it is shown that the output power increases with the weight percentage of carbon nanotubes (CNTs). The flexible conductive sponge triboelectric nanogenerator not only exhibits good performance and mechanical robustness but can also be directly used in light-emitting diodes connected in series. Furthermore, its output remains extremely stable even after 1000 bending cycles in an ambient environment. In sum, the results demonstrate that flexible conductive sponge triboelectric nanogenerators can effectively power small electronics and contribute to large-scale energy harvesting. Full article
(This article belongs to the Special Issue State-of-the-Art Polymer Science and Technology in Korea (2022,2023))
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7 pages, 2762 KiB  
Article
Nanoporous Layers and the Peculiarities of Their Local Formation on a Silicon Wafer
by Vitali Vasil’evich Starkov, Ekaterina Alexanrovna Gosteva, Dmitry Dmitry Zherebtsov, Maxim Vladimirovich Chichkov and Nikita Valerievich Alexandrov
Processes 2022, 10(1), 163; https://doi.org/10.3390/pr10010163 - 14 Jan 2022
Cited by 3 | Viewed by 2708
Abstract
This review presents the results of the local formation of nanostructured porous silicon (NPSi) on the surface of silicon wafers by anodic etching using a durite intermediate ring. The morphological and crystallographic features of NPSi structures formed on n- and p-type silicon with [...] Read more.
This review presents the results of the local formation of nanostructured porous silicon (NPSi) on the surface of silicon wafers by anodic etching using a durite intermediate ring. The morphological and crystallographic features of NPSi structures formed on n- and p-type silicon with low and relatively high resistivity have also been investigated. The proposed scheme allows one to experiment with biological objects (for example, stem cells, neurons, and other objects) in a locally formed porous structure located in close proximity to the electronic periphery of sensor devices on a silicon wafer. Full article
(This article belongs to the Special Issue Hierarchical Porous Materials: Synthesis, Properties and Applications)
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11 pages, 2931 KiB  
Article
A Novel Chemical Gas Vapor Sensor Based on Photoluminescence Enhancement of Rugate Porous Silicon Filters
by Zicheng Zhou and Honglae Sohn
Sensors 2020, 20(9), 2722; https://doi.org/10.3390/s20092722 - 10 May 2020
Cited by 4 | Viewed by 3511
Abstract
In this study, an innovative rugate filter configuration porous silicon (PSi) with enhanced photoluminescence intensity was fabricated. The fabricated PSi exhibited dual optical properties with both sharp optical reflectivity and sharp photoluminescence (PL), and it was developed for use in organic vapor sensing. [...] Read more.
In this study, an innovative rugate filter configuration porous silicon (PSi) with enhanced photoluminescence intensity was fabricated. The fabricated PSi exhibited dual optical properties with both sharp optical reflectivity and sharp photoluminescence (PL), and it was developed for use in organic vapor sensing. When the wavelength of the resonance peak from the rugate PSi filters is engineered to overlap with the emission band of the PL from the PSi quantum dots, the PL intensity is amplified, thus reducing the full width at half maximum (FWHM) of the PL band from 154 nm to 22 nm. The rugate PSi filters samples were fabricated by electrochemical etching of highly doped n-type silicon under illumination. The etching solution consisted of a 1:1 volume mixture of 48% hydrofluoric acid and absolute ethanol and photoluminescent rugate PSi filter was fabricated by etching while using a periodic sinusoidal wave current with 10 cycles. The obtained samples were characterized by scanning electron microscopy (SEM), and both reflection redshift and PL quenching were measured under exposure to organic vapors. The reflection redshift and PL quenching were both affected by the vapor pressure and dipole moment of the organic species. Full article
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15 pages, 17897 KiB  
Article
Thin Coatings of Cerium Oxide Nanoparticles with Anti-Reflective Properties
by Laura J. Romasanta, Lauriane D’Alençon, Sara Kirchner, Christophe Pradère and Jacques Leng
Appl. Sci. 2019, 9(18), 3886; https://doi.org/10.3390/app9183886 - 16 Sep 2019
Cited by 10 | Viewed by 4170
Abstract
Cerium oxide, in addition to its catalytic properties, is also known for its optical properties such as ultraviolet (UV) radiation filtering and a relatively high refractive index ( n > 2 ), which makes it an excellent candidate for multifunctional coatings. Here, we [...] Read more.
Cerium oxide, in addition to its catalytic properties, is also known for its optical properties such as ultraviolet (UV) radiation filtering and a relatively high refractive index ( n > 2 ), which makes it an excellent candidate for multifunctional coatings. Here, we focus on the optical properties of thin deposits (≲2 μ m) of densely packed C e O 2 nanoparticles, which we assemble using two evaporation-based techniques: convective self-assembly (CSA, a type of very slow blade-coating) to fabricate large-scale coatings of controllable thickness—from tens of nanometres to a few micrometers—and microfluidic pervaporation which permits us to add some micro-structure to the coatings. Spectroscopic ellipsometry yields the refractive index of the resulting nano-porous coatings, which behave as lossy dielectrics in the UV-visible regime and loss-less dielectrics in the visible to infra-red (IR) regime; in this regime, the fairly high refractive index (≈1.8) permits us to evidence thickness-tunable anti-reflection on highly refractive substrates, such as silicon, and concomitant enhanced transmissions which we checked in the mid-IR region. Full article
(This article belongs to the Special Issue Advances in Organic Corrosion Inhibitors and Protective Coatings)
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23 pages, 5407 KiB  
Article
TiO2 Nanocrystal Based Coatings for the Protection of Architectural Stone: The Effect of Solvents in the Spray-Coating Application for a Self-Cleaning Surfaces
by Francesca Petronella, Antonella Pagliarulo, Alessandra Truppi, Mariateresa Lettieri, Maurizio Masieri, Angela Calia, M. Lucia Curri and Roberto Comparelli
Coatings 2018, 8(10), 356; https://doi.org/10.3390/coatings8100356 - 5 Oct 2018
Cited by 25 | Viewed by 5427
Abstract
A colloidal route was exploited to synthesize TiO2 anisotropic nanocrystal rods in shape (TiO2 NRs) with a surface chemistry suited for their dispersibility and processability in apolar organic solvents. TiO2 NRs were dispersed in chloroform and n-heptane, respectively, and the [...] Read more.
A colloidal route was exploited to synthesize TiO2 anisotropic nanocrystal rods in shape (TiO2 NRs) with a surface chemistry suited for their dispersibility and processability in apolar organic solvents. TiO2 NRs were dispersed in chloroform and n-heptane, respectively, and the two resulting formulations were investigated to identify the optimal conditions to achieve high-quality TiO2 NR-based coatings by the spray-coating application. In particular, the two types of TiO2 NR dispersions were first sprayed on silicon chips as a model substrate in order to preliminarily investigate the effect of the solvent and of the spraying time on the morphology and uniformity of the resulting coatings. The results of the SEM and AFM characterizations of the obtained coatings indicated n-heptane as the most suited solvent for TiO2 NR dispersion. Therefore, an n-heptane dispersion of TiO2 NRs was sprayed on a highly porous limestone—Lecce stone—very commonly used as building material in historic constructions and monuments present in Apulia Region (Italy). A comprehensive physical-chemical investigation of the TiO2 NR based treatment on the surface of the stone specimens, including measurements of colour variation, static contact angle, water transfer properties, and morphological characterization were performed. Finally, the photocatalytic properties of the coatings were assessed under solar irradiation by using Lecce stone specimens and Methyl Red as a model target compound. The obtained results demonstrated that TiO2 NRs based coatings can be successfully applied by spray-coating resulting in an effective photocatalytic and hydrophobic treatment, which holds great promise as a material for the environmental protection of architectural stone in the field of cultural heritage conservation. Full article
(This article belongs to the Special Issue Nanostructured Thin Films)
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5 pages, 735 KiB  
Proceeding Paper
Optical and Morphological Analysis of c-Si/PSi and c-Si/PSi/MWCNT/SiOx Heterostructures
by Natanael Victoriano Huerta, José Alberto Luna López, Jose David Alvaro Hernández de la Luz, Estela Gómez Barojas and Miguel Angel Domínguez Jimenez
Proceedings 2017, 1(4), 320; https://doi.org/10.3390/proceedings1040320 - 9 Aug 2017
Viewed by 2013
Abstract
In the present work, the optical and morphological properties of Porous Silicon (PSi) in the c-Si-n/PSi and c-Si-n/SiP-n/MWCNT/SiOx structures are studied and analyzed. The PSi layer is grown on n-type c-Si (<0.005 Ω·cm <100>) by electrochemical anodization using different currents as: 10, [...] Read more.
In the present work, the optical and morphological properties of Porous Silicon (PSi) in the c-Si-n/PSi and c-Si-n/SiP-n/MWCNT/SiOx structures are studied and analyzed. The PSi layer is grown on n-type c-Si (<0.005 Ω·cm <100>) by electrochemical anodization using different currents as: 10, 50 and 100 mA. The etching solution used was C2H6O:HF:C3H8O3 in a proportion of 6:3:1 by volume, respectively. The deposition of multi wall carbon nanotubes (MWNTs) on the PSi was done by spin coating, and later the surface was passivated by thermal oxidation. The porosity and thickness were obtained by gravimetry. UV-VIS spectroscopy and photoluminescence were used to obtain the optical properties and SEM was used to analyze the morphology. Full article
(This article belongs to the Proceedings of Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017)
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13 pages, 3301 KiB  
Article
Luminescent Properties of Silicon Nanocrystals:Spin on Glass Hybrid Materials
by Marco Antonio Vásquez-Agustín, Orlando Cortazar-Martínez, Alfredo Abelardo González-Fernández, José Alberto Andraca-Adame, Alfredo Morales-Sánchez and Mariano Aceves-Mijares
Appl. Sci. 2017, 7(1), 72; https://doi.org/10.3390/app7010072 - 13 Jan 2017
Cited by 4 | Viewed by 6335
Abstract
The photoluminescence characteristics of films consisting of Si nanocrystals either coated with or embedded into Spin on Glass (SOG) were studied. Si nanocrystals showing red or blue luminescence when suspended in alcohol solution were obtained from porous silicon films. These were then either [...] Read more.
The photoluminescence characteristics of films consisting of Si nanocrystals either coated with or embedded into Spin on Glass (SOG) were studied. Si nanocrystals showing red or blue luminescence when suspended in alcohol solution were obtained from porous silicon films. These were then either deposited in Si substrates and coated with SOG, or mixed in an SOG solution that was later spun on Si substrates. Both types of films were thermally annealed at 1100 °C for three hours in N2 atmosphere. Transmission electron microscopy measurements showed a mean diameter of 2.5 nm for the Si nanocrystals, as well as the presence of polycrystalline Si nanoagglomerates. These results were confirmed by X-ray diffraction studies, which revealed the (111), (220) and (311) Bragg peaks in Si nanocrystals. Fourier transform infrared spectroscopy studies showed that the coated films present higher chemical reactivity, promoting the formation of non-stoichiometric SiO2, while the embedded films behave as a stoichiometric SiO2 after the thermal annealing. The PL (photoluminescence) characterization showed that both embedded and coated films present emission dominated by the Quantum Confinement Effect before undergoing any thermal treatment. After annealing, the spectra were found to be modified only in the case of the coated films, due to the formation of defects in the nanocrystals/SiO2 interface. Full article
(This article belongs to the Special Issue Silicon Photonics Components and Applications)
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8 pages, 2243 KiB  
Article
High Sensitivity Detection of CdSe/ZnS Quantum Dot-Labeled DNA Based on N-type Porous Silicon Microcavities
by Changwu Lv, Zhenhong Jia, Jie Lv, Hongyan Zhang and Yanyu Li
Sensors 2017, 17(1), 80; https://doi.org/10.3390/s17010080 - 1 Jan 2017
Cited by 15 | Viewed by 5093
Abstract
N-type macroporous silicon microcavity structures were prepared using electrochemical etching in an HF solution in the absence of light and oxidants. The CdSe/ZnS water-soluble quantum dot-labeled DNA target molecules were detected by monitoring the microcavity reflectance spectrum, which was characterized by the reflectance [...] Read more.
N-type macroporous silicon microcavity structures were prepared using electrochemical etching in an HF solution in the absence of light and oxidants. The CdSe/ZnS water-soluble quantum dot-labeled DNA target molecules were detected by monitoring the microcavity reflectance spectrum, which was characterized by the reflectance spectrum defect state position shift resulting from changes to the structures’ refractive index. Quantum dots with a high refractive index and DNA coupling can improve the detection sensitivity by amplifying the optical response signals of the target DNA. The experimental results show that DNA combined with a quantum dot can improve the sensitivity of DNA detection by more than five times. Full article
(This article belongs to the Section Biosensors)
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13 pages, 2254 KiB  
Article
Morphology and N2 Permeance of Sputtered Pd-Ag Ultra-Thin Film Membranes
by Ekain Fernandez, Jose Angel Sanchez-Garcia, Jose Luis Viviente, Martin Van Sint Annaland, Fausto Gallucci and David A. Pacheco Tanaka
Molecules 2016, 21(2), 210; https://doi.org/10.3390/molecules21020210 - 10 Feb 2016
Cited by 10 | Viewed by 6784
Abstract
The influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were [...] Read more.
The influence of the temperature during the growth of Pd-Ag films by PVD magnetron sputtering onto polished silicon wafers was studied in order to avoid the effect of the support roughness on the layer growth. The surfaces of the Pd-Ag membrane films were analyzed by atomic force microscopy (AFM), and the results indicate an increase of the grain size from 120 to 250–270 nm and film surface roughness from 4–5 to 10–12 nm when increasing the temperature from around 360–510 K. After selecting the conditions for obtaining the smallest grain size onto silicon wafer, thin Pd-Ag (0.5–2-µm thick) films were deposited onto different types of porous supports to study the influence of the porous support, layer thickness and target power on the selective layer microstructure and membrane properties. The Pd-Ag layers deposited onto ZrO2 3-nm top layer supports (smallest pore size among all tested) present high N2 permeance in the order of 10−6 mol·m−2·s−1·Pa−1 at room temperature. Full article
(This article belongs to the Special Issue Membrane Catalysis)
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17 pages, 381 KiB  
Article
Nanostructure-Directed Chemical Sensing: The IHSAB Principle and the Effect of Nitrogen and Sulfur Functionalization on Metal Oxide Decorated Interface Response
by William I. Laminack and James L. Gole
Nanomaterials 2013, 3(3), 469-485; https://doi.org/10.3390/nano3030469 - 7 Aug 2013
Cited by 12 | Viewed by 7160
Abstract
The response matrix, as metal oxide nanostructure decorated n-type semiconductor interfaces are modified in situ through direct amination and through treatment with organic sulfides and thiols, is demonstrated. Nanostructured TiO2, SnOx, NiO and CuxO (x [...] Read more.
The response matrix, as metal oxide nanostructure decorated n-type semiconductor interfaces are modified in situ through direct amination and through treatment with organic sulfides and thiols, is demonstrated. Nanostructured TiO2, SnOx, NiO and CuxO (x = 1,2), in order of decreasing Lewis acidity, are deposited to a porous silicon interface to direct a dominant electron transduction process for reversible chemical sensing in the absence of significant chemical bond formation. The metal oxide sensing sites can be modified to decrease their Lewis acidity in a process appearing to substitute nitrogen or sulfur, providing a weak interaction to form the oxynitrides and oxysulfides. Treatment with triethylamine and diethyl sulfide decreases the Lewis acidity of the metal oxide sites. Treatment with acidic ethane thiol modifies the sensor response in an opposite sense, suggesting that there are thiol (SH) groups present on the surface that provide a Brønsted acidity to the surface. The in situ modification of the metal oxides deposited to the interface changes the reversible interaction with the analytes, NH3 and NO. The observed change for either the more basic oxynitrides or oxysulfides or the apparent Brønsted acid sites produced from the interaction of the thiols do not represent a simple increase in surface basicity or acidity, but appear to involve a change in molecular electronic structure, which is well explained using the recently developed inverse hard and soft acids and bases (IHSAB) model. Full article
(This article belongs to the Special Issue Nanomaterials in Sensors)
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12 pages, 1101 KiB  
Article
A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer
by Michael J. Schöning, Anette Simonis, Christian Ruge, Holger Ecken, Mattea Müller-Veggian and Hans Lüth
Sensors 2002, 2(1), 11-22; https://doi.org/10.3390/s20100011 - 15 Jan 2002
Cited by 43 | Viewed by 11881
Abstract
Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO2 was thermally [...] Read more.
Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO2 was thermally grown on the top of the porous silicon as an insulating layer and Si3N4 was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Full article
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