Recent Advances in Microelectromechanical Systems for Sensing Applications
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: closed (20 October 2022) | Viewed by 280
Special Issue Editor
Interests: ultrasound imaging; photoacoustic imaging; chemical/bio sensors based on micromechanical resonators; multi-resonator systems; ultrasonic transducers; RF MEMS
Special Issue Information
Dear Colleagues,
In the last two decades, micromachined sensors have been widely adopted in various sectors, including mobile electronics, automotive, etc. Where traditional micromachined sensors have achieved a successful commercialization in inertial sensing and microphone applications, various microelectromechanical systems have been investigated for the next killer applications. This Special Issue is focused on the recent advances in the development of MEMS for various sensing applications.
A novel sensing mechanism has been developed based on new fabrication techniques, such as nanomaterial and nanostructure, flexible and stretchable material, and 3-D fabrication. The low-cost sensors based on soft lithographies such as printing, molding, and embossing are another example. The fabrication and characterization of this new sensor structure will be covered.
Novel sensing techniques can be implemented using existing micromachined sensor technology, including physical (gyroscope, accelerometer, force and tactile sensor) electrical (conductivity, permittivity), and acoustic sensors (microphone, SAW, CMUT, PMUT).
Recently, there has been wide development in the new applications. Implantable sensors have recently been investigated for in vivo monitoring and flexible/attachable sensors for continuous monitoring. The signal from an array of MEMS sensors can be used for biometric identification. Low-power or zero-power human monitoring sensors have been implemented using energy harvesting structures such as triboelectric nanogenerators. Acoustic MEMS transducers and sensors have been used for medical imaging applications. Environment sensors for gas composition and microparticles in the air are still under investigation.
This Special Issue will cover recent prominent studies on MEMS sensors in various aspects, such as the fabrication process, new materials, sensing techniques, and novel applications.
Prof. Dr. Kwan Kyu Park
Guest Editor
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Keywords
- Nanomaterial and nanostructure for MEMS sensors
- Flexible device for sensing
- Soft lithography (printing, molding and embossing)
- 3D fabrication technique for sensors
- Implantable sensing for in vivo monitoring
- Flexible/attachable sensors for continuous monitoring
- Biometric identification
- Low-power or zero-power sensors
- Sensors based on triboelectric nanogenerators
- Medical imaging applications
- Gas and environment sensors (microparticle, gas composition)
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