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Article

Non-Destructive Characterization of Selected Types of Films and Other Layers via White Light Reflectance Spectroscopy (WLRS)

by
Dimitrios Goustouridis
1,
Ioannis Raptis
1,2,*,
Theodora Mpatzaka
1,
Savvina Fournari
1,
Grigorios Zisis
1,
Panagiota Petrou
3 and
Konstantinos G. Beltsios
4,*
1
ThetaMetrisis S.A., 12132 Athens, Greece
2
Institute of Nanoscience and Nanotechnology, NCSR ‘‘Demokritos”, 15310 Athens, Greece
3
Immunoassays/Immunosensors Lab, Institute of Nuclear & Radiological Sciences & Technology, Energy & Safety, NCSR “Demokritos”, 15341 Athens, Greece
4
School of Chemical Engineering, National Technical University of Athens, Zographou Campus, Attiki, 15780 Athens, Greece
*
Authors to whom correspondence should be addressed.
Micro 2022, 2(3), 495-507; https://doi.org/10.3390/micro2030031
Submission received: 2 June 2022 / Revised: 29 July 2022 / Accepted: 3 August 2022 / Published: 11 August 2022
(This article belongs to the Section Analysis Methods and Instruments)
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Abstract

In this work, we consider White Light Reflectance Spectroscopy (WLRS) as an optical methodology for the accurate, fast and non-destructive measurement of film thickness in the 1 nm to the 1 mm range and for applications that include microelectronics, photonics, bioanalysis and packaging. Films to which WLRS is applicable can be either homogeneous or layered-composite ones, while thickness and composition might be fixed or varying with time; in the latter case, real-time monitoring of the kinetics of processes such as certain transitions, film dissolution and bioreactions is possible. We present the basic principles of WLRS and a selection of characteristic application examples of current interest, and we also briefly compare WLRS with alternative methods for film measurement.
Keywords: white light reflectance spectroscopy; ultra-thin films; ultra-thick films; graphene; glass transition of films; biomolecular interactions; transparent films; film dissolution white light reflectance spectroscopy; ultra-thin films; ultra-thick films; graphene; glass transition of films; biomolecular interactions; transparent films; film dissolution

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MDPI and ACS Style

Goustouridis, D.; Raptis, I.; Mpatzaka, T.; Fournari, S.; Zisis, G.; Petrou, P.; Beltsios, K.G. Non-Destructive Characterization of Selected Types of Films and Other Layers via White Light Reflectance Spectroscopy (WLRS). Micro 2022, 2, 495-507. https://doi.org/10.3390/micro2030031

AMA Style

Goustouridis D, Raptis I, Mpatzaka T, Fournari S, Zisis G, Petrou P, Beltsios KG. Non-Destructive Characterization of Selected Types of Films and Other Layers via White Light Reflectance Spectroscopy (WLRS). Micro. 2022; 2(3):495-507. https://doi.org/10.3390/micro2030031

Chicago/Turabian Style

Goustouridis, Dimitrios, Ioannis Raptis, Theodora Mpatzaka, Savvina Fournari, Grigorios Zisis, Panagiota Petrou, and Konstantinos G. Beltsios. 2022. "Non-Destructive Characterization of Selected Types of Films and Other Layers via White Light Reflectance Spectroscopy (WLRS)" Micro 2, no. 3: 495-507. https://doi.org/10.3390/micro2030031

APA Style

Goustouridis, D., Raptis, I., Mpatzaka, T., Fournari, S., Zisis, G., Petrou, P., & Beltsios, K. G. (2022). Non-Destructive Characterization of Selected Types of Films and Other Layers via White Light Reflectance Spectroscopy (WLRS). Micro, 2(3), 495-507. https://doi.org/10.3390/micro2030031

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