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Journal: Photonics, 2026
Volume: 13
Number: 100
Article:
Low-Loss, Multi-Reticle-Stitched SiN Waveguides for 300 mm Wafer-Level Optical Interconnects
Authors:
by
Pengfei Xu, Chiara Marchese, Guy Lepage, Negin Golshani, Ruben Van Eenaeme, Andrea Mingardi, Joost Van Ongeval, Rafal Magdziak, Luc Halipre, Darko Trivkovic, Peter Verheyen, Maumita Chakrabarti, Dimitrios Velenis, Andy Miller, Filippo Ferraro, Yoojin Ban and Joris Van Campenhout
Link:
https://www.mdpi.com/2304-6732/13/1/100
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