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Journal: Photonics, 2025
Volume: 12
Number: 359
359
Article: Laser Annealing of Si Wafers Based on a Pulsed CO₂ Laser
Authors: by Ziming Wang, Guochang Wang, Mingkun Liu, Sicheng Li, Zhenzhen Xie, Liemao Hu, Hui Li, Fangjin Ning, Wanli Zhao, Changjun Ke, Zhiyong Li and Rongqing Tan
Link: https://www.mdpi.com/2304-6732/12/4/359

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