Review Reports - Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement

Round 1

Reviewer 1 Report

Please see attached file for edits. Authors did a good job of writing a clear, easy to understand paper. However, references need a lot of work. Most references are missing - making it impossible to check if the authors are citing papers appropriately.

Comments for author File: Comments.pdf

Author Response

Thank you for giving me the opportunity to submit revised draft of my manuscript titled “Distortion detection of lithographic projection lenses based on wavefront measurement, photonics-2055070.” We appreciate the time and effort that you have dedicated to providing your valuable feedback on our manuscript.

We have responded to your valuable comments and made corrections to the manuscript in the appropriate places.

Author Response File: Author Response.docx

Reviewer 2 Report

Comments for author File: Comments.pdf

Author Response

We have responded to your valuable comments and made corrections to the manuscript in the appropriate places.

Author Response File: Author Response.docx

Reviewer 3 Report

The section's model is impossible to follow, the isn't a proper validation and presentation of the model, for example, the figure 1 is placed 6 times, among many other details that do not allow to read and even less to understand this paper.

Author Response

We have responded to your valuable comments and made corrections to the manuscript in the appropriate places.

Author Response File: Author Response.docx

Round 2

Reviewer 3 Report

I think is necessary do a revision for improve the final version.

Author Response

Please see the attachment

Author Response File: Author Response.docx