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Journal: Processes, 2025
Volume: 13
Number: 1544
Article:
Accurate and Efficient Process Modeling and Inverse Optimization for Trench Metal Oxide Semiconductor Field Effect Transistors: A Machine Learning Proxy Approach
Authors:
by
Mingqiang Geng, Jianming Guo, Yuting Sun, Dawei Gao and Dong Ni
Link:
https://www.mdpi.com/2227-9717/13/5/1544
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