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Article

Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas

1
Institute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, Chekhov str. 2, 347928 Taganrog, Russia
2
Faculty of Physics, Southern Federal University, Zorge str. 5, 344090 Rostov-on-Don, Russia
*
Author to whom correspondence should be addressed.
Chemosensors 2018, 6(4), 67; https://doi.org/10.3390/chemosensors6040067
Received: 14 November 2018 / Revised: 7 December 2018 / Accepted: 14 December 2018 / Published: 19 December 2018
(This article belongs to the Special Issue Thin Film Based Sensors)
The SiO2ZrO2 composite films were prepared by means of sol-gel technology and characterized by scanning electron microscopy, energy dispersive X-ray (EDX) analysis, and X-ray diffraction. The presence of the stable monoclinic ZrO2 with an impurity of tetragonal phases is shown. The film surface is characterized by the presence of ZrOCl2·6H2O or ZrCl(OH)/ZrCl(OH)2 grains. The crystallite size negligibly depends on the annealing temperature of the film and amount to 10–12 nm and 9–12 nm for the films thermally treated at 200 °C and 500 °C, respectively. The film’s resistance is rather sensitive to the presence of NO2 impurities in the air at a low operating temperature (25 °C). Accelerated stability tests of the initial resistance showed high stability and reproducibility of the sensor based on the SiO2ZrO2 film thermally treated at 500 °C. View Full-Text
Keywords: gas sensor; zirconia; composite film; nitrogen dioxide gas sensor; zirconia; composite film; nitrogen dioxide
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MDPI and ACS Style

Myasoedova, T.N.; Mikhailova, T.S.; Yalovega, G.E.; Plugotarenko, N.K. Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas. Chemosensors 2018, 6, 67. https://doi.org/10.3390/chemosensors6040067

AMA Style

Myasoedova TN, Mikhailova TS, Yalovega GE, Plugotarenko NK. Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas. Chemosensors. 2018; 6(4):67. https://doi.org/10.3390/chemosensors6040067

Chicago/Turabian Style

Myasoedova, Tatiana N., Tatiana S. Mikhailova, Galina E. Yalovega, and Nina K. Plugotarenko. 2018. "Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas" Chemosensors 6, no. 4: 67. https://doi.org/10.3390/chemosensors6040067

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