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Recent Advancements in Inertial Micro-Switches

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College of Mechanical and Electrical Engineering, Chongqing University of Arts and Sciences, Chongqing 402160, China
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School of Electronic Information Engineering, Yangtze Normal University, Chongqing 408100, China
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School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
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Authors to whom correspondence should be addressed.
Electronics 2019, 8(6), 648; https://doi.org/10.3390/electronics8060648
Received: 15 April 2019 / Revised: 30 May 2019 / Accepted: 5 June 2019 / Published: 9 June 2019
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
Inertial micro-switches have great potential in the applications of acceleration sensing, due to the integrated advantages of a small size, high integration level, and low or even no power consumption. This paper presents an overview of the recent advancements made in research on the sensitive direction, threshold acceleration, contact effect, and threshold accuracy of inertial micro-switches. The reviewed switches were categorized according to the performance parameters, including multi-directional switches, multi-threshold switches, persistent closed switches, flexible-electrode switches, and low-g high-threshold-accuracy switches. The current challenges and prospects are also discussed. View Full-Text
Keywords: MEMS (micro-electro-mechanical system); inertial switch; threshold accelerometer; acceleration switch; threshold acceleration; threshold accuracy; contact effect MEMS (micro-electro-mechanical system); inertial switch; threshold accelerometer; acceleration switch; threshold acceleration; threshold accuracy; contact effect
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MDPI and ACS Style

Peng, Y.; Sun, Y.; Luo, G.; Wu, G.; Zhang, T. Recent Advancements in Inertial Micro-Switches. Electronics 2019, 8, 648.

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