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Journal: Electronics, 2021
Volume: 10
Number: 2941
Article:
Microstructural and Energy-Dispersive X-ray Analyses on Argon Ion Implantations in Tantalum Thin Films for Microelectronic Substrates
Authors:
by
Amir Hoshang Ramezani, Siamak Hoseinzadeh, Zhaleh Ebrahiminejad, Milad Sangashekan and Saim Memon
Link:
https://www.mdpi.com/2079-9292/10/23/2941
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