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Journal: ElectronicsVolume: 10Number: 2512
Article: Step Coverage and Dry Etching Process Improvement of Amorphous Carbon Hard Mask
  • Authors:
  • Zheng Jiang1,
  • Hao Zhu1,2 and
  • Qingqing Sun1,2,*
  • et al.
Link: https://www.mdpi.com/2079-9292/10/20/2512

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