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Open AccessFeature PaperArticle

Experimental and Modeling Study of the Fabrication of Mg Nano-Sculpted Films by Magnetron Sputtering Combined with Glancing Angle Deposition

1
School of Materials Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
2
Chimie des Interactions Plasma-Surface, University of Mons, 20 Place du Parc, B 7000 Mons, Belgium
3
Key Laboratory of Display Materials and Photoelectric Device (Ministry of Education), Tianjin 300384, China
4
Materia Nova Research Center, 1 Avenue Nicolas Copernic, B 7000 Mons, Belgium
*
Authors to whom correspondence should be addressed.
Coatings 2019, 9(6), 361; https://doi.org/10.3390/coatings9060361
Received: 5 May 2019 / Revised: 25 May 2019 / Accepted: 27 May 2019 / Published: 1 June 2019
(This article belongs to the Special Issue Advanced Strategies in Thin Film Engineering by Magnetron Sputtering)
Today, Mg is foreseen as one of the most promising materials for hydrogen storage when prepared as nano-objects. In this context, we have studied the fabrication of Mg nano-sculpted thin films by magnetron sputtering deposition in glancing angle configuration. It is demonstrated that the microstructure of the material is controllable by tuning important deposition parameters such as the tilt angle or the deposition pressure which both strongly affect the shadowing effect during deposition. As an example, the angle formed by the column and the substrate and the intercolumnar space varies between ~20° to ~50° and ~45 to ~120 nm, respectively, when increasing the tilt angle from 60° to 90°. These observations are highlighted by modeling the growth of the material using kinetic Monte Carlo methods which highlights the role of surface diffusion during the synthesis of the coating. This work is a first step towards the development of an air-stable material for hydrogen storage. View Full-Text
Keywords: Mg columnar films; glancing angle deposition; magnetron sputtering; kinetic Monte Carlo modeling Mg columnar films; glancing angle deposition; magnetron sputtering; kinetic Monte Carlo modeling
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MDPI and ACS Style

Liang, H.; Geng, X.; Li, W.; Panepinto, A.; Thiry, D.; Chen, M.; Snyders, R. Experimental and Modeling Study of the Fabrication of Mg Nano-Sculpted Films by Magnetron Sputtering Combined with Glancing Angle Deposition. Coatings 2019, 9, 361.

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