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Journal: Coatings, 2019
Volume: 9
Number: 316
316
Article: Study of Birefringence and Stress Distribution of SiO₂ Film Optical Waveguide on Silicon Wafer
Authors: by Qingyu Sun, DeGui Sun, Hongpeng Shang, Ting Yu, Liyuan Chang, Zheyu Sun, Wenchao Xing and Mingxue Dong
Link: https://www.mdpi.com/2079-6412/9/5/316

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