Next Article in Journal
In-Vivo Corrosion Characterization and Assessment of Absorbable Metal Implants
Next Article in Special Issue
Structure and Conductivity Studies of Scandia and Alumina Doped Zirconia Thin Films
Previous Article in Journal
Effectiveness of Two Different Hydrophobic Topcoats for Increasing of Durability of Exterior Coating Systems on Oak Wood
Previous Article in Special Issue
Aluminum Coated Micro Glass Spheres to Increase the Infrared Reflectance
Article Menu

Export Article

Open AccessArticle

Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD

1
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Qianjin Street 2699, Changchun 130012, China
2
National Key Laboratory of Application Specific Integrated Circuit (ASIC), Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
*
Authors to whom correspondence should be addressed.
Coatings 2019, 9(5), 281; https://doi.org/10.3390/coatings9050281
Received: 20 March 2019 / Revised: 17 April 2019 / Accepted: 23 April 2019 / Published: 26 April 2019
  |  
PDF [2506 KB, uploaded 26 April 2019]
  |  

Abstract

β-Ga2O3 films were grown on sapphire (0001) substrates with various O/Ga (VI/III) ratios by metal organic chemical vapor deposition. The effects of VI/III ratio on growth rate, structural, morphological, and Raman properties of the films were systematically studied. By varying the VI/III ratio, the crystalline quality obviously changed. By decreasing the VI/III ratio from 66.9 × 103 to 11.2 × 103, the crystalline quality improved gradually, which was attributed to low nuclei density in the initial stage. However, crystalline quality degraded with further decrease of the VI/III ratio, which was attributed to excessive nucleation rate. View Full-Text
Keywords: β-Ga2O3; MOCVD; VI/III ratio β-Ga2O3; MOCVD; VI/III ratio
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Li, Z.; Jiao, T.; Hu, D.; Lv, Y.; Li, W.; Dong, X.; Zhang, Y.; Feng, Z.; Zhang, B. Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD. Coatings 2019, 9, 281.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Coatings EISSN 2079-6412 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top