Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD
Abstractβ-Ga2O3 films were grown on sapphire (0001) substrates with various O/Ga (VI/III) ratios by metal organic chemical vapor deposition. The effects of VI/III ratio on growth rate, structural, morphological, and Raman properties of the films were systematically studied. By varying the VI/III ratio, the crystalline quality obviously changed. By decreasing the VI/III ratio from 66.9 × 103 to 11.2 × 103, the crystalline quality improved gradually, which was attributed to low nuclei density in the initial stage. However, crystalline quality degraded with further decrease of the VI/III ratio, which was attributed to excessive nucleation rate. View Full-Text
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Li, Z.; Jiao, T.; Hu, D.; Lv, Y.; Li, W.; Dong, X.; Zhang, Y.; Feng, Z.; Zhang, B. Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD. Coatings 2019, 9, 281.
Li Z, Jiao T, Hu D, Lv Y, Li W, Dong X, Zhang Y, Feng Z, Zhang B. Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD. Coatings. 2019; 9(5):281.Chicago/Turabian Style
Li, Zeming; Jiao, Teng; Hu, Daqiang; Lv, Yuanjie; Li, Wancheng; Dong, Xin; Zhang, Yuantao; Feng, Zhihong; Zhang, Baolin. 2019. "Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD." Coatings 9, no. 5: 281.
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