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Rapid Processing of In-Doped ZnO by Spray Pyrolysis from Environment-Friendly Precursor Solutions

1
AIT Austrian Institute of Technology, Center for Energy, Photovoltaic Systems, Giefinggasse 6, 1210 Vienna, Austria
2
Department of Physical Chemistry, University of Vienna, Währinger Straße 42, A-1090 Vienna, Austria
3
Institut für Physik, Institut für Chemie, and IRIS Adlershof, Humboldt-Universität zu Berlin, Brook-Taylor-Str. 6, 12489 Berlin, Germany
*
Authors to whom correspondence should be addressed.
Coatings 2019, 9(4), 245; https://doi.org/10.3390/coatings9040245
Received: 14 March 2019 / Revised: 5 April 2019 / Accepted: 6 April 2019 / Published: 11 April 2019
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Abstract

This study focused on the deposition of indium-doped zinc oxide (IZO) films at high growth rates by ultrasonic spray pyrolysis. We investigated the influence of processing parameters, such as temperature and solution flow rate, on the structural, optical, and electrical film properties. For all depositions, low-cost and low-toxicity aqueous solutions and metal salt precursors were used. Through the optimization of the spraying parameters and pattern, a spatially homogeneous IZO layer with transparency greater than 80%, resistivity of 3.82 × 10−3 Ω·cm for a thickness of 1800 nm (sheet resistance of 21.2 Ω/sq), Hall carrier density of 1.36 × 1020 cm−3, Hall mobility of 12.01 cm2 V−1 s−1, and work function of 4.4 eV was obtained. These films are suitable for implementation in optoelectronic and photovoltaic devices. View Full-Text
Keywords: transparent conductive electrode; TCO; zinc oxide; indium-doped ZnO; thin film; oxide semiconductor; spray pyrolysis; aqueous solution deposition transparent conductive electrode; TCO; zinc oxide; indium-doped ZnO; thin film; oxide semiconductor; spray pyrolysis; aqueous solution deposition
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Winkler, N.; Wibowo, A.R.; Kubicek, B.; Kautek, W.; Ligorio, G.; List-Kratochvil, E.J.W.; Dimopoulos, T. Rapid Processing of In-Doped ZnO by Spray Pyrolysis from Environment-Friendly Precursor Solutions. Coatings 2019, 9, 245.

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