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Journal: Coatings, 2019
Volume: 9
Number: 712

Article: Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles
Authors: by Grégory Abadias, Fırat Anğay, Rubenson Mareus and Cédric Mastail
Link: https://www.mdpi.com/2079-6412/9/11/712

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