High-Temperature Piezoelectric Gyroscopes for Harsh Industrial Environments: A Review of Materials, Structural Design, and Circuitry
Highlights
- Optimized microstructure enhances thermal stability and piezoelectric performance.
- Resonance mode matching and symmetry design improve bias stability at room temperature, but high-temperature validation remains a critical gap.
- Self-compensation circuits effectively suppress temperature drift and quadrature error.
- PZT, LiNbO3, AlN, PMN-PT and KNN offer complementary advantages for high-temperature piezoelectric gyroscopes, with distinct trade-offs between piezoelectric coefficient and Curie temperature.
- Material aging and system integration remain key challenges for current technologies.
- Solid-state piezoelectric gyroscopes are promising alternatives in harsh environments.
- Cross-scale manufacturing and smart sensor fusion will overcome performance bottlenecks.
- Machine learning and AI-driven approaches (temperature drift compensation, mode matching, sensor fusion) offer adaptive solutions for unpredictable harsh industrial conditions.
- Oil drilling, geothermal, nuclear and aero-engine applications impose diverse temperature requirements (120–1000+ °C), but no existing prototype has been validated beyond laboratory conditions.
- This multidisciplinary review guides industrial adoption and future research directions.
Abstract
1. Introduction
1.1. Research Background and Motivation
1.2. Comparative Overview of Gyroscope Technologies
1.3. Review Methodology
2. The Basic Principle of Piezoelectric Gyroscopes
2.1. Piezoelectric Effect
2.2. The Operation of a Piezoelectric Gyroscope
3. Recent Advances in the Study of High-Temperature Piezoelectric Materials
3.1. Classification and Properties of High-Temperature Piezoelectric Materials
3.2. Material Performance Evaluation Criteria
3.2.1. Curie Temperature Tc
3.2.2. Piezoelectric Constant d
3.2.3. Dielectric Constant εr
3.2.4. Dielectric Loss tanδ
3.2.5. Mechanical Quality Factor Qm
3.2.6. Electromechanical Coupling Coefficient k
3.3. Current Status of Research into High-Temperature Piezoelectric Materials

4. Research and Developments in Piezoelectric Gyroscopes
4.1. Key Performance Indicators of Gyroscopes
4.1.1. Zero-Bias Stability BI
4.1.2. Angular Random Walk ARW
4.1.3. Scale Factor SF
4.1.4. Dynamic Measurement Range
4.1.5. Bandwidth
4.2. Piezoelectric Gyroscopes with Different Structures
4.2.1. Disc-Type Gyroscope
4.2.2. Tuning-Fork Gyroscope
4.2.3. Beam Gyroscope
4.2.4. Mass-Coupled Gyroscope
4.2.5. Ring Gyroscope
4.2.6. Piezoelectric Solid-State Gyroscope
5. Analysis of Application Scenarios and Requirements in the Industrial Sector
5.1. Oil and Gas Exploration
5.2. Geothermal Development and Scientific Drilling
5.3. Nuclear Power Generation
5.4. Aviation Engines and High-Temperature Manufacturing
6. Technical Challenges and Optimisation Strategies for Piezoelectric Gyroscopes in High-Temperature Environments
6.1. Structural Design and Optimisation

6.2. Circuit Design and Temperature Compensation

6.3. Machine Learning and Artificial Intelligence Approaches
6.3.1. Temperature Drift Prediction and Compensation
6.3.2. AI-Assisted Mode Matching and Frequency Tuning
6.3.3. Deep Learning for Sensor Fusion
6.3.4. Intelligent Fault Diagnosis and Health Management
7. The Potential Applications of High-Temperature Piezoelectric Gyroscopes in the Industrial Sector
8. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Data Availability Statement
Conflicts of Interest
References
- Hunt, G.H.; Hobbs, A.E.W. Paper 4: Development of an Accurate Tuning-Fork Gyroscope. In Proceedings of the Institution of Mechanical Engineers, Conference Proceedings; Sage UK: London, UK, 1964; Volume 179, pp. 129–139. [Google Scholar]
- Bergh, R.; Lefevre, H.; Shaw, H. An Overview of Fiber-Optic Gyroscopes. J. Light. Technol. 1984, 2, 91–107. [Google Scholar] [CrossRef]
- Li, Y.; Liao, Q.; Hou, W.; Qin, L. Silver-Based Surface Plasmon Sensors: Fabrication and Applications. Int. J. Mol. Sci. 2023, 24, 4142. [Google Scholar] [CrossRef] [PubMed]
- Huang, W.; Yan, X.; Zhang, S.; Li, Z.; Hassan, J.N.A.; Chen, D.; Wen, G.; Chen, K.; Deng, G.; Huang, Y. MEMS and MOEMS Gyroscopes: A Review. Photonic Sens. 2023, 13, 230419. [Google Scholar] [CrossRef]
- Passaro, V.M.N.; Cuccovillo, A.; Vaiani, L.; De Carlo, M.; Campanella, C.E. Gyroscope Technology and Applications: A Review in the Industrial Perspective. Sensors 2017, 17, 2284. [Google Scholar] [CrossRef] [PubMed]
- Mevissen, S.J.; Klaassen, R.; van Beijnum, B.J.F.; Haarman, J.A.M. Eating Event Recognition Using Accelerometer, Gyroscope, Piezoelectric, and Lung Volume Sensors. Sensors 2024, 24, 571. [Google Scholar] [CrossRef] [PubMed]
- Barbour, N.; Schmidt, G. Inertial Sensor Technology Trends. IEEE Sens. J. 2002, 1, 332–339. [Google Scholar] [CrossRef]
- Su, Y.; Dou, X.; Gao, W.; Liu, K. Reflections on and Prospects for the Development of Logging-While-Drilling Technology in Oil and Gas Wells. Pet. Sci. Bull. 2023, 8, 535–554. [Google Scholar]
- Wu, J.; Gao, X.; Chen, J.; Wang, M.; Zhang, S.; Dong, S. High-Temperature Piezoelectric Materials, Devices and Applications. Acta Phys. Sin. 2018, 67, 10–39. [Google Scholar] [CrossRef]
- Salzenstein, P.; Kuna, A.; Sojdr, L.; Chauvin, J. Significant Step in Ultra-High Stability Quartz Crystal Oscillators. Electron. Lett. 2010, 46, 1433–1434. [Google Scholar] [CrossRef]
- Liao, Y.; Liao, Q.; Yin, Y.; Li, Y.; Du, M.; Zhao, H.; Li, L.; Wang, Y.; Qin, L. High Temperature Piezoelectric Properties and Ultra-High Temperature Sensing Properties of Bismuth Tungstate. J. Adv. Ceram. 2024, 13, 1931–1942. [Google Scholar] [CrossRef]
- Li, M.; Sun, Y.; Gao, S.; Zhao, X.; Hui, F.; Luo, W.; Hu, Q.; Chen, H.; Wu, H.; Wang, Y.; et al. Navigation-Grade Interferometric Air-Core Antiresonant Fibre Optic Gyroscope with Enhanced Thermal Stability. Nat. Commun. 2025, 16, 3654. [Google Scholar] [CrossRef]
- Schwartz, S.; Ravailled, A.; Feugnet, G.; Bretenaker, F. Analysis of the Design of a Passive Resonant Miniature Optical Gyroscope Based on Integrated Optics Technologies. Opt. Eng. 2017, 56, 107109. [Google Scholar] [CrossRef]
- Ma, H.; Wang, L.; Wang, X. Planar Photonic Gyroscopes for Satellite Attitude Control. In Proceedings of the 2017 7th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI); IEEE: Piscataway, NJ, USA, 2017; pp. 167–169. [Google Scholar] [CrossRef]
- Tang, J.; Zeng, L.; Deng, K.; Li, J.; Xiao, P.; Xia, T.; Pan, Y.; Luo, H. A Rate Hemispherical Resonator Gyroscope with Bias Stability of 0.0056°/h with Compensation of Phase Delay. Sens. Actuators A Phys. 2024, 375, 115494. [Google Scholar] [CrossRef]
- Cao, H.; Wu, Y.; Chang, L.; Kong, Y.; Sun, H.; Wu, W.; Sun, J.; Zhang, Y.; Xi, X.; Miao, T. Autonomous Navigation of Unmanned Ground Vehicles Based on Micro-Shell Resonator Gyroscope Rotary INS Aided by LDV. Drones 2025, 10, 706. [Google Scholar] [CrossRef]
- Trusov, A.A.; Phillips, M.R.; Mccammon, G.H.; Rozelle, D.M.; Meyer, A.D. Continuously Self-Calibrating CVG System Using Hemispherical Resonator Gyroscopes. In Proceedings of the 2015 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Kona, HI, USA, 23–26 March 2015; IEEE: Piscataway, NJ, USA, 2015; pp. 1–4. [Google Scholar] [CrossRef]
- Li, M.; Sun, Y.; Gao, S.; Zhao, X.; Hui, F.; Luo, W.; Hu, Q.; Chen, H.; Wu, H.; Wang, Y.; et al. A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope with Off-Plane Coupling Suppression Silicon Gratings. IEEE Sens. J. 2021, 21, 11765–11773. [Google Scholar] [CrossRef]
- Liu, Z.; Wen, H.; Ayazi, F. Multi-Coefficient Eigenmode Operation—Breaking Through 10°/h Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes. Microsyst. Nanoeng. 2023, 9, 18. [Google Scholar] [CrossRef]
- Tan, D.; Zhang, Q. Manufacturing Techniques for Quartz Micromechanical Inertial Sensors. Sens. World 2002, 8, 22–24. [Google Scholar]
- Liao, Q.; Hou, W.; Liao, K.; Chen, L.; Song, Y.; Gao, G. Solid-Phase Sintering and Vapor-Liquid-Solid Growth of BP@MgO Quantum Dot Crystals with a High Piezoelectric Response. J. Adv. Ceram. 2022, 11, 1725–1734. [Google Scholar] [CrossRef]
- Wang, J.; Zhou, Z.; Xu, C.; Xu, J.; Chen, Y. Li/Mn co-doped K0.5Bi4.5Ti4O15 high-temperature piezoelectric ceramics: Structures, properties, and ultrasonic transducer applications. J. Adv. Ceram. 2026, 15, 9221277. [Google Scholar] [CrossRef]
- Fadhlina, H.; Atiqah, A.; Zainuddin, Z. A Review on Lithium Doped Lead-Free Piezoelectric Materials. Mater. Today Commun. 2022, 33, 104835. [Google Scholar] [CrossRef]
- Habib, M.; Lantgios, I.; Hornbostel, K. A Review of Ceramic, Polymer and Composite Piezoelectric Materials. J. Phys. D Appl. Phys. 2022, 55, 423002. [Google Scholar] [CrossRef]
- Li, H.; Liu, J.; Li, K.; Deng, J.; Liu, Y. A Review of Recent Studies on Piezoelectric Pumps and Their Applications. Mech. Syst. Signal Process. 2021, 151, 107393. [Google Scholar] [CrossRef]
- Zhang, S.; Liao, Q.; Xu, Y.; Liu, X.; Zhang, H.; Wang, H.; Dong, H.; Qin, L. A-Site Doping Effect on PLZT Relaxor Ferroelectric Glass-Free Medium-Temperature Sintering Ceramics. Coatings 2025, 15, 1032. [Google Scholar] [CrossRef]
- Xu, Y.; Liao, Q.; Zhang, S.; Liu, X.; Zhang, H.; Qin, L. Amphoteric Doping Effect of Ho3+ on the Performance of Medium-Temperature-Sintered PLZT Energy Storage Ceramics. Coatings 2025, 15, 1067. [Google Scholar] [CrossRef]
- Setter, N.; Damjanovic, D.; Eng, L.; Fox, G.; Gevorgian, S.; Hong, S.; Kingon, A.; Kohlstedt, H.; Park, N.Y.; Stephenson, G.B.; et al. Ferroelectric Thin Films: Review of Materials, Properties, and Applications. J. Appl. Phys. 2006, 100, 051606. [Google Scholar] [CrossRef]
- Wu, J.; Ma, X.; Zhou, D.; Qi, H.; Zhang, R.; Huo, C.; Chen, L.; Li, H.; Deng, S.; Fan, L.; et al. High-Entropy High-Temperature High-Piezoelectricity Ceramics. Adv. Mater. 2025, 37, 2419134. [Google Scholar] [CrossRef] [PubMed]
- Okayasu, M.; Shimazu, I. Electric Power Generation of PZT Piezoelectric Ceramics Using Both Direct and Inverse Piezoelectric Effects. J. Electron. Mater. 2025, 54, 5143–5150. [Google Scholar] [CrossRef]
- Lu, H.; Hu, Z.; Wang, X.; Chen, G.; Zheng, X.; Xia, J.; Huang, M.; Yang, W.; Liu, J.; Hu, B. Performance enhancement of nanogenerator achieved in branch-heterostructure piezoelectric ceramic fiber toward electrical transmission power line monitoring. J. Adv. Ceram. 2025, 14, 9221171. [Google Scholar] [CrossRef]
- Chen, Z.; Liang, R.; Zhang, C.; Zhou, Z.; Li, Y.; Liu, Z.; Dong, X. High-Performance and High-Thermally Stable PSN-PZT Piezoelectric Ceramics Achieved by High-Temperature Poling. J. Mater. Sci. Technol. 2022, 116, 238–245. [Google Scholar] [CrossRef]
- Bochenek, D.; Niemiec, P.; Dercz, G. The Effect of Mixed Doping on the Microstructure and Electrophysical Parameters of the Multicomponent PZT-Type Ceramics. Materials 2020, 13, 1996. [Google Scholar] [CrossRef] [PubMed]
- Zhang, Y.; Liu, X.; Tang, M.; Jin, R.; Xu, Z.; Yan, Y. Simultaneously Achieving Large Piezoelectricity, High Curie Temperature and High Resistivity in Niobium-Doped PYN-PZT Piezoelectric Ceramics. Ceram. Int. 2025, 51, 25211–25217. [Google Scholar] [CrossRef]
- Xu, X.; Feng, X.; Zhou, L.; Wang, H.; Yan, B.; Lu, M.; Chen, C.; Mei, H.; Xu, J.; Gao, F. Phase Structure and Electrical Properties of 0.28PIN–0.32PZN–(0.4-x)PT–xPZ Piezoelectric Ceramics. Crystals 2023, 13, 1362. [Google Scholar] [CrossRef]
- Lee, T.G.; Lee, H.J.; Park, S.; Lee, T.H.; Kim, D.; Hong, C.; Xu, H.; Kang, C.; Nahm, S. Structural and Piezoelectric Properties of <001> Textured PZT–PZNN Piezoelectric Ceramics. J. Am. Ceram. Soc. 2017, 100, 5681–5692. [Google Scholar] [CrossRef]
- Zeng, X.; Pelenovich, V.O.; Xu, C.Q.; Neena, D.; Jiang, Y.; Zhang, X.; Pogrebnjak, A.D.; Rakhimov, R.Y.; Zhang, J.; Yang, B.; et al. Morphology of Lithium Niobium Oxide Thin Film Ultrasonic Transducers Deposited by RF Magnetron Sputtering. Ceram. Int. 2023, 49, 16297–16304. [Google Scholar] [CrossRef]
- Wang, Y.; Jiang, Y.J. Crystal Orientation Dependence of Piezoelectric Properties in LiNbO3 and LiTaO3. Opt. Mater. 2003, 23, 403–408. [Google Scholar] [CrossRef]
- Feng, J.; Huang, L.; He, Y.; Xu, Z.; Chen, Y. LiNbO3-Induced Phase Structure Evolution and Improved Piezoelectric Properties in BiFeO3–BaTiO3 Ceramics. Ceram. Int. 2024, 50, 28309–28317. [Google Scholar] [CrossRef]
- Zhang, M.; Yang, J.; Si, C.; Han, G.; Zhao, Y.; Ning, J. Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. Micromachines 2015, 6, 1236–1248. [Google Scholar] [CrossRef]
- Kim, T.; Kim, J.; Dalmau, R.; Schlesser, R.; Preble, E.; Jiang, X. High-Temperature Electromechanical Characterization of AlN Single Crystals. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 2015, 62, 1880–1887. [Google Scholar] [CrossRef] [PubMed]
- Duran, C.; Cengiz, S.; Ecebas, N. Processing and Characterization of <001>-Textured Pb(Mg1/3Nb2/3)O3-Pb(Yb1/2Nb1/2)O3-PbTiO3 Ceramics. J. Mater. Res. 2017, 32, 2471–2478. [Google Scholar] [CrossRef]
- Moriana, A.D.; Zhang, S.J. Determining the Effects of BaTiO3 Template Alignment on Template Grain Growth of Pb(Mg1/3Nb2/3)O3-PbTiO3 and Effects on Piezoelectric Properties. J. Eur. Ceram. Soc. 2022, 42, 2752–2763. [Google Scholar] [CrossRef]
- Baasandorj, L.; Chen, Z. Recent Developments on Relaxor-PbTiO3 Ferroelectric Crystals. Crystals 2021, 12, 56. [Google Scholar] [CrossRef]
- Liu, H.; Yang, S.; Mo, X.; Guo, M.; Tang, H.; Zeng, Q.; Ye, M.; Zheng, R.; Ke, S. K0.5Na0.5NbO3-based multifunctional transparent ceramics for ultrahigh sensitive optical thermometry. J. Adv. Ceram. 2025, 14, 9221045. [Google Scholar] [CrossRef]
- Cen, Z.; Huan, Y.; Feng, W.; Yu, Y.; Zhao, P.; Chen, L.; Zhu, C.; Li, L.; Wang, X. A High Temperature Stable Piezoelectric Strain of KNN-Based Ceramics. J. Mater. Chem. A 2018, 6, 19967–19973. [Google Scholar] [CrossRef]
- Lu, G.; Li, Y.; Zhao, R.; Zhao, Y.; Zhao, J.; Bai, W.; Zhai, J.; Li, P. High Piezoelectric Performance of KNN-Based Ceramics over a Broad Temperature Range through Crystal Orientation and Multilayer Engineering. Molecules 2024, 29, 4601. [Google Scholar] [CrossRef] [PubMed]
- Fontes, A.; Rodrigues, P.; Santo, D.; Ribeiro, A.S. Exploring the Influence of the Deposition Parameters on the Properties of NiTi Shape Memory Alloy Films with High Nickel Content. Coatings 2024, 14, 138. [Google Scholar] [CrossRef]
- Diao, Q.; Zeng, Y.; Chen, J. The Applications and Latest Progress of Ceramic 3D Printing. Addit. Manuf. Front. 2024, 3, 200113. [Google Scholar] [CrossRef]
- Burdess, J.S.; Wren, T. The Theory of a Piezoelectric Disc Gyroscope. IEEE Trans. Aerosp. Electron. Syst. 1986, AES-22, 410–418. [Google Scholar] [CrossRef]
- Obitani, K.; Araya, K.; Yachi, M.; Tsuchiya, T. Piezoelectric Disk Gyroscope Fabricated with Single-Crystal Lithium Niobate. J. Microelectromech. Syst. 2021, 30, 384–391. [Google Scholar] [CrossRef]
- Obitani, K.; Qian, J.; Tsuchiya, T.; Araya, K.; Yachi, M. Electrode Design of Single Crystal Lithium Niobate Piezoelectric Disk Gyroscope. In Proceedings of the 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Hiroshima, Japan, 23–26 March 2020; IEEE: Piscataway, NJ, USA, 2020; pp. 1–2. [Google Scholar] [CrossRef]
- Erturk, O.; Shambaugh, K.; Park, H.S.; Lee, S.G.; Bhave, S.A. Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes Using PMN-PT. Microsyst. Nanoeng. 2023, 9, 52. [Google Scholar] [CrossRef]
- Xie, L.; Wu, X.; Li, S.; Wang, H.; Su, J.; Dong, P. A Z-Axis Quartz Cross-Fork Micromachined Gyroscope Based on Shear Stress Detection. Sensors 2010, 10, 1573–1588. [Google Scholar] [CrossRef] [PubMed]
- Yang, J.; Si, C.; Yang, F.; Han, G.; Ning, J.; Yang, F.; Wang, X. Design and Simulation of a Novel Piezoelectric AlN-Si Cantilever Gyroscope. Micromachines 2018, 9, 81. [Google Scholar] [CrossRef] [PubMed]
- Cui, R.; Ma, T.; Zhang, W.; Chang, L.; Wang, Z.; Xu, J.; Wei, W.; Cao, H. A New Dual-Mass MEMS Gyroscope Fault Diagnosis Platform. Micromachines 2023, 14, 1177. [Google Scholar] [CrossRef] [PubMed]
- Sun, Z.; Sun, L.; Dou, G. Recent Advances in Quartz Single-Crystal Micromechanical Gyroscopes. Micro Nano Electron. Technol. 2024, 61, 1–12. [Google Scholar]
- Lee, S.H.; Cho, J.; Lee, S.W.; Zaman, M.F.; Ayazi, F.; Najafi, K. A Low-Power Oven-Controlled Vacuum Package Technology for High-Performance MEMS. In Proceedings of the 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, 25–29 January 2009; IEEE: Piscataway, NJ, USA, 2009; pp. 753–756. [Google Scholar] [CrossRef]
- Ma, W.; Li, S.; Yu, J. Development of a Micro-Gyroscope Driven and Sensed by PZT Thin Films. Piezoelectr. Acoustoopt. 2001, 23, 18–22. [Google Scholar]
- Zhang, K.; Huang, D.; Wang, J. A Study on a Beam-Type Piezoelectric Vibration Gyroscope. In Proceedings of the 2020 Western Acoustics Academic Exchange Conference, Nanjing, China, 20–22 November 2020; pp. 1–6. [Google Scholar]
- Ontronen, A.; Kaajakari, V.; Ishii, M.; Sakamoto, C.; Umezawa, S.; Aida, Y. A PiezoMEMS Lissajous Frequency Modulated Gyroscope: Stability, Vibration Robustness and Challenges. IEEE Sens. J. 2024, 24, 34170–34178. [Google Scholar] [CrossRef]
- Ayazi, F.; Najafi, K. A HARPSS Polysilicon Vibrating Ring Gyroscope. J. Microelectromech. Syst. 2001, 10, 169–179. [Google Scholar] [CrossRef]
- Hodjat-Shamami, M.; Ayazi, F. Eigenmode Operation of Piezoelectric Resonant Gyroscopes. Microsyst. Nanoeng. 2020, 6, 108. [Google Scholar] [CrossRef]
- Qi, Z.; Gu, J.; Zhu, B.; Zhai, Z.; Bie, X.; Yang, W.; Zou, X. Design, Modeling, and Fabrication of a High-Q AlN Annular Gyroscope with Sub-10°/h Bias Instability. Micromachines 2026, 17, 268. [Google Scholar] [CrossRef] [PubMed]
- Qi, Z.; Wang, B.; Zhai, Z.; Wang, Z.; Xiong, X.; Yang, W.; Bie, X.; Wang, Y.; Zou, X. Bridging Piezoelectric and Electrostatic Effects: A Novel Piezo-MEMS Pitch/Roll Gyroscope with Sub-10°/h Bias Instability. Microsyst. Nanoeng. 2024, 10, 160. [Google Scholar] [CrossRef]
- Wu, X.; Lu, Y.; Chen, W. Modal and Resonance Analysis of a Piezoelectric Micro-Solid-State Gyroscope. J. Sens. Technol. 2008, 21, 2014–2019. [Google Scholar]
- Chen, W.; Zhang, L.; Yang, S.; Jia, W.; Zhang, S.; Gu, Y.; Lou, L.; Wu, G. Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators. Micromachines 2021, 12, 1118. [Google Scholar] [CrossRef] [PubMed]
- Su, Y.; Dou, X.; Gao, W.; Peng, L.X.; Zhang, L.; Liu, K.; Xi, X.W. Research Status and Development Trends of Rotary Steerable System. Drill. Prod. Technol. 2024, 47, 1–8. [Google Scholar] [CrossRef]
- Liu, Y.; Wang, C.; Luo, G.; Ji, W. Design and Applications of Drilling Trajectory Measurement Instrumentation in an Ultra-Deep Borehole Based on a Fiber-Optic Gyro. Geosci. Instrum. Methods Data Syst. 2020, 9, 79–104. [Google Scholar] [CrossRef]
- Ledroz, A.G.; Pecht, E.; Cramer, D.; Mintchev, M.P. FOG-Based Navigation in Downhole Environment During Horizontal Drilling Utilizing a Complete Inertial Measurement Unit: Directional Measurement-While-Drilling Surveying. IEEE Trans. Instrum. Meas. 2005, 54, 1997–2006. [Google Scholar] [CrossRef]
- Yang, H.; Qin, B.; Wei, S.; Zhang, Y.; Gao, S. A Drilling Combination Positioning Method Based on Geomagnetic/Inertial Navigation Combined with PSD Improved Unscented Kalman Filtering Algorithm. Meas. Sci. Technol. 2024, 35, 036302. [Google Scholar] [CrossRef]
- Li, X.; Yao, Z.; Zhang, T.; Chang, Z. Sensing While Drilling and Intelligent Monitoring Technology: Research Progress and Application Prospects. Sensors 2025, 25, 6368. [Google Scholar] [CrossRef] [PubMed]
- Wang, J.; Liao, Q.; Zhao, H.; Zhang, H.; Zhong, C.; Shi, C.; Qin, L. Piezoelectric materials and piezoelectric acceleration sensors for 250 °C applications. J. Alloys Compd. 2025, 1045, 184665. [Google Scholar] [CrossRef]
- Wang, J.; Liao, Q.; Li, Y.; Zhang, H.; Xu, Y.; Zhang, S.; Qin, L. Modified PZT and its application on miniaturized high-sensitivity accelerometers. Chem. Phys. Lett. 2026, 882, 142472. [Google Scholar] [CrossRef]
- Yuan, Y.; Zhang, X.; Yu, H.; Zhong, C.; Wang, Y.; Wen, D.; Xu, T.; Gherardi, F. Research Progress and Technical Challenges of Geothermal Energy Development from Hot Dry Rock: A Review. Energies 2025, 18, 1742. [Google Scholar] [CrossRef]
- Xu, H.; Wang, L.; Zu, Y.; Gou, W.; Hu, Y. Application and Development of Fiber Optic Gyroscope Inertial Navigation System in Underground Space. Sensors 2023, 23, 5627. [Google Scholar] [CrossRef] [PubMed]
- Liu, Y.M.; Wang, J.; Ji, W.F. Temperature Field Finite Element Analysis of the Ultra-High Temperature Borehole Inclinometer Based on FOG and Its Optimization Design. Chem. Eng. Trans. 2016, 51, 709–714. [Google Scholar]
- Zhao, Y.; Sun, T.; Chen, Y.; Wang, W. Intelligent Identification of Drilling Operation Statuses Under Ultra-Deep High-Temperature and High-Pressure Conditions. Processes 2026, 14, 1237. [Google Scholar] [CrossRef]
- Reinsch, T.; Henninges, J. Temperature-Dependent Characterization of Optical Fibres for Distributed Temperature Sensing in Hot Geothermal Wells. Meas. Sci. Technol. 2010, 21, 094022. [Google Scholar] [CrossRef]
- Wang, Q.-K.; Li, C.-H.; Yan, Y. Advanced Measuring (Instrumentation) Methods for Nuclear Installations: A Review. Sci. Technol. Nucl. Install. 2012, 2012, 672876. [Google Scholar] [CrossRef]
- Zhang, Q.; Liu, Y.; Li, H.; Wang, J.; Wang, Y.; Cheng, F.; Han, H.; Zhang, P. A Review of SiC Sensor Applications in High-Temperature and Radiation Extreme Environments. Sensors 2024, 24, 7731. [Google Scholar] [CrossRef] [PubMed]
- Mei, A.; Zhou, G. Calculation and Analysis of Temperature Field in a Control Moment Gyroscope for Spacecraft. J. Chongqing Univ. 2025, 48, 41–50. [Google Scholar] [CrossRef]
- Wang, Z.; Wang, G.; Kumar, S.; Marques, C.; Min, R.; Li, X. Recent Advancements in Resonant Fiber Optic Gyro—A Review. IEEE Sens. J. 2022, 22, 18240–18252. [Google Scholar] [CrossRef]
- Zhang, Y.; Wu, Y.; Xu, X.; Xi, X.; Wu, X. Research on the Method to Improve the Vibration Stability of Vibratory Cylinder Gyroscopes Under Temperature Variation. Int. J. Precis. Eng. Manuf. 2017, 18, 1813–1819. [Google Scholar] [CrossRef]
- Yang, S.; Wu, Z.; Jia, W.; Wu, G. Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope. J. Microelectromech. Syst. 2021, 31, 6–8. [Google Scholar] [CrossRef]
- Perrier, T.; Le Traon, O.; Levy, R.; aniaud, D. Gytrix, a Novel Axisymmetric Quartz MEMS Gyroscope for Navigation Purpose. In Proceedings of the 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Waikoloa, HI, USA, 22–25 May 2022; IEEE: Piscataway, NJ, USA, 2022. [Google Scholar] [CrossRef]
- Qu, T.; Zhou, G.; Xue, X.; Teng, J. Cylindrical Shell Vibration Gyroscope Excited and Detected by High-Temperature-Sintered Piezoelectric Ceramic Electrodes. Sensors 2020, 20, 5972. [Google Scholar] [CrossRef] [PubMed]
- Chen, S.; Wang, Y.; Xu, R.; Jiang, B.; Qiu, F.; Shao, Q.; Zhang, D. Research Progress on Toughening Technology of Quartz Ceramics. Adv. Ceram. 2025, 46, 416–430. [Google Scholar] [CrossRef]
- Huang, F.; Yue, W.; Li, J.; Wang, D. Ceramic Substrate for Electronic Packaging and Its Metallization Process. Adv. Ceram. 2024, 45, 489–519. [Google Scholar] [CrossRef]
- Bu, F.; Guo, S.; Fan, B.; Wang, Y. Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method. Micromachines 2022, 13, 419. [Google Scholar] [CrossRef] [PubMed]
- Descharles, M.; Guérard, J.; Kokabi, H.; Le Traon, O. Closed-Loop Compensation of the Cross-Coupling Error in a Quartz Coriolis Vibrating Gyro. Sens. Actuators A Phys. 2012, 181, 25–32. [Google Scholar] [CrossRef]
- Li, S.; Zhu, Z.; Yang, Y. Temperature Characteristics of Quartz Tuning Fork Gyroscopes and Methods for Their Compensation. Piezoelectr. Acoustoopt. 2015, 37, 504–511. [Google Scholar]
- Di, X.; Chen, W.; Liu, X. A Digital Interface Integration Circuit Design for High Precision Quartz-Gyro. Mod. Phys. Lett. B 2019, 33, 1950222. [Google Scholar] [CrossRef]
- Zhang, H.; Chen, W.; Yin, L.; Fu, Q. An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving. Sensors 2023, 23, 2615. [Google Scholar] [CrossRef] [PubMed]
- Feng, L.; Wang, R.; Tang, Y. A Study on Self-Sensing-Based Digital Quartz Gyroscope Attitude Compensation Technology. Autom. Instrum. 2020, 35, 1–5. [Google Scholar]
- Cohen, N.; Klein, I. Inertial Navigation Meets Deep Learning: A Survey of Current Trends and Future Directions. Results Eng. 2024, 24, 103565. [Google Scholar] [CrossRef]
- Tan, W.; Wang, Y.; Wang, X. A Novelty Temperature Compensation Model for DMVMG Based on Machine Learning and TTAO-VMD Algorithm. Micromachines 2026, 17, 120. [Google Scholar] [CrossRef] [PubMed]
- Zhang, Z.; Zhang, J.; Zhu, X.; Ren, Y.; Yu, J.; Cao, H. MEMS Gyroscope Temperature Compensation Based on ICEEMDAN and Optimized Extreme Learning Machine. Micromachines 2024, 15, 609. [Google Scholar] [CrossRef] [PubMed]
- Cao, H.; Cui, R.; Liu, W.; Ma, T.; Zhang, Z.; Shen, C.; Shi, Y. Dual Mass MEMS Gyroscope Temperature Drift Compensation Based on TFPF-MEA-BP Algorithm. Sens. Rev. 2021, 41, 162–175. [Google Scholar] [CrossRef]
- Ouyang, M.; Gao, J.; Li, A.; Zhang, X.; Shen, C.; Cao, H. Micromechanical Gyroscope Temperature Compensation Based on Combined LSTM-SVM-DBN Algorithm. Sens. Actuators A Phys. 2024, 369, 115128. [Google Scholar] [CrossRef]
- Pan, J.; Zhang, D.; Liu, S.; Wang, J.; Shao, J. Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms. Coatings 2025, 15, 700. [Google Scholar] [CrossRef]
- Gu, L.; Zhang, W.; Lu, H.; Wu, Y.; Fan, C. Machine Learning Algorithm for the Structural Design of MEMS Resonators. Microelectron. Eng. 2023, 271–272, 111950. [Google Scholar] [CrossRef]
- Wu, F.; Luo, H.; Jia, H.; Jia, H.; Zhao, F.; Xiao, Y.; Gao, X. Predicting the Noise Covariance with a Multitask Learning Model for Kalman Filter-Based GNSS/INS Integrated Navigation. IEEE Trans. Instrum. Meas. 2020, 70, 1–13. [Google Scholar] [CrossRef]
- Cohen, N.; Klein, I. Adaptive Kalman-Informed Transformer. Eng. Appl. Artif. Intell. 2025, 146, 110221. [Google Scholar] [CrossRef]
- Wu, J.; Zhao, Z.; Sun, C.; Yan, R.; Chen, X. Fault-Attention Generative Probabilistic Adversarial Autoencoder for Machine Anomaly Detection. IEEE Trans. Ind. Inform. 2020, 16, 7479–7488. [Google Scholar] [CrossRef]
- Madni, A.M.; Costlow, L.E. Common Design Techniques for Quartz Rate Sensors for Both Automotive and Aerospace/Defense Market Applications. In Proceedings of the IEEE Sensors 2002, Orlando, FL, USA, 12–14 June 2002; IEEE: Piscataway, NJ, USA, 2002; Volume 2, pp. 1597–1604. [Google Scholar] [CrossRef]
- Zotov, S.; Srivastava, A.; Kwon, K.; Frank, J.; Parco, E.; Williams, M.; Shtigluz, S.; Lyons, K.; Frazee, M.; Hoyh, D.; et al. In-Run Navigation Grade Quartz MEMS-Based IMU. In Proceedings of the 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Hiroshima, Japan, 23–26 March 2020; IEEE: Piscataway, NJ, USA, 2020; pp. 1–4. [Google Scholar] [CrossRef]
- Lu, X.; Liu, G.; Lu, J. Development of Ceramic 3D/4D Printing in China. Addit. Manuf. Front. 2024, 3, 200158. [Google Scholar] [CrossRef]
- Soori, M.; Arezoo, B. Smart materials and alloys for additive manufacturing integration: A review. Addit. Manuf. Front. 2025, 4, 200242. [Google Scholar] [CrossRef]
- Zhao, H.; Liao, Q.; Li, Y.; Chu, X.; Yuan, S.; Qin, L. Additive Manufacturing of Silicon Carbide Microwave-Absorbing Metamaterials. Addit. Manuf. Front. 2025, 4, 200186. [Google Scholar] [CrossRef]
- Wang, J.; Duan, T.; Liao, J.; Wang, Z.; Huang, X.; Jia, S.; Bao, K.; Fan, Y.; Zeng, B.; Jiang, L.; et al. Flexible and wake-up free Hf0.5Zr0.5O2 ferroelectric thin films with ultra-low operation voltage and high polarization. J. Adv. Ceram. 2024, 13, 1844–1851. [Google Scholar] [CrossRef]




| Technology | Bias Stability (°/h) | ARW (°/√h) | Dynamic Range (°/s) | Size | Power Consumption (W) | Operating Temperature | Shock/Vibration Resistance | Cost | Maturity | Refs. |
|---|---|---|---|---|---|---|---|---|---|---|
| Spinning-mass | <0.01 | <0.001 | ~200 | Large | ~30 | Moderate | Poor | Very high | Mature | [5,7] |
| RLG | <0.01 | <0.001 | ≥±400 | Large | 5–10 | Moderate | Moderate | Very high | Mature | [5,7] |
| FOG | <0.1 | <0.01 | ±500 | Medium | ~4 | Moderate | Excellent | High | Mature | [12,13] |
| RFOG | <0.1 | <0.001 | — | Medium | — | Moderate | High | High | Developing | [13,14] |
| RMOG | <1 | — | — | Small | — | — | High | Medium | Research | [13,14] |
| HRG | <0.01 | <0.01 | ±10 | Medium | ~20 | Wide | Good | Very high | Mature | [15,16,17] |
| Capacitive MEMS | <30 | <1 | ±250– ±2000 | Very Small | ~1.6 m | Narrow | Poor | Low | Mature | [18] |
| Piezoelectric MEMS | <10 | <1 | — | Small | ~1.6 m | Wide | Excellent | Medium | Developing | [19] |
| Material | Composition | Tc (°C) | Td (°C) | d33 (pC/N) | εr | tan δ (%) | Qm | CMOS Copat. | Aging/Fatigue | Suitability for Gyroscopes | Max Temp (°C) | Refs. |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PZT-PSN | 0.02PSN-0.51PZ-0.47PT + 0.4 mol% ZnO | ~350 | ~330 | 562 | — | — | — | No | <7% (20–330 °C) | unknown | 330 | [32] |
| PZT-PYN | 0.10PYN-0.42PZ-0.48PT + 1 mol% Nb5+ | ~389 | 512 | — | — | — | No | unknown | 389 | [34] | ||
| PZT-PIZZT | 0.28PIN-0.32PZN-(0.4-x)PT-xPZ | ~272 | 450 | ~2600 | — | — | No | high-T gyro | — | [35] | ||
| LiNbO3 single crystal | — | ~1210 | >600 | ~6 | ~30 | ~0.3 | >10 | No | Excellent | Resonator gyroscopes | >600 | [37,38] |
| LiNbO3 doped ceramic | (0.73-x)BFO-xLNO-0.27BT | 535 | 180 | — | — | — | No | Good | unknown | 535 | [39] | |
| AlN thin film | — | >2000 | ~6.5 | ~10 | <0.1 | >3000 | Yes | No fatigue after 10,000 cycles | MEMS gyro | 1150 (Ar) | [40,41] | |
| PMN-PT textured | PMN-31PT + 3 vol% BT | 134 | ~90 –100 | 1020 | — | — | — | No | unknown | 214 | [42,43] | |
| KNN-BNKZ-CZ | (1-x)(0.96KNNT-0.04BNKZ)-xCZ | ~200 | 300 | — | — | — | Partial | Limited applicability | 200 | [46] | ||
| KNN-textured | KNN-T1 (textured + multilayer) | >180 | 467 | — | Lower than nontextured | — | Partial | Good T stability (R-O-T phases) | Limited applicability | 180 | [47] |
| Structure | Material | Test Temp. (°C) | Bias Stability (°/h) | ARW (°/√h) | Q Factor | Drive/Detect. | Refs. |
|---|---|---|---|---|---|---|---|
| Disc | LiNbO3 155°Y-cut | RT | 640 | — | 530–1100 | Piezoelectric | [61,62] |
| Tuning-fork | Quartz | RT | — | — | 1000 | Piezoelectric | [55,56] |
| Beam | AlN-Si composite | RT | — | — | 3000 | Piezoelectric | [59] |
| Mass-coupled | AlN thin film | RT | 5 | 0.111 | — | Piezoelectric | [61] |
| Ring | AlN-on-Si | RT | 8.19 | 0.34 | 75,000 | Piezoelectric | [64] |
| Cylindrical shell | QSAW | RT | — | — | 1616 | Piezoelectric | [67] |
| Application | Temp. (°C) | Pressure (MPa) | Shock Vibration | Radiation | Bias Stability (°/h) | ARW (°/√h) | Bandwidth (Hz) | Lifetime | Packaging | Size/ Power | Section |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Oil & gas (MWD/LWD) | 200–300 | >200 | High | Low | (<10) | (<1) | 50–100 | >1000 h (>200 °C) | Hermetic metal/ ceramic seal (Ti/SS housing) | Small/Low | Section 5.1 |
| Geothermal drilling | 150–300 | — | High | Low | (<10) | (<1) | 50–100 | >1000 h (~300 °C) | SOI + vacuum-sealed MEMS + ceramic package | Compact | Section 5.2 |
| Nuclear facilities | 120–350 | — | Moderate | High | (<1) | (<0.1) | 10–50 | >10 years | Radiation hardened hermetic metal-ceramic seal | Medium/ Low | Section 5.3 |
| Aeroengine monitoring | >1000 | — | Very high | Low | (<0.1) | (<0.01) | 100–1000 | >100,000 h | Uncooled miniaturized high-temp metal/ ceramic package | Miniature | Section 5.4 |
| High-temp manufacturing | 200–600 | 0.1 | Moderate | Low | (<30) | (<1) | 10–100 | >5 years | Compact high-temp chemical- | Compact | Section 5.4 |
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Liu, X.; Liao, Q.; Zhang, S.; He, Y.; Tang, M.; Qin, L. High-Temperature Piezoelectric Gyroscopes for Harsh Industrial Environments: A Review of Materials, Structural Design, and Circuitry. Coatings 2026, 16, 810. https://doi.org/10.3390/coatings16070810
Liu X, Liao Q, Zhang S, He Y, Tang M, Qin L. High-Temperature Piezoelectric Gyroscopes for Harsh Industrial Environments: A Review of Materials, Structural Design, and Circuitry. Coatings. 2026; 16(7):810. https://doi.org/10.3390/coatings16070810
Chicago/Turabian StyleLiu, Xinyu, Qingwei Liao, Shuhan Zhang, Yifan He, Meng Tang, and Lei Qin. 2026. "High-Temperature Piezoelectric Gyroscopes for Harsh Industrial Environments: A Review of Materials, Structural Design, and Circuitry" Coatings 16, no. 7: 810. https://doi.org/10.3390/coatings16070810
APA StyleLiu, X., Liao, Q., Zhang, S., He, Y., Tang, M., & Qin, L. (2026). High-Temperature Piezoelectric Gyroscopes for Harsh Industrial Environments: A Review of Materials, Structural Design, and Circuitry. Coatings, 16(7), 810. https://doi.org/10.3390/coatings16070810

