Yuan, X.; Bai, X.; Huang, K.; Wei, J.; Chen, L.; Liu, J.; Li, C.; Wang, W.
Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy. Coatings 2025, 15, 1481.
https://doi.org/10.3390/coatings15121481
AMA Style
Yuan X, Bai X, Huang K, Wei J, Chen L, Liu J, Li C, Wang W.
Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy. Coatings. 2025; 15(12):1481.
https://doi.org/10.3390/coatings15121481
Chicago/Turabian Style
Yuan, Xiaolu, Xueyang Bai, Ke Huang, Junjun Wei, Liangxian Chen, Jinlong Liu, Chengming Li, and Wenrui Wang.
2025. "Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy" Coatings 15, no. 12: 1481.
https://doi.org/10.3390/coatings15121481
APA Style
Yuan, X., Bai, X., Huang, K., Wei, J., Chen, L., Liu, J., Li, C., & Wang, W.
(2025). Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy. Coatings, 15(12), 1481.
https://doi.org/10.3390/coatings15121481