Characterization of Indium Tin Oxide (ITO) Thin Films towards Terahertz (THz) Functional Device Applications
Abstract
1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. Sturcture, Surface Morphology and Composition
3.2. THz Optical and Electrical Properties
3.3. Annealing Effects on UV-VIS-NIR Optical Properties of ITO Films
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Sample | O K | In L | Sn L | |||
---|---|---|---|---|---|---|
Weight (%) | Atomic (%) | Weight (%) | Atomic (%) | Weight (%) | Atomic (%) | |
As- | 22.78 | 68.01 | 67.44 | 28.05 | 9.77 | 3.93 |
600 °C | 22.98 | 68.23 | 69.48 | 28.75 | 7.54 | 3.02 |
800 °C | 24.71 | 70.27 | 66.90 | 26.51 | 8.38 | 3.21 |
Parameters | As- | 400 °C | 600 °C | 800 °C |
---|---|---|---|---|
µ (cm2/V∙s) | 5.3 | 22 | 47 | 14 |
ωp* (rad·THz) | 1784 | 1865 | 1294 | 839 |
τ (fs) | 6 | 12 | 21 | 20 |
c | −0.83 | −0.68 | −0.63 | −0.87 |
Nc (cm−3) | 1.02 × 1021 | 1.31 × 1021 | 6.31 × 1020 | 2.65 × 1019 |
σdc (Ω−1cm−1) | 1019 | 4815 | 4792 | 628 |
ρ (Ω‧cm) | 9.8 × 10−4 | 2.0 × 10−4 | 2.0 × 10−4 | 15.9 × 10−4 |
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Sahoo, A.K.; Au, W.-C.; Pan, C.-L. Characterization of Indium Tin Oxide (ITO) Thin Films towards Terahertz (THz) Functional Device Applications. Coatings 2024, 14, 895. https://doi.org/10.3390/coatings14070895
Sahoo AK, Au W-C, Pan C-L. Characterization of Indium Tin Oxide (ITO) Thin Films towards Terahertz (THz) Functional Device Applications. Coatings. 2024; 14(7):895. https://doi.org/10.3390/coatings14070895
Chicago/Turabian StyleSahoo, Anup Kumar, Wei-Chen Au, and Ci-Ling Pan. 2024. "Characterization of Indium Tin Oxide (ITO) Thin Films towards Terahertz (THz) Functional Device Applications" Coatings 14, no. 7: 895. https://doi.org/10.3390/coatings14070895
APA StyleSahoo, A. K., Au, W.-C., & Pan, C.-L. (2024). Characterization of Indium Tin Oxide (ITO) Thin Films towards Terahertz (THz) Functional Device Applications. Coatings, 14(7), 895. https://doi.org/10.3390/coatings14070895