Order Article Reprints
Journal: Coatings, 2023
Volume: 13
Number: 1281
Article:
Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering
Authors:
by
Vladimir R. Shayapov, Alena L. Bogoslovtseva, Sergey Yu. Chepkasov, Igor P. Asanov, Evgeny A. Maksimovskiy, Aleksandr V. Kapishnikov, Maria I. Mironova, Alina V. Lapega and Pavel V. Geydt
Link:
https://www.mdpi.com/2079-6412/13/7/1281
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