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Journal: Coatings, 2023
Volume: 13
Number: 1281

Article: Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering
Authors: by Vladimir R. Shayapov, Alena L. Bogoslovtseva, Sergey Yu. Chepkasov, Igor P. Asanov, Evgeny A. Maksimovskiy, Aleksandr V. Kapishnikov, Maria I. Mironova, Alina V. Lapega and Pavel V. Geydt
Link: https://www.mdpi.com/2079-6412/13/7/1281

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