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Shayapov VR, Bogoslovtseva AL, Chepkasov SY, Asanov IP, Maksimovskiy EA, Kapishnikov AV, Mironova MI, Lapega AV, Geydt PV. Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering. Coatings. 2023; 13(7):1281. https://doi.org/10.3390/coatings13071281

Shayapov, Vladimir R., Alena L. Bogoslovtseva, Sergey Yu. Chepkasov, Igor P. Asanov, Evgeny A. Maksimovskiy, Aleksandr V. Kapishnikov, Maria I. Mironova, Alina V. Lapega, and Pavel V. Geydt. 2023. "Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering" Coatings 13, no. 7: 1281. https://doi.org/10.3390/coatings13071281

Shayapov, V. R., Bogoslovtseva, A. L., Chepkasov, S. Y., Asanov, I. P., Maksimovskiy, E. A., Kapishnikov, A. V., Mironova, M. I., Lapega, A. V., & Geydt, P. V. (2023). Chemical Composition, Structure, and Physical Properties of AlN Films Produced via Pulsed DC Reactive Magnetron Sputtering. Coatings, 13(7), 1281. https://doi.org/10.3390/coatings13071281