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Journal: Coatings, 2022
Volume: 12
Number: 431
431
Article: Structure and Electrical Properties of Zirconium-Aluminum-Oxide Films Engineered by Atomic Layer Deposition
Authors: by Joonas Merisalu, Taivo Jõgiaas, Toomas Daniel Viskus, Aarne Kasikov, Peeter Ritslaid, Tanel Käämbre, Aivar Tarre, Jekaterina Kozlova, Hugo Mändar, Aile Tamm, Jaan Aarik and Kaupo Kukli
Link: https://www.mdpi.com/2079-6412/12/4/431

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