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Journal: Coatings, 2021
Volume: 11
Number: 1041

Article: Theoretical Analysis of Si2H6 Adsorption on Hydrogenated Silicon Surfaces for Fast Deposition Using Intermediate Pressure SiH4 Capacitively Coupled Plasma
Authors: by Hwanyeol Park and Ho Jun Kim
Link: https://www.mdpi.com/2079-6412/11/9/1041

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