Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

Ma, Youcao; Song, Jian; Wang, Xubo; Liu, Yue; Zhou, Jia

doi:10.3390/coatings11080944

Open AccessFeature PaperEditor’s ChoiceReview

Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

by

Youcao Ma

¹

,

Jian Song

²,

Xubo Wang

¹

,

Yue Liu

^2,*

and

Jia Zhou

^1,*

¹

State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China

²

State Key Laboratory of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

^*

Authors to whom correspondence should be addressed.

Coatings 2021, 11(8), 944; https://doi.org/10.3390/coatings11080944

Submission received: 14 June 2021 / Revised: 4 August 2021 / Accepted: 4 August 2021 / Published: 7 August 2021

(This article belongs to the Special Issue Nanocomposite Thin Film and Multilayers)

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Abstract

Compared to aluminum nitride (AlN) with simple stoichiometry, lead zirconate titanate thin films (PZT) are the other promising candidate in advanced micro-electro-mechanical system (MEMS) devices due to their excellent piezoelectric and dielectric properties. The fabrication of PZT thin films with a large area is challenging but in urgent demand. Therefore, it is necessary to establish the relationships between synthesis parameters and specific properties. Compared to sol-gel and pulsed laser deposition techniques, this review highlights a magnetron sputtering technique owing to its high feasibility and controllability. In this review, we survey the microstructural characteristics of PZT thin films, as well as synthesis parameters (such as substrate, deposition temperature, gas atmosphere, and annealing temperature, etc.) and functional proper-ties (such as dielectric, piezoelectric, and ferroelectric, etc). The dependence of these influential factors is particularly emphasized in this review, which could provide experimental guidance for researchers to acquire PZT thin films with expected properties by a magnetron sputtering technique.

Keywords: PZT thin films; magnetron sputtering; fabrication; microstructure; properties

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MDPI and ACS Style

Ma, Y.; Song, J.; Wang, X.; Liu, Y.; Zhou, J. Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings. Coatings 2021, 11, 944. https://doi.org/10.3390/coatings11080944

AMA Style

Ma Y, Song J, Wang X, Liu Y, Zhou J. Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings. Coatings. 2021; 11(8):944. https://doi.org/10.3390/coatings11080944

Chicago/Turabian Style

Ma, Youcao, Jian Song, Xubo Wang, Yue Liu, and Jia Zhou. 2021. "Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings" Coatings 11, no. 8: 944. https://doi.org/10.3390/coatings11080944

APA Style

Ma, Y., Song, J., Wang, X., Liu, Y., & Zhou, J. (2021). Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings. Coatings, 11(8), 944. https://doi.org/10.3390/coatings11080944

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Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

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