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Journal: Coatings, 2021
Volume: 11
Number: 542
Article:
Hydrogen and Deuterium Incorporation in ZnO Films Grown by Atomic Layer Deposition
Authors:
by
Sami Kinnunen, Manu Lahtinen, Kai Arstila and Timo Sajavaara
Link:
https://www.mdpi.com/2079-6412/11/5/542
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