Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties
Abstract
:1. Introduction
2. Fabrication
3. Measurement and Discussion
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Samples | Average Width of Nanozigzag (nm) | Thicknesses (nm) | Deposition Time (min) |
---|---|---|---|
60 | 90.4 | 396 | |
66 | 132.52 | 608 | |
56 | 91.09 | 408 | |
53 | 91.45 | 408 | |
49 | 91.35 | 408 | |
47 | 89.67 | 408 |
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Jen, Y.-J.; Ma, W.-C.; Lin, T.-Y. Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties. Coatings 2021, 11, 1418. https://doi.org/10.3390/coatings11111418
Jen Y-J, Ma W-C, Lin T-Y. Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties. Coatings. 2021; 11(11):1418. https://doi.org/10.3390/coatings11111418
Chicago/Turabian StyleJen, Yi-Jun, Wei-Chieh Ma, and Ting-Yen Lin. 2021. "Obliquely Bideposited TiN Thin Film with Morphology-Dependent Optical Properties" Coatings 11, no. 11: 1418. https://doi.org/10.3390/coatings11111418