Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of TixZr1−xN Films
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. Surface Morphology and Surface Composition
3.2. Cross-Sectional Morphology and Elemental Distribution
3.3. Phase Structure and Preferred Growth Orientation
3.4. Hardness
4. Conclusions
- The surface and cross-sectional morphologies and the deposition rate of TixZr1−xN films with varying Zr/Ti molar ratios were similar when the deposition conditions such as N2 gas flow and maintaining the total arc current at 110 A during evaporation of any two of the Ti, Zr, and TiZr targets were maintained.
- The FCC structure of the films was retained while the lattice constant increased monotonically with increasing Zr/Ti molar ratio, consistent with Vegard’s law.
- The preferred growth orientations of the films were affected by their composition. When the Zr/Ti molar ratio was 40:60 or 60:40, the films showed preferred growth orientation in the (111) and (220) crystal planes; however, at other compositions, the films exhibited a preferred growth only in the (111) crystal plane. A symmetrical distribution in the preferred growth orientation relative to the Zr/Ti molar ratio 50:50 was displayed.
- The films exhibited a quasi-parabolic hardness distribution. The maximum hardness was observed at a Zr/Ti ratio of 40:60. An inflection point with a small reduction in hardness occurred at a Zr/Ti ratio of 50:50, after which the hardness increased as Zr/Ti ratio increased from 40:60 to 60:40.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Conflicts of Interest
References
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Sample No. | Cathodic Arc Current (A) | ||
---|---|---|---|
Ti Target | Zr Target | Ti-Zr Alloy Target | |
1 | 62 | – | 48 |
2 | 55 | – | 55 |
3 | 48 | – | 62 |
4 | 62 | 48 | – |
5 | 54 | 56 | – |
6 | 48 | 62 | – |
7 | – | 48 | 62 |
8 | – | 62 | 48 |
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Zhang, J.; Peng, L.; Wang, X.; Liu, D.; Wang, N. Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of TixZr1−xN Films. Coatings 2021, 11, 1342. https://doi.org/10.3390/coatings11111342
Zhang J, Peng L, Wang X, Liu D, Wang N. Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of TixZr1−xN Films. Coatings. 2021; 11(11):1342. https://doi.org/10.3390/coatings11111342
Chicago/Turabian StyleZhang, Jun, Lijing Peng, Xiaoyang Wang, Dongling Liu, and Nan Wang. 2021. "Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of TixZr1−xN Films" Coatings 11, no. 11: 1342. https://doi.org/10.3390/coatings11111342
APA StyleZhang, J., Peng, L., Wang, X., Liu, D., & Wang, N. (2021). Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of TixZr1−xN Films. Coatings, 11(11), 1342. https://doi.org/10.3390/coatings11111342